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Capacitive Position Sensors with Control Module

The Latest Information on Capacitive Nanometrology Position Sensors is Available Here

Contents

• D-015, D-050, D-100 Sub-nm Resolution Capacitive Position Sensors
  • Measurement Method
  • Resolution
  • Stability and Linearity of PI Capacitive Position Sensors
  • Insensitivity to Cable Influences
  • Material Match
  • Electrode Geometry, Sensor Surface Flatness and Finish
  • Parallelism of Positioner Measuring Surfaces
  • Electronics Packaging
  • Set-Up and Range
  • Technical Data

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