PI Piezo Actuator Catalog (1998)

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PZT Actuators

PZT Actuators.............................................................................................................................2

PZT Actuator Selection Guide.................................................................................................3

Introduction to PZT Actuators..................................................................................................4

P-410 PICO Ultra-High Precision Closed Loop PZT Translators..........................................6

P-249 Miniature Open Loop High Voltage PZT Translators....................................................8

P-802.00, P-802.10, P-804.10 Open Loop Low Voltage PZT Translators..........................10

P-250 Micrometer Mountable Open Loop High Voltage PZT Translator...............................12

P-810 Small Load Open Loop Low Voltage PZT Translators..............................................14

P-830 Open Loop Low Voltage PZT Translators.................................................................16

P-820 Small Load Open Loop Low Voltage PZT Translators..............................................18

P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translators....................20

P-842, P-843 Preloaded Open & Closed Loop Low Voltage PZT Translators....................22

P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translators....................24

P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translators..................................26

P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translators.....................28

P-239 Preloaded Open & Closed Loop High Voltage PZT Translators................................ 30

P-242, P-246 Preloaded Open & Closed Loop High Load High Voltage PZT Translators...32

P-243, P-247 Preloaded Open & Closed Loop EHL High Voltage PZT Translators.............34

P-286, P-288, P-289 High Voltage PZT Disk Translators.....................................................36

P-803 OEM Multilayer Low Voltage PZT Bender Actuators.................................................38

P-305, P-306 OEM Tubular High Voltage Piezoelectric Stack Translators........................................39

PT120 High Voltage PZT Tube Actuators..............................................................................40

Customized Solutions for OEM PZT Ceramic Applications..................................................41

Piezoceramic Materials......................................................................................................41

OEM PZT Translators........................................................................................................43

Options and Accessories......................................................................................................44

Factory Installed Options...................................................................................................44

P-177.10 Strain Gage Position Sensor for High Voltage Piezoelectric Stacks ...........44

Extended Temperature Range.......................................................................................44

Vacuum Options.............................................................................................................45

P-705.00 Positive polarity (for High Voltage PZT Piezoelectric Stacks)..........................................45

P-706.xx Water Protected Case.....................................................................................45

Ball tips............................................................................................................................45

Accessories.......................................................................................................................45

P-176.10/20/30 Magnetic Adapter...................................................................................45

P-176.50/60 Flexible Tip.................................................................................................46

Cables and Cable Adapters............................................................................................46

Notes (Technical Data)..........................................................................................................47

PZT Actuator Selection Guide

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Models	Push/ Pull Force Capacity [N]	Travel Ranges [µm]	Closed Loop Versions / Sensor	Notes	Page
PT120	0.1 / 0.1	4, 6, 8	no	tube actuator	39
P-803	1 / 1	± 100, 200, 400, 500	no	bender actuator, small dimensions	37
P-288	10 / 5	50	no	disk translator (flat, large travel range)	36
P-286, P-289	20 / 10	100, 200	no	disk translator (flat, large travel range)	36
P-810	50 / 1	15, 30, 45	no	very small, ferromagnetic end pieces	14
P-249	150 / 3	5, 10	no	very small, w/o case	8
P-820	50 / 10	15, 30, 45	no	smallest preloaded translator	18
P-250	100 / 5	20	no	mounts in micrometer tip	12
P-802	1000 / 5	6, 15	no	compact, w/o case	10
P-830	1000 / 5	15, 30, 45, 60	no	small, ferromagnetic end pieces	16
P-305	500 / 20	5, 10, 20, 40	yes / strain gage	clear aperture (tubular stack)	39
P-306	800 / 40	5, 10, 20, 40	yes/ strain gage	clear aperture (tubular piezo stack)	39
P-410	1000 / 50	15, 30, 60	yes / capacitive	extremely high accuracy	6
P-840, P-841	1000 / 100	15, 30, 45, 60, 90	yes / strain gage	preloaded	20
P-842, P-843	800 / 300	15, 30, 45, 60, 90	yes / strain gage	preloaded	22
P-170, P-178	2000 / 50	5, 10, 20, 40, 80	yes / strain gage	choice of top and bottom pieces	26
P-244, P-245	2000 / 300	10, 20, 40, 60, 80, 120	yes / strain gage	preloaded	28
P-804	3000 / 20	15	no	compact, w/o case	10
P-844, P-845	3000 / 700	15, 30, 45, 60, 90	yes / strain gage	preloaded, water protected option	24
P-239	4500 / 500	5, 10, 20, 40, 60, 100, 140, 180	yes / strain gage	preloaded, largest travel ranges (piezo stack actuator)	30
P-242, P-246	12500 / 2000	10, 20, 40, 60, 80, 120	yes / strain gage	preloaded, very stiff, water protected option	32
P-243, P-247	30000 / 3500	10, 20, 40, 60, 80, 120	yes / strain gage	preloaded, very stiff, water protected option	34

Introduction to PIEZOELECTRIC Actuators

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PI offers the largest selection of research and industrial grade Piezo Actuators and Translators (linear actuators) and Piezoelectric Flexure Nanopositioning Stages worldwide. These systems are used for ultra precision motion control applications in fields like semicoductors or data storage. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to our customer's requirements. We are highly vertically integrated, controlling each manufacturing step from piezoelectric raw material to finished systems.

Piezoelectric Actuators offer the following advantages:

· Sub-Nanometer Precision

· Large Force Generation

· Sub-Millisecond Response

· No Magnetic Fields

· Extremely Low Steady State Power Consumption

· No Wear and Tear

· Vacuum and Clean Room Compatibility

· Operation at Cryogenic Temperatures

Applications for Piezo Actuators Include

Optics, Photonics and Measuring Technology

· Image stabilization

· Scanning microscopy

· Auto focus systems

· Interferometry

· Fiber optic alignment & switching

· Adaptive and active optics

· Laser tuning

· Mirror positioning

Disk Drive

· MR head testing

· Pole tip recession

· Spin stands

· Disk testing

· Vibration cancellation

Microelectronics

· Nano-metrology

· Wafer and mask positioning

· Critical dimension measurement

· Microlithography

· Inspection systems

· Vibration cancellation

Precision Mechanics and Mechanical Engineering

· Vibration cancellation

· Structural deformation

· Out-of-roundness grinding, drilling, turning

· Tool adjustment

· Wear correction

· Needle valve actuation

· Micro pumps

· Knife edge control in extrusion tools

· Micro engraving systems

Life Science, Medicine, Biology

· Scanning microscopy

· Patch-clamp

· Gene technology

· Micro manipulation

· Cell penetration

· Micro dispensing devices

For more information on piezoelectric Actuator basics see "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section.

P-410 PIco Ultra-High Precision Closed Loop Piezoelectric Stack Actuator

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· Sub-Nanometer Resolution and Repeatability

· Integrated Capacitive Position Sensor

· Travel to 60 µm

· Fast Response for Maximum Throughput

· Ultra-High Linearity and Long-Term Stability

The new PIco Series of Closed Loop Piezo Translators are ultrahigh-Precision linear actuators for static and dynamic applications. They combine the advantages of piezoceramic actuators and capacitive position sensors in a small package and provide the best combination of Precision, linearity, bandwidth and response of any linear actuator on the market.

Application examples: Disk Drive Test Stands, Nano-Automation, Metrology, Semiconductor Test Equipment, Wafer Steppers, Microlithography, Optics, etc.

PICo Piezo Translators were developed for research and production engineers who want higher Precision, linearity and repeatability than our strain gauge sensor equipped Piezoelectric actuators provide but do not need the sophistication of our Capacitive Position Sensor equipped Piezoelectric Flexure NanoPositioners.

Working principle: The translators are equipped with high reliability Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The motion of the tip is measured by an ultrahigh-Precision capacitive position sensor for precise motion control. PZT actuator, sensor and case materials are matched for optimal thermal stability.

The standard translator tip and base have tapped holes. A ball tip is included in the delivery to help decouple off-axis or torque loads from the translator tip

Fig. P410 P-410 PZT Translators

Fig. P410 P-410 Dimensions

Fig. Response of a P-410.C15 to a 1 Hz, 1 nm square wave control signal (Controller: E-501 & E-507.00 & E-509.C1, bandwidth set to 240 Hz)

Models	P-410.C15	P-410.C30	P-410.C60	Units	Notes see p. 47
Open loop travel @ 0 to -500 V	15	30	60	µm ± 20 %	A8
Closed loop travel ³	15	30	60	µm	A5
Integrated position feedback sensor	capacitive	capacitive	capacitive		B
Closed / open loop * resolution	0.1 / 0.1	0.2 / 0.2	0.4 / 0.4	nm	C4
Closed loop linearity (typ.)	0.03	0.03	0.03	%
Full range repeatability (typ.)	0.5	1	2	nm	C6
Stiffness	180	100	50	N/µm ± 20 %	D1
Force generation (blocked)	2700			N ± 20 %	D2
Push/pull force capacity	1000 / 50			N	D3
Torque limit (at tip)	500			mNm	D6
Electrical capacitance	80	150	310	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	7	7	7	µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	12	9	6.5	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80			°C	H2
Voltage connection	VH				J1
Sensor connection	C				J2
Weight	90	120	180	g ± 5 %	K
Material case / end pieces	N-S / I				L
Length L	50	69	107.5	mm ± 0.5
Recommended Piezo Linear Amplifier / Controller	J				M

* Noise equivalent motion with E-507 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-249 Miniature Open Loop High Voltage PZT Stack Translator

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· Displacement to 10 µm

· Sub-millisecond Response

· Sub-Nanometer Precision

· Options: UHV, High & Low Temperature

P-249 Miniature PZT Translators are high Precision linear actuators for static and dynamic applications. They provide subnanometer Precision with submillisecond response.

Due to their high resonant frequency, the translators are ideal for dynamic operation of very light parts. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).

Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39).

Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).

Fig. P249 P-249 PZT Actuators

Fig. P249 P-249 Dimensions

Factory Installed Options: ¹)

P-702.10 High Temperature Option (see page 44)

P-702.20 Low Temperature Option (see page 44)

P-703.10 High Vacuum Option (see page 44)

P-705.00 Positive Polarity Option (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-249.10 to P-249.17, and list options separately.

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-249

Models	P-249.10	P-249.20	Units	Notes see p. 47
Open loop travel @ 0 to -1000 V	5	10	µm ± 20 %	A4
* Open loop resolution <	0.05	0.1	nm	C2
Stiffness	20	10	N/µm ± 20 %	D1
Force generation (blocked)	100	100	N ± 20 %	D2
Push/pull force capacity	150 / 3	150 / 3	N	D3
Max. operating voltage range	0 to -1000		V	A7
Electrical capacitance	6	12	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	1.5		µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	35	18	kHz ± 20 %	G2
Standard operating temperature range	-40 to +80		°C	H2
Voltage connection	PT			J1
Weight	2.5	3	g ± 5 %	K
Recommended Amplifier	B, I			M

* Noise equivalent motion with E-507 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-802.00, P-802.10, P-804.10 Open Loop Low Voltage Piezo Stack Actuator

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· Displacement to 15 µm

· Pushing Forces to 3000 N

· Sub-millisecond Response

· Sub-Nanometer Precision

P-802 and P-804 Piezoelectric Actuators are high Precision linear actuators for static and dynamic applications. They provide subnanometer Precision with submillisecond response.

The translators consist of a high reliability multilayer PZT ceramics block operating in a voltage range of 0 to 100V. The stack is covered by epoxy insulation and heat shrinking tube for protection and strain relief of the wire leads.

Due to their high resonant frequency, they are ideal for dynamic operation with small loads. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).

Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39 ).

Application examples: Static and dynamic positioning, fiber aligning, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P802-4 P-802, P-804 PZTs

Fig. P802-4 P-802, P-804 Dimensions

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models	P-802.00	P-802.10	P-804.10	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	6	15	15	µm ± 20 %	A2
* Open loop resolution	0.06	0.15	0.15	nm	C1
Stiffness	200	100	400	N/µm ± 20 %	D1
Force generation (blocked)	1200	1500	6000	N ± 20 %	D2
Push/pull force capacity	1000 / 3	1000 / 5	3000 / 20	N	D3
Electrical capacitance	0.9	1.8	7.2	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	15	15	60	µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	55	29	29	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80			°C	H2
Voltage connection	PT				J1
Weight	3	6	24	g ± 5 %	K
Dimensions	6 x 6 x 9	6 x 6 x 18	11 x 11 x 18	mm ± 0.5
Recommended Amplifier	A, C, H				M

* Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-250 Micrometer Mountable Open Loop High Voltage Piezo Stack Translator

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· Displacement 20 µm

· Mounts Inside Micrometer Tip

· Sub-millisecond Response

· Sub-Nanometer Precision

· Options: Positive Polarity Option

P-250 PZT Translators are high Precision linear actuators specially designed for integration in the tips of the M-222 to M-226 DC-Mike motorized actuators, the M-168 Stepper Mike actuators and the M-631 to M-633 manual micrometers (see "Micropositioners" section). They provide subnanometer precision with submillisecond response.

Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).

Fig. P250 P-250 PZT Translator

Fig. P250 P-250 Dimensions

Factory Installed Options: ¹)

P-705.00 Positive Polarity Option (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-250.10 to P-250.17, and list options separately.

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models	P-250.20	Units	Notes see p. 47
Open loop travel @ 0 to -1000 V	20	µm ± 20 %	A4
* Open loop resolution	0.2	nm	C2
Stiffness	5.5	N/µm ± 20 %	D1
Force generation (blocked)	110	N ± 20 %	D2
Push/pull force capacity	100 / 5	N	D3
Max. operating voltage range	-1000	V	A7
Electrical capacitance	22	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	1.4	µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	11	kHz ± 20 %	G2
Standard operating temperature range	-40 to +80	°C	H2
** Voltage connection	VH		J1
Weight	28	g ± 5 %	K
Recommended Amplifier	B, I		M

** Model P-250.10 with BNC connector

* Noise equivalent motion with E-507 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-810 Small Load Open Loop Low Voltage PZT Translator

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· Displacement to 45 µm

· Low Capacitance

· Sub-millisecond Response

· Sub-Nanometer precision

P-810 Small Load Piezoelectric Actuators are high precision linear actuators for static and dynamic applications with low forces. They provide subnanometer precision with submillisecond response.

The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P-810 translators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page 39).

Attachment is via the ferromagnetic end surfaces e.g. by epoxy, or via magnets (no clamping at the steel case). PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).

Application examples: Static and dynamic positioning (low forces) of small parts, fiber aligning, laser tuning, etc. (see page 4 for details).

Fig. P810 P-810 PZT Actuators

Fig. P810 P-810 Dimensions

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models	P-810.10	P-810.20	P-810.30	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	µm ± 20 %	A2
* Open loop resolution	0.15	0.3	0.45	nm	C1
Stiffness	12	7	4	N/µm ± 20 %	D1
Force generation (blocked)	180			N ± 20 %	D2
Push/pull force capacity	50 / 1			N	D3
Torque limit (at tip)	80			mNm	D6
Electrical capacitance	0.45	0.9	1.35	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	3.75			µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	22	15	12	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80			°C	H2
Voltage connection	PTFE, 100 mm ±5				J1
Weight	4	6	8	g ± 5 %	K
Material case / end pieces	N-S / S				L
Length L	20	38	56	mm ± 0.3
Recommended Amplifier	A, C, G				M

* Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-830 Open Loop Low Voltage Piezo Stack Actuator

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· Displacement to 60 µm

· Pushing Forces to 1000 N

· Pulling Forces to 20 N

· Sub-millisecond Response

· Sub-Nanometer precision

P-830 Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response.

The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P-830 translators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page 39).

Application examples: Static and dynamic positioning, fiber aligning, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P830 P-830 PZT Actuators

Fig. P830 P-830 Dimensions

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models	P-830.10	P-830.20	P-830.30	P-830.40	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	60	µm ± 20 %	A2
* Open loop resolution	0.15	0.3	0.45	0.6	nm	C1
Stiffness	100	50	33	25	N/µm ± 20 %	D1
Force generation (blocked)	1500				N ± 20 %	D2
Push/pull force capacity	1000 / 5				N	D3
Torque limit (at tip)	200				mNm	D6
Electrical capacitance	1.8	3.6	5.4	7.2	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	15				µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	23	14	10	8.5	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80				°C	H2
Voltage connection	PTFE, 100 mm ±5					J1
Weight	10	16	21	27	g ± 5 %	K
Material case / end pieces	N-S / S					L
Length L	22	40	58	76	mm ± 0.3
Recommended Amplifier	A, C, G					M

* Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-820 Small Load Open Loop Low Voltage Piezoelectric Stack Translator

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· Displacement to 45 µm

· Pushing Forces to 50 N

· Pulling Forces to 10 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: Ball Tip

P-820 Small Load Piezoelectric Actuators are high resolution linear actuators for static and low dynamic applications. They provide subnanometer resolution with submillisecond response.

The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The standard translator tip is a stainless steel flat.

Due to the small dimensions of the Piezoelectric ceramics P-820 translators are sensitive to bending and lateral forces. Select the P-820.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 3 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. For positioning of magnetic parts the P-176.30 Magnetic Adapter can be glued onto the translator tip

Application examples: Static and low dynamic positioning of small parts, fiber aligning, laser tuning, etc. (see page 4 for details).

Fig. P-820 P-820 PZTs

Fig. P-820 P-820 Dimensions

Factory Installed Options:

P-820.95 Ball Tip (see page 45)

Accessories:

P-176.30 Magnetic Adapter, see page 45

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models	P-820.10	P-820.20	P-820.30	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	µm ± 20 %	A2
* Open loop resolution	0.15	0.3	0.45	nm	C1
Stiffness	13	7	4	N/µm ± 20 %	D1
Force generation (blocked)	180			N ± 20 %	D2
Push/pull force capacity	50 / 10			N	D3
Torque limit (at tip)	80			mNm	D6
Electrical capacitance	0.45	0.9	1.35	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	3.75			µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	22	15	12	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80			°C	H2
Voltage connection	VL				J1
Weight	8	11	14	g ± 5 %	K
Material case / end pieces	N-S				L
Length L	26	44	62	mm ± 0.3
Recommended Piezo Linear Amplifier / Controller	A, C, G				M

* Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translator

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· Displacement to 90 µm

· Pushing Forces to 1000 N

· Pulling Forces to 100 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: Ball Tip, UHV

P-840 and P-841 Preloaded Piezoelectric Actuators are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them ideal for dynamic applications.

The P-840 is specifically designed for open loop operation. For highest precision and repeatability, the P-841 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).

The PZT translators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring preloaded non magnetic stainless steel case. The standard translator tip and base have tapped holes. Select the P-840.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip.

For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. For positioning of magnetic parts the P-176.20 Magnetic Adapter can be screwed into the translator tip.

Application examples: Static and dynamic positioning, disk drive testing, smart structures, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P840-1 P-840, P-841 PZT Actuators

Fig. P840-841 P-840, P-841 Dimensions

Fig. P841resol Response of a P-841.10 to a 3 nm peak-to-peak square wave control input signal, measured with servo control bandwidth set to 240 Hz and 2 millisecond settling time. Note the crisp response to the square wave control signal.

Factory Installed Options:

P-703.20 High Vacuum Option (see page 44)

P-840.95 Ball Tip (see page 45)

Accessories:

P-176.20 Magnetic Adapter with M3 Threaded Stud, see page 45

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Technical Data: P-840, P-841

Models (Open Loop Versions) (Closed Loop Versions *)	P-840.10 P-841.10	P-840.20 P-841.20	P-840.30 P-841.30	P-840.40 P-841.40	P-840.60 P-841.60	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	60	90	µm ± 20 %	A2
Closed loop travel ³	15	30	45	60	90	µm	A5
* Integrated position feedback sensor	SGS						B
Closed / open loop ** resolution	0.3 / 0.15	0.6 / 0.3	0.9 / 0.45	1.2 / 0.6	1.8 / 0.9	nm	C3
Stiffness	100	50	33	25	16	N/µm ± 20 %	D1
Force generation (blocked)	1500					N ± 20 %	D2
Push/pull force capacity	1000 / 100					N	D3
Torque limit (at tip)	350					mNm	D6
Electrical capacitance	1.8	3.6	5.4	7.2	10.8	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	15					µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	18	14	10	8.5	6	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80					°C	H2
Voltage connection	VL						J1
* Sensor connection	L						J2
Weight without cables	20	28	46	54	62	g ± 5 %	K
Material case / end pieces	N-S						L
Length L	32	50	68	86	122	mm ± 0.3
Recommended Piezo Linear Amplifier / Controller	C, D ,G , H						M

* Closed loop models only. Closed loop models are supplied with calibration data sheets

** Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers

P-842, P-843 Preloaded Open & Closed Loop Low Voltage Piezoelectric Stack Actautor

>> Get latest Information from New PI Website

· Displacement to 90 µm

· Pushing Forces to 800 N

· Pulling Forces to 300 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· UHV Option

P-842 and P-843 Preloaded Piezoelectric Actuators are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload of 300 N makes them ideal for machining applications.

P-842 is specifically designed for open loop operation. For highest precision and repeatability, the P-843 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).

The PZT translators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring preloaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo transducer can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. The P-176.50 Flexible Tip is available to protect the ceramics from bending forces (see page 46).

Application examples: Static and dynamic positioning, disk drive testing, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P843-30 P-842.30 PZT

Fig. P842-843 P-842, P-843 Dimensions

Factory Installed Options:

P-703.20 High Vacuum Option (see page 44)

Accessories:

P-176.50 Flexible Tip, see page 46

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models (Open Loop Versions) (Closed Loop Versions *)	P-842.10 P-843.10	P-842.20 P-843.20	P-842.30 P-843.30	P-842.40 P-843.40	P-842.60 P-843.60	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	60	90	µm ± 20 %	A2
Closed loop travel ³	15	30	45	60	90	µm	A5
* Integrated feedback sensor	SGS						B
Closed / open loop ** resolution	0.3 / 0.15	0.6 / 0.3	0.9 / 0.45	1.2 / 0.6	1.8 / 0.9	nm	C3
Stiffness	100	50	33	25	16	N/µm ± 20 %	D1
Force generation (blocked)	1500					N ± 20 %	D2
Push/pull force capacity	800 / 300					N	D3
Torque limit (at tip)	350					mNm	D6
Electrical capacitance	1.8	3.6	5.4	7.2	10.8	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	15					µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	18	14	10	8.5	6	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80					°C	H2
Voltage connection	VL						J1
* Sensor connection	L						J2
Weight without cables	31	42	53	64	86	g ± 5 %	K
Material case / end pieces	N-S						L
Length L	37	55	73	91	127	mm ± 0.3
Recommended Piezo Linear Amplifier / Controller	C, D ,G , H						M

* Closed loop models only. Closed loop models are supplied with calibration data sheets

** Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translator

>> Get latest Information from New PI Website

· Displacement to 90 µm

· Pushing Forces to 3000 N

· Pulling Forces to 700 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: UHV, Water Protected

P-844 and P-845 Preloaded Piezoelectric Trasnducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.

P-844 is specifically designed for open loop operation. For highest precision and repeatability, the P-845 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).

The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. The P-176.60 Flexible Tip is available to protect the ceramics from bending forces (see page 46).

Fig. P-844-20 P-844.20 Piezoelectric

Fig. P-844-845 P-844, P-845 Dimensions

Factory Installed Options:

P-703.20 High Vacuum Option (see page 44)

P-706.xx Water Protected Case (see page 45)

Accessories:

P-176.60 Flexible Tip, see page 46

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Models (Open Loop Versions) (Closed Loop Versions *)	P-844.10 P-845.10	P-844.20 P-845.20	P-844.30 P-845.30	P-844.40 P-845.40	P-844.60 P-845.60	Units	Notes see p. 47
Open loop travel @ 0 to 100 V	15	30	45	60	90	µm ± 20 %	A2
Closed loop travel ³	15	30	45	60	90	µm	A5
* Integrated feedback sensor	SGS						B
Closed / open loop ** resolution	0.3 / 0.15	0.6 / 0.3	0.9 / 0.45	1.2 / 0.6	1.8 / 0.9	nm	C3
Stiffness	400	200	133	100	65	N/µm ± 20 %	D1
Force generation (blocked)	6000					N ± 20 %	D2
Push/pull force capacity	3000 / 700					N	D3
Torque limit (at tip)	1000					mNm	D6
Electrical capacitance	7.2	14.5	22	29	43	µF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	60					µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	16	12	9	7.5	5.5	kHz ± 20 %	G2
Standard operating temperature range	-20 to +80					°C	H2
Voltage connection	VL						J1
* Sensor connection	L						J2
Weight without cables	84	108	132	156	204	g ± 5 %	K
Material case / end pieces	N-S						L
Length L	47	65	83	101	137	mm ± 0.3
Recommended Piezo Linear Amplifier / Controller	C, D ,G , H						M

* Closed loop models only. Closed loop models are supplied with calibration data sheets

** Noise equivalent motion with E-503 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translator

>> Get latest Information from New PI Website

· Displacement to 80 µm

· Pushing Forces to 2000 N

· Pulling Forces to 50 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: UHV, High & Low Temperature, Choice of End Pieces

P-170 to 173 and P-178 Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response.

Standard models are specifically designed for open loop operation. For highest precision and repeatability, select the P-177.10 high-accuracy closed loop option integrating ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).

P-178 models are equipped with a higher number of thinner Piezoelectric ceramic layers than P-170 to P-173 models, providing more displacement in the same package. On the other hand, they handle lower push/pull forces and the maximum operating voltage is limited to -1000 V. Also, voltages in excess of -750 V are recommended only for short periods of time for the P-178 models.

The PZT ceramic stack is protected by an aluminum case. Standard top piece is a magnet, standard bottom piece is a ferromagnetic steel flat. A variety of optional top and bottom pieces are available for ease of mounting. For push/pull forces up to 3 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.

Application examples: Static and dynamic positioning, optics, metrology, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P170-8 P-170 ... P-178 PZT Actuators

Fig. P170-8 P-170 ... P-178 Dimensions

Factory Installed Options: ¹)

P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44), not for P-170.00, P-178.10

P-702.20 Low Temperature Option (see page 44)

P-703.10 High Vacuum Option (see page 44)

P-705.00 Positive Polarity Option (see page 45)

P-700.10 M4 on Top Piece

P-700.01 M4 on Bottom Piece

P-700.20 M5 on Top Piece

P-700.02 M5 on Bottom Piece

P-700.03 M8 on Bottom Piece

P-700.40 4/40 on Top Piece

P-700.04 4/40 on Bottom Piece

P-700.50 Flat Top Piece, Tungsten Carbide

P-700.60 Flat Top Piece, Tungsten Carbide Polished

P-700.70 Ball Tip (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-170.00 to P-170.07, and list options separately.

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Piezo Actuator Model *	P-170.00	P-171.00	P-172.00	P-173.00	P-178.10	P-178.20	P-178.30	P-178.50	Units	Notes see p. 47
Open loop travel @ 0 to -1000 V	5	10	20	40	10	20	40	80	µm ± 20 %	A4
Closed loop travel ³ *	5	10	20	40	10	20	40	80	µm	A5
* Integrated position feedback sensor	-	SGS	SGS	SGS	-	SGS	SGS	SGS		B
* Closed / open loop ** resolution	0.1 / 0.05	0.2 / 0.1	0.4 / 0.2	0.8 / 0.4	0.2 / 0.1	0.4 / 0.2	0.8 / 0.4	1.6 / 0.8	nm	C4
Stiffness	310	180	98	53	310	170	91	48	N/µm ± 20 %	D1
Force generation (blocked)	1500	1500	1500	1500	2400	2400	2400	2400	N ± 20 %	D2
Push/pull force capacity	2000 / 50								N	D3
Torque limit (at tip)	500								mNm	D6
Max. operating voltage	-1500	-1500	-1500	-1500	-1000	-1000	-1000	-1000	V	A7
Electrical capacitance	14	25	47	89	50	95	180	340	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	3.25	3.25	3.25	3.25	6	6	6	6	µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	17	14	9	6	17	14	9	6	kHz ± 20 %	G2
Standard operating temperature range	-40 to +80								°C	H2
Voltage connection	VH									J1
* Sensor connection	-	L	L	L	-	L	L	L		J2
Weight without cables	19	26	40	65	19	26	40	65	g ± 5 %	K
Material case / end pieces	Al / S									L
Length of case w/o end pieces	14	22	38	68	14	22	38	68	mm ± 0.5
Recommended Piezo Linear Amplifier / Controller	B, I, J									M

* Closed loop models require the P-177.10 option and are supplied with calibration data sheets

** Noise equivalent motion with E-507 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

Fig. P-170 ... P-178 Options

P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translator

>> Get latest Information from New PI Website

· Displacement to 120 µm

· Pushing Forces to 2000 N

· Pulling Forces to 300 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: UHV, Low & High Temperature

P-244 and P-245 Preloaded Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.

P-245 models are equipped with a higher number of thinner Piezoelectric ceramic layers, providing more displacement than P-244 models in the same package.

The PZT ceramic stack is protected by an internally spring preload stainless steel case. The standard translator tip and base have tapped holes. Select the P-244.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.

For positioning of magnetic parts the P-176.10 Magnetic Adapter can be screwed into the translator tip

Application examples: Static and dynamic positioning, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).

Fig. P244-5 P-244, P-245 PZT Actuators

Fig. P244-245 P-244, P-245 Dimensions

Factory Installed Options: ¹)

P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44)

P-702.10 High Temperature Option (see page 44)

P-702.20 Low Temperature Option (see page 44)

P-703.20 High Vacuum Option (see page 44)

P-705.00 Positive Polarity Option (see page 45)

P-244.95 Ball Tip (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-244.00 to P-244.07, and list options separately.

Accessories:

P-176.10 magnetic adapter with M5 threaded stud, see page 45

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Piezo Actuator Model *	P-244.10	P-244.20	P-244.30	P-244.40	P-245.20	P-245.30	P-245.50	P-245.70	Units	Notes see p. 47
Open loop travel @ 0 to -1000 V *	10	20	40	60	20	40	80	120	µm ± 20 %	A4
* Closed loop travel ³	10	20	40	60	20	40	80	120	µm	A5
* Integrated position feedback sensor	SGS									B
* Closed / open loop ** resolution	0.2 / 0.1	0.4 / 0.2	0.8 / 0.4	1.2 / 0.6	0.4 / 0.2	0.8 / 0.4	1.6 / 0.8	2.4 / 1.2	nm	C4
Stiffness	180	98	53	29	170	91	48	32	N/µm ± 20 %	D1
Force generation (blocked)	1800	2000	2000	2000	3000	3000	3000	3000	N ± 20 %	D2
Push/pull force capacity	2000 / 300								N	D3
Torque limit (at tip)	50								mNm	D6
Max. operating voltage	-1500	-1500	-1500	-1500	-1000	-1000	-1000	-1000	V	A7
Electrical capacitance	25	47	89	133	95	180	340	500	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	3	3	3	3	6	6	6	6	µA/(Hz x µm)	F2
Unloaded resonant frequency (f₀)	16	12	9	5.5	15	11	8	5	kHz ± 20 %	G2
Standard operating temperature range	-40 to +80								°C	H2
Voltage connection	VH									J1
* Sensor connection	L									J2
Weight without cables	59	72	102	136	59	72	102	136	g ± 5 %	K
Material case / end pieces	N-S									L
Length L	45	61.5	93.5	127	45	61.5	93.5	127	mm ± 0.5
Recommended Piezo Linear Amplifier / Controller	B, I, J									M

* Closed loop models require the P-177.10 option and are supplied with calibration data sheets

** Noise equivalent motion with E-507 amplifier

For mounting guidelines see page 39

Custom designs for volume buyers!

P-239 Preloaded Open & Closed Loop High Voltage PZT Translator

>> Get latest Information from New PI Website

· Displacement to 180 µm

· Pushing Forces to 4500 N

· Pulling Forces to 500 N

· Sub-millisecond Response

· Sub-Nanometer Resolution

· Options: UHV, Low & High Temperature

P-239 Preloaded Piezoelectric Transducers are ultrahigh-resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.

P-239 models are equipped with thinner piezoelectric ceramic layers, providing displacement up to 180 µm at -1000 V operating voltage.

The PZT ceramic stack is protected by an internally spring-preloaded stainless steel case. The standard translator tip and base have tapped holes. Select the P-239.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.

Fig. P239 P-239 PZT Actuators

Fig. P239 P-239 Dimensions

Factory Installed Options: ¹)

P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44), not for P-239.00 / .10

P-702.10 High Temperature Option (see page 44)

P-702.20 Low Temperature Option (see page 44)

P-703.20 High Vacuum Option (see page 44)

P-705.00 Positive Polarity Option Option (see page 45)

P-239.95 Ball Tip (see page 45)

1) When ordering the following options, change the last digit to 7, e.g. P-239.00 to P-239.07, and list options separately.

Accessories:

High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.

Piezo Actuator Model *	P-239.00	P-239.10	P-239.20	P-239.30	P-239.40	P-239.60	P-239.80	P-239.90	Units	Notes see p. 47
Open loop travel @ 0 to -1000 V	5	10	20	40	60	100	140	180	µm ± 20 %	A4
Closed loop travel ³ *	5	10	20	40	60	100	140	180	µm	A5
* Integrated position feedback sensor	SGS									B
* Closed / open loop ** resolution	0.1 / 0.05	0.2 / 0.1	0.4 / 0.2	0.8 / 0.4	1.2 / 0.6	2 / 1	2.8 / 1.4	3.6 / 1.8	nm	C4
Stiffness	1440	800	423	220	150	90	66	52	N/µm ± 20 %	D1
Force generation (blocked)	7000								N ± 20 %	D2
Push/pull force capacity	4500 / 500								N	D3
Torque limit (at tip)	1000								mNm	D6
Max. operating voltage	-1000								V	A7
Electrical capacitance	70	120	245	460	660	1150	1550	2100	nF ± 20 %	F1
Dynamic operating current coefficient (DOCC)	17.5

Piezo Actuators	High Force Piezo Stacks	Preloaded Piezo Stacks	Benders, Bimorphs & Piezo-Composite Transducers	Piezoceramic Tubes	Piezo Shear Actuators
NEXLINE® / NEXACT® High-Force Actuators	PILine® Linear Motor Actuators	Custom Non-Magnetic High-Load Piezo-Hexapod	Piezo Nanopositioning Flexures Stages	Piezo Tip/Tilt Mirrors	Piezo Linear Motor-Driven XY Stage
Precision Linear Actuators	Nanometrology Position Sensors	Voice Coil Scanning Stages	Hexapod 6-Axis Stages	Piezo Driver Modules	Piezo Controllers

>>Piezo Actuator Catalog Download Site

Piezoelectric Actuators and Translators

PI Piezo Actuator Catalog (1998)

>> 2006 PI Piezo / Nanopositioning Catalog Download Page

>> 2006 PI Piezo Solutions Online Catalog

>> 2006 PI Piezo Tutorial

PZT Actuators

PZT Actuator Selection Guide

Introduction to PIEZOELECTRIC Actuators

P-410 PIco Ultra-High Precision Closed Loop Piezoelectric Stack Actuator

P-249 Miniature Open Loop High Voltage PZT Stack Translator

P-802.00, P-802.10, P-804.10 Open Loop Low Voltage Piezo Stack Actuator

P-250 Micrometer Mountable Open Loop High Voltage Piezo Stack Translator

P-810 Small Load Open Loop Low Voltage PZT Translator

P-830 Open Loop Low Voltage Piezo Stack Actuator

P-820 Small Load Open Loop Low Voltage Piezoelectric Stack Translator

P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translator

P-842, P-843 Preloaded Open & Closed Loop Low Voltage Piezoelectric Stack Actautor

P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translator

P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translator

P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translator

P-239 Preloaded Open & Closed Loop High Voltage PZT Translator