- Six Degrees of Freedom
- Vacuum Compatible Versions
- Load Capacity 10 kg
- Travel Ranges to 45 mm (linear), 25° (rotation)
- 7 nm Resolution
- 300 nm Min. Incremental Motion
- Repeatability ±0.5 µm
- Very Compact Design
- Self Locking to 10 kg
The new M-824 Hexapod (Stewart Platform) precision 6-axis micropositioning and
alignment system from PI provides high-resolution
motion in six degrees of freedom. Its compact size
and ability to work in vacuum environments makes
the Hexapod suitable for applications in X-ray
microscopy, aligning optics, and semiconductor
technology.
The micropositioning system offers multiaxis motion
with linear and rotary travel ranges of 50 mm and
36°, respectively. This motion is achieved with
submicron resolution and repeatability.
Compared to the M-840 Hexapod it provides higher precision and smaller dimensions
>> M-824 Hexapod Description / Specifications
>> M-824 PDF
>> Hexapod Selection Guide
>> M-840 Hexapod
>> M-850 High-Force Hexapod
>> M-850k102, 1000 kg Ultra-High-Load Hexapod
>> More Information on Hexapods
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M-824 Vacuum 6-axis precision positioning stage |
