Piezoelectric Actuators and Translators
PI Piezo Actuator Catalog (1998)
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>> 2006 PI Piezo Solutions Online Catalog
>> 2006 PI Piezo Tutorial
PZT Actuators
PZT Actuators.............................................................................................................................2
PZT Actuator Selection Guide.................................................................................................3
Introduction to PZT Actuators..................................................................................................4
P-410 PICO Ultra-High Precision Closed Loop PZT Translators..........................................6
P-249 Miniature Open Loop High Voltage PZT Translators....................................................8
P-802.00, P-802.10, P-804.10 Open Loop Low Voltage PZT Translators..........................10
P-250 Micrometer Mountable Open Loop High Voltage PZT Translator...............................12
P-810 Small Load Open Loop Low Voltage PZT Translators..............................................14
P-830 Open Loop Low Voltage PZT Translators.................................................................16
P-820 Small Load Open Loop Low Voltage PZT Translators..............................................18
P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translators....................20
P-842, P-843 Preloaded Open & Closed Loop Low Voltage PZT Translators....................22
P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translators....................24
P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translators..................................26
P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translators.....................28
P-239 Preloaded Open & Closed Loop High Voltage PZT Translators................................ 30
P-242, P-246 Preloaded Open & Closed Loop High Load High Voltage PZT Translators...32
P-243, P-247 Preloaded Open & Closed Loop EHL High Voltage PZT Translators.............34
P-286, P-288, P-289 High Voltage PZT Disk Translators.....................................................36
P-803 OEM Multilayer Low Voltage PZT Bender Actuators.................................................38
P-305, P-306 OEM Tubular High Voltage Piezoelectric Stack Translators........................................39
PT120 High Voltage PZT Tube Actuators..............................................................................40
Customized Solutions for OEM PZT Ceramic Applications..................................................41
Piezoceramic Materials......................................................................................................41
OEM PZT Translators........................................................................................................43
Options and Accessories......................................................................................................44
Factory Installed Options...................................................................................................44
P-177.10 Strain Gage Position Sensor for High Voltage Piezoelectric Stacks ...........44
Extended Temperature Range.......................................................................................44
Vacuum Options.............................................................................................................45
P-705.00 Positive polarity (for High Voltage PZT Piezoelectric Stacks)..........................................45
P-706.xx Water Protected Case.....................................................................................45
Ball tips............................................................................................................................45
Accessories.......................................................................................................................45
P-176.10/20/30 Magnetic Adapter...................................................................................45
P-176.50/60 Flexible Tip.................................................................................................46
Cables and Cable Adapters............................................................................................46
Notes (Technical Data)..........................................................................................................47
PZT Actuator Selection Guide
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|
Models |
Push/ Pull Force Capacity [N] |
Travel Ranges [µm] |
Closed Loop Versions / Sensor |
Notes |
Page |
|
PT120 |
0.1 / 0.1 |
4, 6, 8 |
no |
tube actuator |
39 |
|
P-803 |
1 / 1 |
± 100, 200, 400, 500 |
no |
bender actuator, small dimensions |
37 |
|
P-288 |
10 / 5 |
50 |
no |
disk translator (flat, large travel range) |
36 |
|
P-286, P-289 |
20 / 10 |
100, 200 |
no |
disk translator (flat, large travel range) |
36 |
|
P-810 |
50 / 1 |
15, 30, 45 |
no |
very small, ferromagnetic end pieces |
14 |
|
P-249 |
150 / 3 |
5, 10 |
no |
very small, w/o case |
8 |
|
P-820 |
50 / 10 |
15, 30, 45 |
no |
smallest preloaded translator |
18 |
|
P-250 |
100 / 5 |
20 |
no |
mounts in micrometer tip |
12 |
|
P-802 |
1000 / 5 |
6, 15 |
no |
compact, w/o case |
10 |
|
P-830 |
1000 / 5 |
15, 30, 45, 60 |
no |
small, ferromagnetic end pieces |
16 |
|
P-305 |
500 / 20 |
5, 10, 20, 40 |
yes / strain gage |
clear aperture (tubular stack) |
39 |
|
P-306 |
800 / 40 |
5, 10, 20, 40 |
yes/ strain gage |
clear aperture (tubular piezo stack) |
39 |
|
P-410 |
1000 / 50 |
15, 30, 60 |
yes / capacitive |
extremely high accuracy |
6 |
|
P-840, P-841 |
1000 / 100 |
15, 30, 45, 60, 90 |
yes / strain gage |
preloaded |
20 |
|
P-842, P-843 |
800 / 300 |
15, 30, 45, 60, 90 |
yes / strain gage |
preloaded |
22 |
|
P-170, P-178 |
2000 / 50 |
5, 10, 20, 40, 80 |
yes / strain gage |
choice of top and bottom pieces |
26 |
|
P-244, P-245 |
2000 / 300 |
10, 20, 40, 60, 80, 120 |
yes / strain gage |
preloaded |
28 |
|
P-804 |
3000 / 20 |
15 |
no |
compact, w/o case |
10 |
|
P-844, P-845 |
3000 / 700 |
15, 30, 45, 60, 90 |
yes / strain gage |
preloaded, water protected option |
24 |
|
P-239 |
4500 / 500 |
5, 10, 20, 40, 60, 100, 140, 180 |
yes / strain gage |
preloaded, largest travel ranges (piezo stack actuator) |
30 |
|
P-242, P-246 |
12500 / 2000 |
10, 20, 40, 60, 80, 120 |
yes / strain gage |
preloaded, very stiff, water protected option |
32 |
|
P-243, P-247 |
30000 / 3500 |
10, 20, 40, 60, 80, 120 |
yes / strain gage |
preloaded, very stiff, water protected option |
34 |
Introduction to PIEZOELECTRIC Actuators
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PI offers the largest selection of research and industrial grade Piezo Actuators and Translators (linear actuators) and Piezoelectric Flexure Nanopositioning Stages worldwide. These systems are used for ultra precision motion control applications in fields like semicoductors or data storage. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to our customer's requirements. We are highly vertically integrated, controlling each manufacturing step from piezoelectric raw material to finished systems.
Piezoelectric Actuators offer the following advantages:
· Extremely Low Steady State Power Consumption
· Vacuum and Clean Room Compatibility
· Operation at Cryogenic Temperatures
Applications for Piezo Actuators Include
Optics, Photonics and Measuring Technology
· Image stabilization
· Scanning microscopy
· Auto focus systems
· Interferometry
· Fiber optic alignment & switching
· Adaptive and active optics
· Laser tuning
· Mirror positioning
Disk Drive
· MR head testing
· Pole tip recession
· Spin stands
· Disk testing
· Vibration cancellation
Microelectronics
· Nano-metrology
· Wafer and mask positioning
· Critical dimension measurement
· Microlithography
· Inspection systems
· Vibration cancellation
Precision Mechanics and Mechanical Engineering
· Vibration cancellation
· Structural deformation
· Out-of-roundness grinding, drilling, turning
· Tool adjustment
· Wear correction
· Needle valve actuation
· Micro pumps
· Knife edge control in extrusion tools
· Micro engraving systems
Life Science, Medicine, Biology
· Scanning microscopy
· Patch-clamp
· Gene technology
· Micro manipulation
· Cell penetration
· Micro dispensing devices
For more information on piezoelectric Actuator basics see "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section.
P-410 PIco Ultra-High Precision Closed Loop Piezoelectric Stack Actuator
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· Sub-Nanometer Resolution and Repeatability
· Integrated Capacitive Position Sensor
· Travel to 60 µm
· Fast Response for Maximum Throughput
· Ultra-High Linearity and Long-Term Stability
The new PIco Series of Closed Loop Piezo Translators are ultrahigh-Precision linear actuators for static and dynamic applications. They combine the advantages of piezoceramic actuators and capacitive position sensors in a small package and provide the best combination of Precision, linearity, bandwidth and response of any linear actuator on the market.
Application examples: Disk Drive Test Stands, Nano-Automation, Metrology, Semiconductor Test Equipment, Wafer Steppers, Microlithography, Optics, etc.
PICo Piezo Translators were developed for research and production engineers who want higher Precision, linearity and repeatability than our strain gauge sensor equipped Piezoelectric actuators provide but do not need the sophistication of our Capacitive Position Sensor equipped Piezoelectric Flexure NanoPositioners.
Working principle: The translators are equipped with high reliability Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The motion of the tip is measured by an ultrahigh-Precision capacitive position sensor for precise motion control. PZT actuator, sensor and case materials are matched for optimal thermal stability.
The standard translator tip and base have tapped holes. A ball tip is included in the delivery to help decouple off-axis or torque loads from the translator tip
Fig. P410 P-410 PZT Translators
Fig. P410 P-410 Dimensions
Fig. Response of a P-410.C15 to a 1 Hz, 1 nm square wave control signal (Controller: E-501 & E-507.00 & E-509.C1, bandwidth set to 240 Hz)
|
Models
|
P-410.C15 |
P-410.C30 |
P-410.C60 |
Units |
Notes see p. 47 |
|
Open loop travel @ 0 to -500 V |
15 |
30 |
60 |
µm ± 20 % |
A8 |
|
Closed loop travel ³ |
15 |
30 |
60 |
µm |
A5 |
|
Integrated position feedback sensor |
capacitive |
capacitive |
capacitive |
|
B |
|
Closed / open loop * resolution |
0.1 / 0.1 |
0.2 / 0.2 |
0.4 / 0.4 |
nm |
C4 |
|
Closed loop linearity (typ.) |
0.03 |
0.03 |
0.03 |
% |
|
|
Full range repeatability (typ.) |
0.5 |
1 |
2 |
nm |
C6 |
|
Stiffness |
180 |
100 |
50 |
N/µm ± 20 % |
D1 |
|
Force generation (blocked) |
2700 |
|
|
N ± 20 % |
D2 |
|
Push/pull force capacity |
1000 / 50 |
|
|
N |
D3 |
|
Torque limit (at tip) |
500 |
|
|
mNm |
D6 |
|
Electrical capacitance |
80 |
150 |
310 |
nF ± 20 % |
F1 |
|
Dynamic operating current coefficient (DOCC) |
7 |
7 |
7 |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency (f0) |
12 |
9 |
6.5 |
kHz ± 20 % |
G2 |
|
Standard operating temperature range |
-20 to +80 |
|
|
°C |
H2 |
|
Voltage connection |
VH |
|
|
|
J1 |
|
Sensor connection |
C |
|
|
|
J2 |
|
Weight |
90 |
120 |
180 |
g ± 5 % |
K |
|
Material case / end pieces |
N-S / I |
|
|
|
L |
|
Length L |
50 |
69 |
107.5 |
mm ± 0.5 |
|
|
Recommended Piezo Linear Amplifier / Controller |
J |
|
|
|
M |
* Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-249 Miniature Open Loop High Voltage PZT Stack Translator
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· Displacement to 10 µm
· Sub-millisecond Response
· Sub-Nanometer Precision
· Options: UHV, High & Low Temperature
P-249 Miniature PZT Translators are high Precision linear actuators for static and dynamic applications. They provide subnanometer Precision with submillisecond response.
Due to their high resonant frequency, the translators are ideal for dynamic operation of very light parts. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).
Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39).
Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).
Fig. P249 P-249 PZT Actuators
Fig. P249 P-249 Dimensions
Factory Installed Options: 1)
P-702.10 High Temperature Option (see page 44)
P-702.20 Low Temperature Option (see page 44)
P-703.10 High Vacuum Option (see page 44)
P-705.00 Positive Polarity Option (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-249.10 to P-249.17, and list options separately.
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver
/ High Voltage Linear Amplifier" section for our comprehensive line of low
noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-249
|
Models
|
P-249.10 |
P-249.20 |
Units |
Notes see p. 47 |
|
Open loop travel @ 0 to -1000 V |
5 |
10 |
µm ± 20 % |
A4 |
|
* Open loop resolution < |
0.05 |
0.1 |
nm |
C2 |
|
Stiffness |
20 |
10 |
N/µm ± 20 % |
D1 |
|
Force generation (blocked) |
100 |
100 |
N ± 20 % |
D2 |
|
Push/pull force capacity |
150 / 3 |
150 / 3 |
N |
D3 |
|
Max. operating voltage range |
0 to -1000 |
|
V |
A7 |
|
Electrical capacitance |
6 |
12 |
nF ± 20 % |
F1 |
|
Dynamic operating current coefficient (DOCC) |
1.5 |
|
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency (f0) |
35 |
18 |