Capacitive Nanometrology Position Sensors: Features & Advantages, Applications
Capacitive Sensors Product Overview
Capacitive Sensors Selection Guide

Properties of PI Sensors
  • Highest resolution (0.01 nanometer) of all commercially available position sensors
  • Measuring ranges of up to 1 mm
  • Ideal for parallel metrology applications
  • Linearity to 0.003%
  • Extremely high long-term stability (better than 0.1 nm / 3 hours)
  • Vacuum compatible
  • Bandwidth to 10 kHz
  • Invar versions for highest temperature stability (5 x 10-6 / K)
  • Multi-channel digital electronics available
  • Compatible with PI nanopositioning system servo-controllers
  • Two-plate and single-plate sensors
  • Custom models
Reasons for Choosing PI
  • Over 30 years experience in designing ultra-high-precision mechanics
  • In-house design & manufacture of sensors and electronics
  • State-of-the-art equipment for simulation, production and testing
  • State-of-the-art metrology lab with multiple thermal, acoustic and seismic isolation for meaningful sub-nanometer measurements
  • In-house controller development
  • PI has the most-experienced nanopositioning systems development and production teams in the field
  • ISO-9001 certified since 1994

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Capacitive position sensors in an ultra-high-accuracy,
6-degree-of freedom, scanning microscopy,
nanopositioning system designed by PI for
the German Institute of Standards (PTB).


Two-plate capacitive sensor working principle.


Quality control and long-term stability testing of two plate capacitive displacement sensors at PI.


Custom, 7-channel, capacitive position sensor electronics.


Working principle of STM (scanning tunneling microscope) with
integrated capacitive position sensors.