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Parallelism of Positioner Measuring Surfaces

The Latest Information on Capacitive Nanometrology Position Sensors is Available Here

For optimum results target and probe plates must be parallel to each other. Any deviation from parallelism or any tilting during distance changes influence both the measurement linearity and the gain. Figures 5.6/1 and 5.6/2 show the calculated influence of deviation from parallelism on linearity and gain.


Nonlinearity vs. Tilt


Gain vs. Tilt.

Electronics Packaging

Standard PI capacitive position sensor electronics are configured on E-509.Cx Euroboard cards fitting the E-500 and E-501 series controllers (see "PZT Control Electronics" section). They are also integrated in the E-610.C0 OEM PZT Controller, the E-612 High Speed Parallel Port PZT Controller and the E-710 Digital PZT Controller. One, two and three channel standard versions are offered. Custom designs are available tailored to your specific needs.

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