PILine® Piezomotors
Based on a new ultrasonic ceramic drive, they are light, compact, self-locking, vacuum compatible and have a number of other advantages over classical linear motors. |
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Capacitive Sensors
Non-contact and absolute-measuring, with subnanometer resolution, excellent linearity and high bandwidth. Ideally suited for parallel metrology configurations. |
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PICMA® Piezo Actuators
Monolithic multilayer piezo actuators with ceramic encapsulation. Insensitive to atmospheric humidity, longer lifetime and wider operating temperature range than conventional multilayer piezo actuators. Ideal for vacuum operation. |
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PiezoWalk® Technology
Addresses the drawbacks of existing nanopositioning drives. Provides long travel, subnanometer resolution and very high forces. Non-magnetic, UV- and vacuum compatible. |
Parallel Kinematics/Hexapods
Allows design of compact, stiff micro- and nanopositioning stages with minimal inertia for fastest possible response; no cumulative guiding error and no moving cables. |
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Parallel Metrology
Permits better multi-axis accuracy by keeping all motion on all controlled axes inside the servo-loop. Parallel metrology is a requirement for active trajectory control. |
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Active Trajectory Control
Compensates crosstalk and guidance errors achieving accuracies in the subnanometer and submicroradian range. |
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Dynamic Digital Linearization
Reduces phase shifts and tracking errors of piezo nanopositioning systems used in fast scanning applications. Improves dynamic linearity by up to 1000-fold. |
InputShaping®
Stops self-excited vibrations inside or outside the servo-loop before they start. Achieves fastest possible settling—usually within one period of the resonant frequency. |
