Piezoelectric Actuators and Translators
PI Piezo Actuator Catalog (1998)
>> 2006 PI Piezo / Nanopositioning Catalog Download Page
>> 2006 PI Piezo Solutions Online Catalog
>> 2006 PI Piezo Tutorial
PZT Actuators
PZT Actuators.............................................................................................................................2
PZT Actuator Selection Guide.................................................................................................3
Introduction to PZT Actuators..................................................................................................4
P-410 PICO Ultra-High Precision Closed Loop PZT Translators..........................................6
P-249 Miniature Open Loop High Voltage PZT Translators....................................................8
P-802.00, P-802.10, P-804.10 Open Loop Low Voltage PZT Translators..........................10
P-250 Micrometer Mountable Open Loop High Voltage PZT Translator...............................12
P-810 Small Load Open Loop Low Voltage PZT Translators..............................................14
P-830 Open Loop Low Voltage PZT Translators.................................................................16
P-820 Small Load Open Loop Low Voltage PZT Translators..............................................18
P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translators....................20
P-842, P-843 Preloaded Open & Closed Loop Low Voltage PZT Translators....................22
P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translators....................24
P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translators..................................26
P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translators.....................28
P-239 Preloaded Open & Closed Loop High Voltage PZT Translators................................ 30
P-242, P-246 Preloaded Open & Closed Loop High Load High Voltage PZT Translators...32
P-243, P-247 Preloaded Open & Closed Loop EHL High Voltage PZT Translators.............34
P-286, P-288, P-289 High Voltage PZT Disk Translators.....................................................36
P-803 OEM Multilayer Low Voltage PZT Bender Actuators.................................................38
P-305, P-306 OEM Tubular High Voltage Piezoelectric Stack Translators........................................39
PT120 High Voltage PZT Tube Actuators..............................................................................40
Customized Solutions for OEM PZT Ceramic Applications..................................................41
Piezoceramic Materials......................................................................................................41
OEM PZT Translators........................................................................................................43
Options and Accessories......................................................................................................44
Factory Installed Options...................................................................................................44
P-177.10 Strain Gage Position Sensor for High Voltage Piezoelectric Stacks ...........44
Extended Temperature Range.......................................................................................44
Vacuum Options.............................................................................................................45
P-705.00 Positive polarity (for High Voltage PZT Piezoelectric Stacks)..........................................45
P-706.xx Water Protected Case.....................................................................................45
Ball tips............................................................................................................................45
Accessories.......................................................................................................................45
P-176.10/20/30 Magnetic Adapter...................................................................................45
P-176.50/60 Flexible Tip.................................................................................................46
Cables and Cable Adapters............................................................................................46
Notes (Technical Data)..........................................................................................................47
PZT Actuator Selection Guide
>> Get latest Information from New PI Website
Models
Push/ Pull Force Capacity [N]
Travel Ranges [µm]
Closed Loop Versions / Sensor
Notes
Page
PT120
0.1 / 0.1
4, 6, 8
no
tube actuator
39
P-803
1 / 1
± 100, 200, 400, 500
no
bender actuator, small dimensions
37
P-288
10 / 5
50
no
disk translator (flat, large travel range)
36
P-286, P-289
20 / 10
100, 200
no
disk translator (flat, large travel range)
36
P-810
50 / 1
15, 30, 45
no
very small, ferromagnetic end pieces
14
P-249
150 / 3
5, 10
no
very small, w/o case
8
P-820
50 / 10
15, 30, 45
no
smallest preloaded translator
18
P-250
100 / 5
20
no
mounts in micrometer tip
12
P-802
1000 / 5
6, 15
no
compact, w/o case
10
P-830
1000 / 5
15, 30, 45, 60
no
small, ferromagnetic end pieces
16
P-305
500 / 20
5, 10, 20, 40
yes / strain gage
clear aperture (tubular stack)
39
P-306
800 / 40
5, 10, 20, 40
yes/ strain gage
clear aperture (tubular piezo stack)
39
P-410
1000 / 50
15, 30, 60
yes / capacitive
extremely high accuracy
6
P-840, P-841
1000 / 100
15, 30, 45, 60, 90
yes / strain gage
preloaded
20
P-842, P-843
800 / 300
15, 30, 45, 60, 90
yes / strain gage
preloaded
22
P-170, P-178
2000 / 50
5, 10, 20, 40, 80
yes / strain gage
choice of top and bottom pieces
26
P-244, P-245
2000 / 300
10, 20, 40, 60, 80, 120
yes / strain gage
preloaded
28
P-804
3000 / 20
15
no
compact, w/o case
10
P-844, P-845
3000 / 700
15, 30, 45, 60, 90
yes / strain gage
preloaded, water protected option
24
P-239
4500 / 500
5, 10, 20, 40, 60, 100, 140, 180
yes / strain gage
preloaded, largest travel ranges (piezo stack actuator)
30
P-242, P-246
12500 / 2000
10, 20, 40, 60, 80, 120
yes / strain gage
preloaded, very stiff, water protected option
32
P-243, P-247
30000 / 3500
10, 20, 40, 60, 80, 120
yes / strain gage
preloaded, very stiff, water protected option
34
Introduction to PIEZOELECTRIC Actuators
>> Get latest Information from New PI Website
PI offers the largest selection of research and industrial grade Piezo Actuators and Translators (linear actuators) and Piezoelectric Flexure Nanopositioning Stages worldwide. These systems are used for ultra precision motion control applications in fields like semicoductors or data storage. In addition to the hundreds of models presented in this catalog, we manufacture custom designs tailored to our customer's requirements. We are highly vertically integrated, controlling each manufacturing step from piezoelectric raw material to finished systems.
Piezoelectric Actuators offer the following advantages:
· Extremely Low Steady State Power Consumption
· Vacuum and Clean Room Compatibility
· Operation at Cryogenic Temperatures
Applications for Piezo Actuators Include
Optics, Photonics and Measuring Technology
· Image stabilization
· Scanning microscopy
· Auto focus systems
· Interferometry
· Fiber optic alignment & switching
· Adaptive and active optics
· Laser tuning
· Mirror positioning
Disk Drive
· MR head testing
· Pole tip recession
· Spin stands
· Disk testing
· Vibration cancellation
Microelectronics
· Nano-metrology
· Wafer and mask positioning
· Critical dimension measurement
· Microlithography
· Inspection systems
· Vibration cancellation
Precision Mechanics and Mechanical Engineering
· Vibration cancellation
· Structural deformation
· Out-of-roundness grinding, drilling, turning
· Tool adjustment
· Wear correction
· Needle valve actuation
· Micro pumps
· Knife edge control in extrusion tools
· Micro engraving systems
Life Science, Medicine, Biology
· Scanning microscopy
· Patch-clamp
· Gene technology
· Micro manipulation
· Cell penetration
· Micro dispensing devices
For more information on piezoelectric Actuator basics see "Tutorial: Piezoelectrics & Piezoelectric Actuation for Nanopositioning" section.
P-410 PIco Ultra-High Precision Closed Loop Piezoelectric Stack Actuator
>> Get latest Information from New PI Website
· Sub-Nanometer Resolution and Repeatability
· Integrated Capacitive Position Sensor
· Travel to 60 µm
· Fast Response for Maximum Throughput
· Ultra-High Linearity and Long-Term Stability
The new PIco Series of Closed Loop Piezo Translators are ultrahigh-Precision linear actuators for static and dynamic applications. They combine the advantages of piezoceramic actuators and capacitive position sensors in a small package and provide the best combination of Precision, linearity, bandwidth and response of any linear actuator on the market.
Application examples: Disk Drive Test Stands, Nano-Automation, Metrology, Semiconductor Test Equipment, Wafer Steppers, Microlithography, Optics, etc.
PICo Piezo Translators were developed for research and production engineers who want higher Precision, linearity and repeatability than our strain gauge sensor equipped Piezoelectric actuators provide but do not need the sophistication of our Capacitive Position Sensor equipped Piezoelectric Flexure NanoPositioners.
Working principle: The translators are equipped with high reliability Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The motion of the tip is measured by an ultrahigh-Precision capacitive position sensor for precise motion control. PZT actuator, sensor and case materials are matched for optimal thermal stability.
The standard translator tip and base have tapped holes. A ball tip is included in the delivery to help decouple off-axis or torque loads from the translator tip
Fig. P410 P-410 PZT Translators
Fig. P410 P-410 Dimensions
Fig. Response of a P-410.C15 to a 1 Hz, 1 nm square wave control signal (Controller: E-501 & E-507.00 & E-509.C1, bandwidth set to 240 Hz)
Models
P-410.C15
P-410.C30
P-410.C60
Units
Notes see p. 47
Open loop travel @ 0 to -500 V
15
30
60
µm ± 20 %
A8
Closed loop travel ³
15
30
60
µm
A5
Integrated position feedback sensor
capacitive
capacitive
capacitive
B
Closed / open loop * resolution
0.1 / 0.1
0.2 / 0.2
0.4 / 0.4
nm
C4
Closed loop linearity (typ.)
0.03
0.03
0.03
%
Full range repeatability (typ.)
0.5
1
2
nm
C6
Stiffness
180
100
50
N/µm ± 20 %
D1
Force generation (blocked)
2700
N ± 20 %
D2
Push/pull force capacity
1000 / 50
N
D3
Torque limit (at tip)
500
mNm
D6
Electrical capacitance
80
150
310
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
7
7
7
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
12
9
6.5
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
VH
J1
Sensor connection
C
J2
Weight
90
120
180
g ± 5 %
K
Material case / end pieces
N-S / I
L
Length L
50
69
107.5
mm ± 0.5
Recommended Piezo Linear Amplifier / Controller
J
M
* Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-249 Miniature Open Loop High Voltage PZT Stack Translator
>>Get latest Information from New PI Website
· Displacement to 10 µm
· Sub-millisecond Response
· Sub-Nanometer Precision
· Options: UHV, High & Low Temperature
P-249 Miniature PZT Translators are high Precision linear actuators for static and dynamic applications. They provide subnanometer Precision with submillisecond response.
Due to their high resonant frequency, the translators are ideal for dynamic operation of very light parts. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).
Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39).
Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).
Fig. P249 P-249 PZT Actuators
Fig. P249 P-249 Dimensions
Factory Installed Options: 1)
P-702.10 High Temperature Option (see page 44)
P-702.20 Low Temperature Option (see page 44)
P-703.10 High Vacuum Option (see page 44)
P-705.00 Positive Polarity Option (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-249.10 to P-249.17, and list options separately.
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-249
Models
P-249.10
P-249.20
Units
Notes
see p. 47
Open loop travel @ 0 to -1000 V
5
10
µm ± 20 %
A4
* Open loop resolution <
0.05
0.1
nm
C2
Stiffness
20
10
N/µm ± 20 %
D1
Force generation (blocked)
100
100
N ± 20 %
D2
Push/pull force capacity
150 / 3
150 / 3
N
D3
Max. operating voltage range
0 to -1000
V
A7
Electrical capacitance
6
12
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
1.5
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
35
18
kHz ± 20 %
G2
Standard operating temperature range
-40 to +80
°C
H2
Voltage connection
PT
J1
Weight
2.5
3
g ± 5 %
K
Recommended Amplifier
B, I
M
* Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-802.00, P-802.10, P-804.10 Open Loop Low Voltage Piezo Stack Actuator
>> Get latest Information from New PI Website
· Displacement to 15 µm
· Pushing Forces to 3000 N
· Sub-millisecond Response
· Sub-Nanometer Precision
P-802 and P-804 Piezoelectric Actuators are high Precision linear actuators for static and dynamic applications. They provide subnanometer Precision with submillisecond response.
The translators consist of a high reliability multilayer PZT ceramics block operating in a voltage range of 0 to 100V. The stack is covered by epoxy insulation and heat shrinking tube for protection and strain relief of the wire leads.
Due to their high resonant frequency, they are ideal for dynamic operation with small loads. For dynamic operation with larger loads an external preload is recommended. PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).
Care must be taken during mounting (e.g. by epoxy) and operation because the translators are not protected by a case and preload (see mounting guidelines on page 39 ).
Application examples: Static and dynamic positioning, fiber aligning, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P802-4 P-802, P-804 PZTs
Fig. P802-4 P-802, P-804 Dimensions
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-802, P-804
Models
P-802.00
P-802.10
P-804.10
Units
Notes
see p. 47
Open loop travel @ 0 to 100 V
6
15
15
µm ± 20 %
A2
* Open loop resolution
0.06
0.15
0.15
nm
C1
Stiffness
200
100
400
N/µm ± 20 %
D1
Force generation (blocked)
1200
1500
6000
N ± 20 %
D2
Push/pull force capacity
1000 / 3
1000 / 5
3000 / 20
N
D3
Electrical capacitance
0.9
1.8
7.2
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
15
15
60
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
55
29
29
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
PT
J1
Weight
3
6
24
g ± 5 %
K
Dimensions
6 x 6 x 9
6 x 6 x 18
11 x 11 x 18
mm ± 0.5
Recommended Amplifier
A, C, H
M
* Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-250 Micrometer Mountable Open Loop High Voltage Piezo Stack Translator
>> Get latest Information from New PI Website
· Displacement 20 µm
· Mounts Inside Micrometer Tip
· Sub-millisecond Response
· Sub-Nanometer Precision
· Options: Positive Polarity Option
P-250 PZT Translators are high Precision linear actuators specially designed for integration in the tips of the M-222 to M-226 DC-Mike motorized actuators, the M-168 Stepper Mike actuators and the M-631 to M-633 manual micrometers (see "Micropositioners" section). They provide subnanometer precision with submillisecond response.
Application examples: Laser tuning, static and dynamic positioning of small parts, fiber aligning, etc. (see page 4 for details).
Fig. P250 P-250 PZT Translator
Fig. P250 P-250 Dimensions
Factory Installed Options: 1)
P-705.00 Positive Polarity Option (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-250.10 to P-250.17, and list options separately.
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-250
Models
P-250.20
Units
Notes
see p. 47
Open loop travel @ 0 to -1000 V
20
µm ± 20 %
A4
* Open loop resolution
0.2
nm
C2
Stiffness
5.5
N/µm ± 20 %
D1
Force generation (blocked)
110
N ± 20 %
D2
Push/pull force capacity
100 / 5
N
D3
Max. operating voltage range
-1000
V
A7
Electrical capacitance
22
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
1.4
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
11
kHz ± 20 %
G2
Standard operating temperature range
-40 to +80
°C
H2
** Voltage connection
VH
J1
Weight
28
g ± 5 %
K
Recommended Amplifier
B, I
M
** Model P-250.10 with BNC connector
* Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-810 Small Load Open Loop Low Voltage PZT Translator
>>Get latest Information from New PI Website
· Displacement to 45 µm
· Low Capacitance
· Sub-millisecond Response
· Sub-Nanometer precision
P-810 Small Load Piezoelectric Actuators are high precision linear actuators for static and dynamic applications with low forces. They provide subnanometer precision with submillisecond response.
The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P-810 translators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page 39).
Attachment is via the ferromagnetic end surfaces e.g. by epoxy, or via magnets (no clamping at the steel case). PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).
Application examples: Static and dynamic positioning (low forces) of small parts, fiber aligning, laser tuning, etc. (see page 4 for details).
Fig. P810 P-810 PZT Actuators
Fig. P810 P-810 Dimensions
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-810
Models
P-810.10
P-810.20
P-810.30
Units
Notes
see p. 47
Open loop travel @ 0 to 100 V
15
30
45
µm ± 20 %
A2
* Open loop resolution
0.15
0.3
0.45
nm
C1
Stiffness
12
7
4
N/µm ± 20 %
D1
Force generation (blocked)
180
N ± 20 %
D2
Push/pull force capacity
50 / 1
N
D3
Torque limit (at tip)
80
mNm
D6
Electrical capacitance
0.45
0.9
1.35
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
3.75
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
22
15
12
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
PTFE, 100 mm ±5
J1
Weight
4
6
8
g ± 5 %
K
Material case / end pieces
N-S / S
L
Length L
20
38
56
mm ± 0.3
Recommended Amplifier
A, C, G
M
* Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-830 Open Loop Low Voltage Piezo Stack Actuator
>>Get latest Information from New PI Website
· Displacement to 60 µm
· Pushing Forces to 1000 N
· Pulling Forces to 20 N
· Sub-millisecond Response
· Sub-Nanometer precision
P-830 Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response.
The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by a non magnetic stainless steel case. Because of the small dimensions, no preload is integrated. P-830 translators are sensitive to tensile, bending and lateral forces (see mounting guidelines on page 39).
Attachment is via the ferromagnetic end surfaces e.g. by epoxy, or via magnets (no clamping at the steel case). PI offers a variety of preloaded translators for applications with larger tensile forces (see following pages).
Application examples: Static and dynamic positioning, fiber aligning, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P830 P-830 PZT Actuators
Fig. P830 P-830 Dimensions
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-830
Models
P-830.10
P-830.20
P-830.30
P-830.40
Units
Notes
see p. 47
Open loop travel @ 0 to 100 V
15
30
45
60
µm ± 20 %
A2
* Open loop resolution
0.15
0.3
0.45
0.6
nm
C1
Stiffness
100
50
33
25
N/µm ± 20 %
D1
Force generation (blocked)
1500
N ± 20 %
D2
Push/pull force capacity
1000 / 5
N
D3
Torque limit (at tip)
200
mNm
D6
Electrical capacitance
1.8
3.6
5.4
7.2
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
15
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
23
14
10
8.5
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
PTFE, 100 mm ±5
J1
Weight
10
16
21
27
g ± 5 %
K
Material case / end pieces
N-S / S
L
Length L
22
40
58
76
mm ± 0.3
Recommended Amplifier
A, C, G
M
* Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-820 Small Load Open Loop Low Voltage Piezoelectric Stack Translator
>> Get latest Information from New PI Website
· Displacement to 45 µm
· Pushing Forces to 50 N
· Pulling Forces to 10 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: Ball Tip
P-820 Small Load Piezoelectric Actuators are high resolution linear actuators for static and low dynamic applications. They provide subnanometer resolution with submillisecond response.
The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. The standard translator tip is a stainless steel flat.
Due to the small dimensions of the Piezoelectric ceramics P-820 translators are sensitive to bending and lateral forces. Select the P-820.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 3 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. For positioning of magnetic parts the P-176.30 Magnetic Adapter can be glued onto the translator tip
Application examples: Static and low dynamic positioning of small parts, fiber aligning, laser tuning, etc. (see page 4 for details).
Fig. P-820 P-820 PZTs
Fig. P-820 P-820 Dimensions
Factory Installed Options:
P-820.95 Ball Tip (see page 45)
Accessories:
P-176.30 Magnetic Adapter, see page 45
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-820
Models
P-820.10
P-820.20
P-820.30
Units
Notes
see p. 47
Open loop travel @ 0 to 100 V
15
30
45
µm ± 20 %
A2
* Open loop resolution
0.15
0.3
0.45
nm
C1
Stiffness
13
7
4
N/µm ± 20 %
D1
Force generation (blocked)
180
N ± 20 %
D2
Push/pull force capacity
50 / 10
N
D3
Torque limit (at tip)
80
mNm
D6
Electrical capacitance
0.45
0.9
1.35
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
3.75
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
22
15
12
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
VL
J1
Weight
8
11
14
g ± 5 %
K
Material case / end pieces
N-S
L
Length L
26
44
62
mm ± 0.3
Recommended Piezo Linear Amplifier / Controller
A, C, G
M
* Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-840, P-841 Preloaded Open & Closed Loop Low Voltage PZT Translator
>> Get latest Information from New PI Website
· Displacement to 90 µm
· Pushing Forces to 1000 N
· Pulling Forces to 100 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: Ball Tip, UHV
P-840 and P-841 Preloaded Piezoelectric Actuators are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them ideal for dynamic applications.
The P-840 is specifically designed for open loop operation. For highest precision and repeatability, the P-841 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
The PZT translators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring preloaded non magnetic stainless steel case. The standard translator tip and base have tapped holes. Select the P-840.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip.
For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. For positioning of magnetic parts the P-176.20 Magnetic Adapter can be screwed into the translator tip.
Application examples: Static and dynamic positioning, disk drive testing, smart structures, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P840-1 P-840, P-841 PZT Actuators
Fig. P840-841 P-840, P-841 Dimensions
Fig. P841resol Response of a P-841.10 to a 3 nm peak-to-peak square wave control input signal, measured with servo control bandwidth set to 240 Hz and 2 millisecond settling time. Note the crisp response to the square wave control signal.
Factory Installed Options:
P-703.20 High Vacuum Option (see page 44)
P-840.95 Ball Tip (see page 45)
Accessories:
P-176.20 Magnetic Adapter with M3 Threaded Stud, see page 45
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-840, P-841
Models (Open Loop Versions)
(Closed Loop Versions *)
P-840.10
P-841.10
P-840.20
P-841.20
P-840.30
P-841.30
P-840.40
P-841.40
P-840.60
P-841.60
Units
Notes see p. 47
Open loop travel @ 0 to 100 V
15
30
45
60
90
µm ± 20 %
A2
Closed loop travel ³
15
30
45
60
90
µm
A5
* Integrated position feedback sensor
SGS
B
Closed / open loop ** resolution
0.3 / 0.15
0.6 / 0.3
0.9 / 0.45
1.2 / 0.6
1.8 / 0.9
nm
C3
Stiffness
100
50
33
25
16
N/µm ± 20 %
D1
Force generation (blocked)
1500
N ± 20 %
D2
Push/pull force capacity
1000 / 100
N
D3
Torque limit (at tip)
350
mNm
D6
Electrical capacitance
1.8
3.6
5.4
7.2
10.8
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
15
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
18
14
10
8.5
6
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
VL
J1
* Sensor connection
L
J2
Weight without cables
20
28
46
54
62
g ± 5 %
K
Material case / end pieces
N-S
L
Length L
32
50
68
86
122
mm ± 0.3
Recommended Piezo Linear Amplifier / Controller
C, D ,G , H
M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers
P-842, P-843 Preloaded Open & Closed Loop Low Voltage Piezoelectric Stack Actautor
>> Get latest Information from New PI Website
· Displacement to 90 µm
· Pushing Forces to 800 N
· Pulling Forces to 300 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· UHV Option
P-842 and P-843 Preloaded Piezoelectric Actuators are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload of 300 N makes them ideal for machining applications.
P-842 is specifically designed for open loop operation. For highest precision and repeatability, the P-843 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
The PZT translators are equipped with high reliability multilayer Piezoelectric ceramic stacks protected by an internally spring preloaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo transducer can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. The P-176.50 Flexible Tip is available to protect the ceramics from bending forces (see page 46).
Application examples: Static and dynamic positioning, disk drive testing, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P843-30 P-842.30 PZT
Fig. P842-843 P-842, P-843 Dimensions
Factory Installed Options:
P-703.20 High Vacuum Option (see page 44)
Accessories:
P-176.50 Flexible Tip, see page 46
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-842, P-843
Models (Open Loop Versions)
(Closed Loop Versions *)
P-842.10
P-843.10
P-842.20
P-843.20
P-842.30
P-843.30
P-842.40
P-843.40
P-842.60
P-843.60
Units
Notes see p. 47
Open loop travel @ 0 to 100 V
15
30
45
60
90
µm ± 20 %
A2
Closed loop travel ³
15
30
45
60
90
µm
A5
* Integrated feedback sensor
SGS
B
Closed / open loop ** resolution
0.3 / 0.15
0.6 / 0.3
0.9 / 0.45
1.2 / 0.6
1.8 / 0.9
nm
C3
Stiffness
100
50
33
25
16
N/µm ± 20 %
D1
Force generation (blocked)
1500
N ± 20 %
D2
Push/pull force capacity
800 / 300
N
D3
Torque limit (at tip)
350
mNm
D6
Electrical capacitance
1.8
3.6
5.4
7.2
10.8
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
15
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
18
14
10
8.5
6
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
VL
J1
* Sensor connection
L
J2
Weight without cables
31
42
53
64
86
g ± 5 %
K
Material case / end pieces
N-S
L
Length L
37
55
73
91
127
mm ± 0.3
Recommended Piezo Linear Amplifier / Controller
C, D ,G , H
M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-844, P-845 Preloaded Open & Closed Loop Low Voltage PZT Translator
>> Get latest Information from New PI Website
· Displacement to 90 µm
· Pushing Forces to 3000 N
· Pulling Forces to 700 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: UHV, Water Protected
P-844 and P-845 Preloaded Piezoelectric Trasnducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with submillisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
P-844 is specifically designed for open loop operation. For highest precision and repeatability, the P-845 closed loop version integrates ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
The PZT translators are equipped with high reliability multilayer Piezoelectric stacks protected by an internally spring preloaded non magnetic stainless steel case. For push/pull forces up to 100 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base. The P-176.60 Flexible Tip is available to protect the ceramics from bending forces (see page 46).
Application examples: Static and dynamic positioning, disk drive testing, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, etc. (see page 4 for details).
Fig. P-844-20 P-844.20 Piezoelectric
Fig. P-844-845 P-844, P-845 Dimensions
Factory Installed Options:
P-703.20 High Vacuum Option (see page 44)
P-706.xx Water Protected Case (see page 45)
Accessories:
P-176.60 Flexible Tip, see page 46
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-844, P-845
Models (Open Loop Versions)
(Closed Loop Versions *)
P-844.10
P-845.10
P-844.20
P-845.20
P-844.30
P-845.30
P-844.40
P-845.40
P-844.60
P-845.60
Units
Notes see p. 47
Open loop travel @ 0 to 100 V
15
30
45
60
90
µm ± 20 %
A2
Closed loop travel ³
15
30
45
60
90
µm
A5
* Integrated feedback sensor
SGS
B
Closed / open loop ** resolution
0.3 / 0.15
0.6 / 0.3
0.9 / 0.45
1.2 / 0.6
1.8 / 0.9
nm
C3
Stiffness
400
200
133
100
65
N/µm ± 20 %
D1
Force generation (blocked)
6000
N ± 20 %
D2
Push/pull force capacity
3000 / 700
N
D3
Torque limit (at tip)
1000
mNm
D6
Electrical capacitance
7.2
14.5
22
29
43
µF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
60
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
16
12
9
7.5
5.5
kHz ± 20 %
G2
Standard operating temperature range
-20 to +80
°C
H2
Voltage connection
VL
J1
* Sensor connection
L
J2
Weight without cables
84
108
132
156
204
g ± 5 %
K
Material case / end pieces
N-S
L
Length L
47
65
83
101
137
mm ± 0.3
Recommended Piezo Linear Amplifier / Controller
C, D ,G , H
M
* Closed loop models only. Closed loop models are supplied with calibration data sheets
** Noise equivalent motion with E-503 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-170 ..., P-178 Open & Closed Loop High Voltage PZT Translator
>> Get latest Information from New PI Website
· Displacement to 80 µm
· Pushing Forces to 2000 N
· Pulling Forces to 50 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: UHV, High & Low Temperature, Choice of End Pieces
P-170 to 173 and P-178 Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response.
Standard models are specifically designed for open loop operation. For highest precision and repeatability, select the P-177.10 high-accuracy closed loop option integrating ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
P-178 models are equipped with a higher number of thinner Piezoelectric ceramic layers than P-170 to P-173 models, providing more displacement in the same package. On the other hand, they handle lower push/pull forces and the maximum operating voltage is limited to -1000 V. Also, voltages in excess of -750 V are recommended only for short periods of time for the P-178 models.
The PZT ceramic stack is protected by an aluminum case. Standard top piece is a magnet, standard bottom piece is a ferromagnetic steel flat. A variety of optional top and bottom pieces are available for ease of mounting. For push/pull forces up to 3 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.
Application examples: Static and dynamic positioning, optics, metrology, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P170-8 P-170 ... P-178 PZT Actuators
Fig. P170-8 P-170 ... P-178 Dimensions
Factory Installed Options: 1)
P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44), not for P-170.00, P-178.10
P-702.20 Low Temperature Option (see page 44)
P-703.10 High Vacuum Option (see page 44)
P-705.00 Positive Polarity Option (see page 45)
P-700.10 M4 on Top Piece
P-700.01 M4 on Bottom Piece
P-700.20 M5 on Top Piece
P-700.02 M5 on Bottom Piece
P-700.03 M8 on Bottom Piece
P-700.40 4/40 on Top Piece
P-700.04 4/40 on Bottom Piece
P-700.50 Flat Top Piece, Tungsten Carbide
P-700.60 Flat Top Piece, Tungsten Carbide Polished
P-700.70 Ball Tip (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-170.00 to P-170.07, and list options separately.
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-170 to P-178.50
Piezo Actuator Model *
P-170.00
P-171.00
P-172.00
P-173.00
P-178.10
P-178.20
P-178.30
P-178.50
Units
Notes see p. 47
Open loop travel @ 0 to -1000 V
5
10
20
40
10
20
40
80
µm ± 20 %
A4
Closed loop travel ³ *
5
10
20
40
10
20
40
80
µm
A5
* Integrated position feedback sensor
-
SGS
SGS
SGS
-
SGS
SGS
SGS
B
* Closed / open loop ** resolution
0.1 / 0.05
0.2 / 0.1
0.4 / 0.2
0.8 / 0.4
0.2 / 0.1
0.4 / 0.2
0.8 / 0.4
1.6 / 0.8
nm
C4
Stiffness
310
180
98
53
310
170
91
48
N/µm ± 20 %
D1
Force generation (blocked)
1500
1500
1500
1500
2400
2400
2400
2400
N ± 20 %
D2
Push/pull force capacity
2000 / 50
N
D3
Torque limit (at tip)
500
mNm
D6
Max. operating voltage
-1500
-1500
-1500
-1500
-1000
-1000
-1000
-1000
V
A7
Electrical capacitance
14
25
47
89
50
95
180
340
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
3.25
3.25
3.25
3.25
6
6
6
6
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
17
14
9
6
17
14
9
6
kHz ± 20 %
G2
Standard operating temperature range
-40 to +80
°C
H2
Voltage connection
VH
J1
* Sensor connection
-
L
L
L
-
L
L
L
J2
Weight without cables
19
26
40
65
19
26
40
65
g ± 5 %
K
Material case / end pieces
Al / S
L
Length of case w/o end pieces
14
22
38
68
14
22
38
68
mm ± 0.5
Recommended Piezo Linear Amplifier / Controller
B, I, J
M
* Closed loop models require the P-177.10 option and are supplied with calibration data sheets
** Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
Fig. P-170 ... P-178 Options
P-244, P-245 Preloaded Open & Closed Loop High Voltage PZT Translator
>> Get latest Information from New PI Website
· Displacement to 120 µm
· Pushing Forces to 2000 N
· Pulling Forces to 300 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: UHV, Low & High Temperature
P-244 and P-245 Preloaded Piezoelectric Transducers are high resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
Standard models are specifically designed for open loop operation. For highest precision and repeatability, select the P-177.10 high-accuracy closed loop option integrating ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
P-245 models are equipped with a higher number of thinner Piezoelectric ceramic layers, providing more displacement than P-244 models in the same package.
The PZT ceramic stack is protected by an internally spring preload stainless steel case. The standard translator tip and base have tapped holes. Select the P-244.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.
For positioning of magnetic parts the P-176.10 Magnetic Adapter can be screwed into the translator tip
Application examples: Static and dynamic positioning, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, patch clamping, etc. (see page 4 for details).
Fig. P244-5 P-244, P-245 PZT Actuators
Fig. P244-245 P-244, P-245 Dimensions
Factory Installed Options: 1)
P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44)
P-702.10 High Temperature Option (see page 44)
P-702.20 Low Temperature Option (see page 44)
P-703.20 High Vacuum Option (see page 44)
P-705.00 Positive Polarity Option (see page 45)
P-244.95 Ball Tip (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-244.00 to P-244.07, and list options separately.
Accessories:
P-176.10 magnetic adapter with M5 threaded stud, see page 45
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-244, P-245
Piezo Actuator Model *
P-244.10
P-244.20
P-244.30
P-244.40
P-245.20
P-245.30
P-245.50
P-245.70
Units
Notes see p. 47
Open loop travel @ 0 to -1000 V *
10
20
40
60
20
40
80
120
µm ± 20 %
A4
* Closed loop travel ³
10
20
40
60
20
40
80
120
µm
A5
* Integrated position feedback sensor
SGS
B
* Closed / open loop ** resolution
0.2 / 0.1
0.4 / 0.2
0.8 / 0.4
1.2 / 0.6
0.4 / 0.2
0.8 / 0.4
1.6 / 0.8
2.4 / 1.2
nm
C4
Stiffness
180
98
53
29
170
91
48
32
N/µm ± 20 %
D1
Force generation (blocked)
1800
2000
2000
2000
3000
3000
3000
3000
N ± 20 %
D2
Push/pull force capacity
2000 / 300
N
D3
Torque limit (at tip)
50
mNm
D6
Max. operating voltage
-1500
-1500
-1500
-1500
-1000
-1000
-1000
-1000
V
A7
Electrical capacitance
25
47
89
133
95
180
340
500
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
3
3
3
3
6
6
6
6
µA/(Hz x µm)
F2
Unloaded resonant frequency (f0)
16
12
9
5.5
15
11
8
5
kHz ± 20 %
G2
Standard operating temperature range
-40 to +80
°C
H2
Voltage connection
VH
J1
* Sensor connection
L
J2
Weight without cables
59
72
102
136
59
72
102
136
g ± 5 %
K
Material case / end pieces
N-S
L
Length L
45
61.5
93.5
127
45
61.5
93.5
127
mm ± 0.5
Recommended Piezo Linear Amplifier / Controller
B, I, J
M
* Closed loop models require the P-177.10 option and are supplied with calibration data sheets
** Noise equivalent motion with E-507 amplifier
For mounting guidelines see page 39
Custom designs for volume buyers!
P-239 Preloaded Open & Closed Loop High Voltage PZT Translator
>> Get latest Information from New PI Website
· Displacement to 180 µm
· Pushing Forces to 4500 N
· Pulling Forces to 500 N
· Sub-millisecond Response
· Sub-Nanometer Resolution
· Options: UHV, Low & High Temperature
P-239 Preloaded Piezoelectric Transducers are ultrahigh-resolution linear actuators for static and dynamic applications. They provide subnanometer resolution with sub-millisecond response. The internal spring preload makes them also ideal for push/pull applications such as precision tools servos and machining applications.
Standard models are specifically designed for open loop operation. For highest precision and repeatability, select the P-177.10 high-accuracy closed loop option integrating ultrahigh-resolution strain gage position sensors for operation with PI piezoelectric servo motion controllers (see "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section, pages 30, 29 for details).
P-239 models are equipped with thinner piezoelectric ceramic layers, providing displacement up to 180 µm at -1000 V operating voltage.
The PZT ceramic stack is protected by an internally spring-preloaded stainless steel case. The standard translator tip and base have tapped holes. Select the P-239.95 ball-tip-option to help decouple off-axis or torque loads from the translator tip. For push/pull forces up to 5 N, the piezo translator can be mounted by clamping around the case. For larger forces, the translator must be mounted by the base.
Application examples: Static and dynamic positioning, optics, metrology, smart structures, precision machining, tool servo, adaptive mechanics, vibration cancellation, switching, laser tuning, force generation for bending or compressing of material, etc. (see page 4 for details).
Fig. P239 P-239 PZT Actuators
Fig. P239 P-239 Dimensions
Factory Installed Options: 1)
P-177.10 High Precision Closed Loop Option, (Strain Gauge Sensors, see page 44), not for P-239.00 / .10
P-702.10 High Temperature Option (see page 44)
P-702.20 Low Temperature Option (see page 44)
P-703.20 High Vacuum Option (see page 44)
P-705.00 Positive Polarity Option Option (see page 45)
P-239.95 Ball Tip (see page 45)
1) When ordering the following options, change the last digit to 7, e.g. P-239.00 to P-239.07, and list options separately.
Accessories:
High Voltage extension cables , sensor cables & connectors: see end of "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section.
See "Piezoelectric Control Electronics: Piezo Driver / High Voltage Linear Amplifier" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Technical Data: P-239
Piezo Actuator Model *
P-239.00
P-239.10
P-239.20
P-239.30
P-239.40
P-239.60
P-239.80
P-239.90
Units
Notes see p. 47
Open loop travel @ 0 to -1000 V
5
10
20
40
60
100
140
180
µm ± 20 %
A4
Closed loop travel ³ *
5
10
20
40
60
100
140
180
µm
A5
* Integrated position feedback sensor
SGS
B
* Closed / open loop ** resolution
0.1 / 0.05
0.2 / 0.1
0.4 / 0.2
0.8 / 0.4
1.2 / 0.6
2 / 1
2.8 / 1.4
3.6 / 1.8
nm
C4
Stiffness
1440
800
423
220
150
90
66
52
N/µm ± 20 %
D1
Force generation (blocked)
7000
N ± 20 %
D2
Push/pull force capacity
4500 / 500
N
D3
Torque limit (at tip)
1000
mNm
D6
Max. operating voltage
-1000
V
A7
Electrical capacitance
70
120
245
460
660
1150
1550
2100
nF ± 20 %
F1
Dynamic operating current coefficient (DOCC)
17.5