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Technical Data

The Latest Information on Capacitive Nanometrology Position Sensors is Available Here

Apart from the standard sensors listed below, PI offers a variety of custom versions along with custom electronics for different measuring ranges, material match etc. If you don't find what you are looking for, please call your local PI representative.

CAPACITIVE POSITION SENSOR ELECTRONICS
Power supply	± 15 V
Analog output	± 5 V (0V - 10V)
Noise factor	0.115 ppm/ÖHz1)
Bandwidth	0.3 to 3 kHz, jumper selectable; up to 10 kHz on request
Temperature drift	typ. -30 ppm/°K1)
Linearity error	< 0.05 %
Operating temperature range	-20 to +80°C

Specifications in ppm (parts per million) refer to measuring range.

CAPACITIVE POSITION SENSORS
Models	Material	Active Surface (mm²)	Nominal Measuring Distance (µm)	Extended Measuring Distance (µm)	Therm. Drift 1) ppm/°K
D-015.00	Aluminum*	16.6	15	45	50
D-050.00	Aluminum*	67.7	50	150	50
D-100.00	Aluminum*	113.1	100	300	50

Change of the active measuring surface in parts per million as referred to the selected measuring range.
* Other materials on request.

D-015.00 Dimensions

D-050.00 Dimensions

D-100.00 Dimensons

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