- Nanometrology lab with multiple thermal, acoustic and seismic isolation for reproducible measurements in the sub-nanometer range
- Laser interferometer with a large variety of special optics for 1-D to 6-D measurements
- Laser scanning vibrometer for vibration measurements
- Capacitive position measuring system with sub-nanometer resolution
- Surface analysis interferometer for sub-nanometer flatness measurement
- Electronic autocollimators
- Computer-controlled environmental chambers
- Spectrum analyzers
- Coordinate measurement machines (CMM)
- Special microscopes
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