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Date: 06/2006
PI News: M-511.HD Hybrid Nanopositioning Stage, Piezo/DC-Motor World First; M511.HD ultra-precision Linear translation stage; Precision Linear Slide

M-511.HD Hybrid Piezo/DC-Motor Nanopositioning Translation Stage a World First

  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power

M-511.HD Long-Travel, High-Speed Nanopositioning Systems
The M-511.HD is based on the proven design of the M-5x1 precision micropositioning stage series, with an integrated, flexure-guided, piezo actuator added. The M-511.HD allows velocities to 125 mm/s with an encoder resolution of 2 nm and load capacity of 50 kg for horizontal operation.

Absolute Accuracy
The servo-control loops for both the motorized and the piezo drive use the same position sensor. The result is a motion system with hundreds of millimeters travel but with the precision of a piezo-based nanopositioner. The resolution and the positioning accuracy depend on the choice of the feedback sensor. PI hybrid systems currently use optical linear encoders with a resolution of 2 and 4 nm. Depending on the stage, a minimum incremental motion or a repeatability of 4 nm can be achieved over the entire travel range.

Typical Applications
Surface Inspection, Microscopy, Laser Technology, Interferometry Metrology

>> M-511.HD Online Datasheet
>> M-511.HD PDF Datasheet
>> PDF Brochure: Hybrid Technology

M-511.HD Nanopositioning Translation Stage

Watch Hybrid Drive Animation below.
Hybrid Stage (DC Servo/PZT) principle. The PZT actively compensates for stick/slip effects and backlash.


>> Free 500 p. Hardbound Catalog

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PI is a leading manufacturer of nanopositioning, linear actuatorsand precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications .
PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 40 years.
The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research.
PI is present worldwide with eight subsidiaries and total staff of 500+.