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| Selection Guide: Vertical and Tip/Tilt Nanopositioning Systems |
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Models* |
Description |
Travel [µm] |
Sensor |
Dynamics* |
Precision** |
 |
 |
P-611.ZS, P-611.XZS |
Compact, low-cost Z nanopositioning stages. |
100 |
SGS |
++ooo |
++ooo |
 |
 |
P-612.Z |
Compact, Low-Cost, Z Stage |
100 |
SGS |
++ooo |
++ooo |
 |
 |
P-601 |
Closed-loop, Z-axis with flexure guidance |
110, 300, 400 |
SGS |
++++o |
++ooo |
 |
 |
P-620.Z - P-622.Z - |
PIHera® Z-axis nanopositioners, compact, very accurate, long travel range. |
50, 100, 250 |
Capacitive |
+++oo |
+++oo |
 |
 |
P-733 |
Z piezo scanning piezostage, 50 x 50 mm aperture, vacuum versions available. |
100 x 100 (x 10) |
Capacitive |
+++oo |
+++oo |
 |
 |
P-737 |
PIFOC® Z-axis microscopy piezo stage for high-resolution sample positioning and scanning |
to 500 µm |
SGS |
++ooo |
+++oo |
 |
 |
P-736 |
High-Speed piezo-driven slide scanner. 5 millisec response time. Closed-loop with piezoresistive sensors |
100, 200 |
Piezo Resistive |
+++++ |
+++oo |
 |
 |
P-541.Z |
Low-profile Z-stage, 80 x 80 mm aperture. |
100. 1 mrad |
Capacitive / SGS |
++ooo |
+++oo |
 |
 |
P-518 - P-528 - P-558 |
Z-axis and tip/tilt piezostage platforms clear aperture |
to 200 in Z, 4 mrad |
Capacitive |
+++oo |
++++o |
 |
 |
N-510 |
Tripod Z-tip/tilt nanopositioning platform with NEXLINE® piezo motors |
to 1.3 mm / 10 mrad |
Linear Encoder |
+++oo |
|
 |
 |
P-915KVPZ |
Vacuum compatible piezo Z stage |
45 |
Capacitive |
++++o |
++++o |
 |
 |
N-515KNPH |
Nonmagnetic 6-axis piezo Hexapod precision positioning system with NEXLINE® piezo motor actuators |
to 10 mm /6ŗ |
Linear Encoder |
++ooo |
+++oo |
 |
 |
N-510KHFS |
Tripod Z-Tip/Tilt nanopositioning platform with additional fine positioning |
400 plus |
Capacitive 40 µm |
++ooo |
++++o |
 |
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P-915KLPZ |
Low-profile piezo objective scanner, open-loop |
75 |
- |
++++o |
+++oo |
 |
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P-720 |
PIFOC® Z- objective nanofocusing system, very compact, without sensors. |
100 |
- |
++ooo |
++ooo |
 |
 |
P-721.CDQ P-721.SL2 |
PIFOC® Z- objective nanofocusing system, very fast and accurate, with QuickLock mounting system, direct metrology. |
100 |
Capacitive / SGS |
+++oo |
++++o |
 |
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P-725 |
PIFOC® Z- objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. |
100, 250, 400 |
Capacitive |
++ooo |
+++oo |
 |
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P-725.XDD |
PIFOC® Z- nanopositioning and scanning system for microscope objectives, direct metrology. | 20 |
Capacitive / SGS |
+++++ |
+++++ |
 |
 |
P-726 |
PIFOC® high-dynamic piezo Z scanner for heavy objectives, direct metrology. |
100 |
Capacitive |
+++++ |
+++++ |
 |
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P-721.KTPZ |
PIFOC® nosepiece nanopositioning system, high stiffness, direct metrology. |
80 |
Capacitive |
+++oo |
++++o |
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P-721.KPTZ |
High load PIFOC® nosepiece nanopositioner, direct metrology. |
150 |
Capacitive |
++++o |
++++o |
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