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Piezoelectric Actuators and Translators


Piezo Actuators

High Force Piezo Stacks

Preloaded Piezo Stacks

Benders, Bimorphs & Piezo-Composite Transducers

Piezoceramic Tubes

Piezo Shear Actuators

NEXLINE® / NEXACT® High-Force Actuators

PILine® Linear Motor Actuators

Custom Non-Magnetic High-Load Piezo-Hexapod

Piezo Nanopositioning Flexures Stages

Piezo Tip/Tilt Mirrors

Piezo Linear Motor-Driven XY Stage

Precision Linear Actuators

Nanometrology Position Sensors

Voice Coil Scanning Stages

Hexapod 6-Axis Stages

Piezo Driver Modules

Piezo Controllers

 

 

PI Piezo Actuator Catalog (1998)

>> 2006 PI Piezo / Nanopositioning Catalog Download Page

>> 2006 PI Piezo Solutions Online Catalog

>> 2006 PI Piezo Tutorial

 



 

PZT Actuators

 

PZT Actuators.............................................................................................................................2

PZT Actuator Selection Guide.................................................................................................3

Introduction to PZT Actuators..................................................................................................4

P-410 PICO Ultra-High Precision Closed Loop PZT Translators..........................................6

P-249 Miniature Open Loop High Voltage PZT Translators....................................................8

P-802.00, P-802.10, P-804.10 Open Loop Low  Voltage PZT Translators..........................10

P-250 Micrometer Mountable Open Loop High Voltage PZT Translator...............................12

P-810 Small Load Open Loop Low  Voltage PZT Translators..............................................14

P-830 Open Loop Low  Voltage PZT Translators.................................................................16

P-820 Small Load Open Loop Low  Voltage PZT Translators..............................................18

P-840, P-841 Preloaded Open & Closed Loop Low  Voltage PZT Translators....................20

P-842, P-843 Preloaded Open & Closed Loop Low  Voltage PZT Translators....................22

P-844, P-845 Preloaded Open & Closed Loop Low  Voltage PZT Translators....................24

P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translators..................................26

P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translators.....................28

P-239 Preloaded Open & Closed Loop High Voltage PZT Translators................................ 30

P-242, P-246 Preloaded Open & Closed Loop High Load High Voltage PZT Translators...32

P-243, P-247 Preloaded Open & Closed Loop EHL High Voltage PZT Translators.............34

P-286, P-288, P-289 High Voltage PZT Disk Translators.....................................................36

P-803 OEM Multilayer Low  Voltage PZT Bender Actuators.................................................38

P-305, P-306 OEM Tubular High Voltage Piezoelectric Stack Translators........................................39

PT120 High Voltage PZT Tube Actuators..............................................................................40

Customized Solutions for OEM PZT Ceramic Applications..................................................41

Piezoceramic Materials......................................................................................................41

OEM PZT Translators........................................................................................................43

Options and Accessories......................................................................................................44

Factory Installed Options...................................................................................................44

P-177.10 Strain Gage Position Sensor for High Voltage Piezoelectric Stacks ...........44

Extended Temperature Range.......................................................................................44

Vacuum Options.............................................................................................................45

P-705.00 Positive polarity (for High Voltage PZT Piezoelectric Stacks)..........................................45

P-706.xx Water Protected Case.....................................................................................45

Ball tips............................................................................................................................45

Accessories.......................................................................................................................45

P-176.10/20/30 Magnetic Adapter...................................................................................45

P-176.50/60 Flexible Tip.................................................................................................46

Cables and Cable Adapters............................................................................................46

Notes (Technical Data)..........................................................................................................47



 

PZT Actuator Selection Guide

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Models

Push/ Pull Force Capacity [N]

Travel Ranges [µm]

Closed Loop Versions / Sensor

Notes

Page

PT120

0.1 / 0.1

4, 6, 8

no

tube actuator

39

P-803

1 / 1

± 100, 200, 400, 500

no

bender actuator, small dimensions

37

P-288

10 / 5

50

no

disk translator (flat, large travel range)

36

P-286, P-289

20 / 10

100, 200

no

disk translator (flat, large travel range)

36

P-810

50 / 1

15, 30, 45

no

very small, ferromagnetic end pieces

14

P-249

150 / 3

5, 10

no

very small, w/o case

8

P-820

50 / 10

15, 30, 45

no

smallest preloaded translator

18

P-250

100 / 5

20

no

mounts in micrometer tip

12

P-802

1000 / 5

6, 15

no

compact, w/o case

10

P-830

1000 / 5

15, 30, 45, 60

no

small, ferromagnetic end pieces

16

P-305

500 / 20

5, 10, 20, 40

yes / strain gage

clear aperture (tubular stack)

39

P-306

800 / 40

5, 10, 20, 40

yes/ strain gage

clear aperture (tubular piezo stack)

39

P-410

1000 / 50

15, 30, 60

yes / capacitive

extremely high accuracy

6

P-840, P-841

1000 / 100

15, 30, 45, 60, 90

yes / strain gage

preloaded

20

P-842, P-843

800 / 300

15, 30, 45, 60, 90

yes / strain gage

preloaded

22

P-170, P-178

2000 / 50

5, 10, 20, 40, 80

yes / strain gage

choice of top and bottom pieces

26

P-244, P-245

2000 / 300

10, 20, 40, 60, 80, 120

yes / strain gage

preloaded

28

P-804

3000 / 20

15

no

compact, w/o case

10

P-844, P-845

3000 / 700

15, 30, 45, 60, 90

yes / strain gage

preloaded, water protected option

24

P-239

4500 / 500

5, 10, 20, 40, 60, 100, 140, 180

yes / strain gage

preloaded, largest travel ranges (piezo stack actuator)

30

P-242, P-246

12500 / 2000

10, 20, 40, 60, 80, 120

yes / strain gage

preloaded, very stiff, water protected option

32

P-243, P-247

30000 / 3500

10, 20, 40, 60, 80, 120

yes / strain gage

preloaded, very stiff, water protected option

34



 

Introduction to PIEZOELECTRIC Actuators

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PI offers the largest selection of research and industrial grade Piezo Actuators and Translators (linear actuators) and Piezoelectric Flexure Nanopositioning Stages worldwide. These systems are used for ultra precision motion control applications in fields like semicoductors or data storage. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to our customer's requirements.  We are highly vertically integrated, controlling each manufacturing step from piezoelectric raw material to finished systems.

 

Piezoelectric Actuators offer the following advantages:

 

·   Sub-Nanometer Precision

·   Large Force Generation

·   Sub-Millisecond Response

·   No Magnetic Fields

·   Extremely Low Steady State Power Consumption

·   No Wear and Tear

·   Vacuum and Clean Room Compatibility

·   Operation at Cryogenic Temperatures

 

Applications for Piezo Actuators Include

 

Optics, Photonics and Measuring Technology

 

·   Image stabilization

·   Scanning microscopy

·   Auto focus systems

·   Interferometry

·   Fiber optic alignment & switching

·   Adaptive and active optics

·   Laser tuning

·   Mirror positioning

 

Disk Drive

 

·   MR head testing

·   Pole tip recession

·   Spin stands

·   Disk testing

·   Vibration cancellation

 

Microelectronics

 

·   Nano-metrology

·   Wafer and mask positioning

·   Critical dimension measurement

·   Microlithography

·   Inspection systems

·   Vibration cancellation

 

Precision Mechanics and Mechanical Engineering

 

·   Vibration cancellation

·   Structural deformation

·   Out-of-roundness grinding, drilling, turning

·   Tool adjustment

·   Wear correction

·   Needle valve actuation

·   Micro pumps

·   Knife edge control in extrusion tools

·   Micro engraving systems

 

Life Science, Medicine, Biology

 

·   Scanning microscopy

·   Patch-clamp

·   Gene technology

·   Micro manipulation

·   Cell penetration

·   Micro dispensing devices

 

For more information on piezoelectric Actuator basics see "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section.



 

P-410 PIco Ultra-High Precision Closed Loop Piezoelectric Stack Actuator

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·   Sub-Nanometer Resolution and Repeatability

·   Integrated Capacitive Position Sensor

·   Travel to 60 µm

·   Fast Response for Maximum Throughput

·   Ultra-High Linearity and Long-Term Stability

 

The new PIco Series of Closed Loop Piezo Translators are ultrahigh-Precision linear actuators for static and dynamic applications.  They combine the advantages of piezoceramic actuators and capacitive position sensors in a small package and provide the best combination of Precision, linearity, bandwidth and response of any linear actuator on the market.

Application examples: Disk Drive Test Stands, Nano-Automation, Metrology, Semiconductor Test Equipment, Wafer Steppers, Microlithography, Optics, etc.

PICo Piezo Translators were developed for research and production engineers who want higher Precision, linearity and repeatability  than our strain gauge sensor equipped Piezoelectric actuators provide but do not need the sophistication of our Capacitive Position Sensor equipped Piezoelectric Flexure NanoPositioners.

Working principle:  The translators are equipped with high reliability Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The motion of the tip is measured by an ultrahigh-Precision capacitive position sensor for precise motion control.  PZT actuator, sensor and case materials are matched for optimal thermal stability.

The standard translator tip and base have tapped holes.  A ball tip is included in the delivery to help decouple off-axis or torque loads from the translator tip

Fig.  P410         P-410 PZT Translators

Fig.  P410         P-410 Dimensions

 

Fig.      Response of a P-410.C15 to a 1 Hz, 1 nm square wave control signal (Controller: E-501 & E-507.00 & E-509.C1, bandwidth set to 240 Hz)

 


 

Models

 

P-410.C15

P-410.C30

P-410.C60

Units

Notes see p. 47

Open loop travel @ 0 to -500 V

15

30

60

µm ± 20 %

A8

Closed loop travel ³

15

30

60

µm

A5

Integrated position feedback sensor

capacitive

capacitive

capacitive

 

B

Closed / open loop * resolution

0.1 / 0.1

0.2 / 0.2

0.4 / 0.4

nm

C4

Closed loop linearity (typ.)

0.03

0.03

0.03

%

 

Full range repeatability (typ.)

0.5

1

2

nm

C6

Stiffness

180

100

50

N/µm ± 20 %

D1

Force generation (blocked)

2700

 

 

N ± 20 %

D2

Push/pull force capacity

1000 / 50

 

 

N

D3

Torque limit (at tip)

500

 

 

mNm

D6

Electrical capacitance

80

150

310

nF ± 20 %

F1

Dynamic operating current coefficient (DOCC)

7

7

7

µA/(Hz x µm)

F2

Unloaded resonant frequency (f0)

12

9

6.5

kHz ± 20 %

G2

Standard operating temperature range

-20 to +80

 

 

°C

H2

Voltage connection

VH

 

 

 

J1

Sensor connection

C

 

 

 

J2

Weight

90

120

180

g ± 5 %

K

Material case / end pieces

N-S / I

 

 

 

L

Length L

50

69

107.5

mm ± 0.5

 

Recommended Piezo Linear Amplifier / Controller

J

 

 

 

M

* Noise equivalent motion with E-507 amplifier

 

For mounting guidelines see page 39

 

Custom designs for volume buyers!

 



 

P-249 Miniature Open Loop High Voltage PZT Stack Translator

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·   Displacement to 10 µm

·   Sub-millisecond Response

·   Sub-Nanometer Precision

·   Options: UHV, High & Low Temperature

 

P-249 Miniature PZT Translators are high Precision linear actuators for static and dynamic applications.  They provide subnanometer Precision with submillisecond response. 

Due to their high resonant frequency, the translators are ideal for dynamic operation of very light parts.  For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages). 

Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39).

Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).

            Fig.  P249         P-249 PZT Actuators

            Fig.  P249         P-249 Dimensions

 

Factory Installed Options: 1)

P-702.10           High Temperature Option (see page 44)

P-702.20           Low Temperature Option (see page 44)

P-703.10           High Vacuum Option (see page 44)

P-705.00           Positive Polarity Option (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-249.10 to P-249.17, and list options separately.

 

 

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

 

See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-249

Models

 

P-249.10

P-249.20

Units

Notes

see p. 47

Open loop travel @ 0 to -1000 V

5

10

µm ± 20 %

A4

* Open loop resolution <

0.05

0.1

nm

C2

Stiffness

20

10

N/µm ± 20 %

D1

Force generation (blocked)

100

100

N ± 20 %

D2

Push/pull force capacity

150 / 3

150 / 3

N

D3

Max. operating voltage range

0 to -1000

 

V

A7

Electrical capacitance

6

12

nF ± 20 %

F1

Dynamic operating current coefficient (DOCC)

1.5

 

µA/(Hz x µm)

F2

Unloaded resonant frequency (f0)

35

18