• Choice of Strain Gauge (Lower Cost) and Capacitive Sensors (Higher Performance)
• Low Profile for Easy Integration: 16.5 mm
• Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
• To 200 x 200 µm XY-Travel Range, 100 µm Z, 1 mrad Tip/Tilt
• Direct Drive Version for High-Speed Positioning & Scanning
• 80 x 80 mm Clear Aperture
• PICMA^® High-Performance Piezo Actuators for Superior Lifetime

P-541/P-542 nanopositioning and scanning stages are designed for easy integration into high-resolution microscopes. They feature a very low profile of 16.5 mm, a large 80 x 80 mm aperture, and offer highly accurate motion with sub-nanometer resolution

Datasheets & Additional Information

>> Download the precision Microscope Stage Catalog

>> P-541.2CD - P-542.2CD XY-Nanopositioning Stage
with Capacitive Sensors
>> P-541.2CD - P-542.2CD PDF Datasheet

>> P-541.2SL - P-542.2SL XY-Nanopositioning Stage
with Strain Gauge Sensors
>> P-541.2SL - P-542.2SL PDF Datasheet

>> P-541.ZCD Z/Tip/Tilt Stages with Capacitive Sensors
>> P-541.ZCD PDF Datasheet

>> P-541.ZSL Z/Tip/Tilt Stages with Strain Gauge
Sensors
>> P-541.ZSL PDF Datasheet

>> Selection Guide Scanning Microscopy Stages with
Aperture
>> M-686 Low-Profile XY Open-Frame Piezomotor Stage
with Linear Encoders