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Datum: 01/2008
P-629 PI News: PIHera« Flexure-Guided Precision Nanopositioning Stages Now With Travel Ranges to 1.8 mm.; P629

PIHera« P-629 Flexure-Guided Precision Nanopositioning Stages Now With Travel Ranges to 1.8 mm.

PI has extended its PIHera« family of compact flexure-guided piezo stage nanopostioning systems, now offering record travel ranges to 1.8 mm.

X, XY, Z and XYZ Versions
PIHera« piezo stages come in X, XY, Z and XYZ versions featuring travel ranges from 50 to 1800 Ám in X and XY und up to 400 Ám in Z.

Nanometer Precision for QA & Metrology Applications
These precision closed-loop flexure-guided piezo stages can be used for scanning probe applications (surface metrology) and static positioning. Most PIHera« stages provide sub-nanometer resolution and even the 1.8 mm versions better than 3 nm resolution. The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy; trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera« stages ideal for measuring and QA applications.

Capacitive Feedback Offers Greater Motion Linearity
The piezo stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI Capacitive Feedback are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors. They are significantly less sensitive to influences by external noise and provide much better long term stability than strain gauge sensors.

Typical Applications
Surface Metrology. Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance, Semiconductor Technology

Features & Advantages

  • No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free
  • Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
  • X, XY, Z and XYZ Versions Available
  • 50 to 1800 Travel Ranges
  • Closed-Loop Control for Up to 99.98 % Absolute Accuracy
  • Vacuum-Compatible Versions
  • Stiff and Compact Design for Millisecond Responsiveness
  • Sub-Nanometer Resolution
  • Frictionless, Maintenance-Free Precision Flexure Guiding System
  • Capacitive Direct-Metrology Sensors for Faster Servo Response

Flexible Controllers: High Speed, Digital and Analog Control
A variety of ultra-low-noise controllers with both digital and analog input provide fast communications and come with a wide selection of software tools.
Examples: Digital: E-753. OEM-Cards: E-621. Bench-Top: E-625, E-665 (with Display) .

Models: Vacuum versions to 10-9 hP are available as part numbers P-62x.xUD

X-Stages:
Closed-Loop:

P-620.1CD / P-620.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 50 Ám, Capacitive Feedback
P-621.1CD / P-621.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 100 Ám, Capacitive Feedback
P-622.1CD / P-622.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 250 Ám, Capacitive Feedback
P-625.1CD / P-625.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 500 Ám, Capacitive Feedback
P-628.1CD / P-628.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 800 Ám, Capacitive Feedback
P-629.1CD / P-629.1CL PIHera« Flexure-Guided Nanopositioning Piezo Stage, 1500 Ám, Capacitive Feedback

Open-Loop:
P-620.10 L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 60 Ám
P-621.10L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 120 Ám
P-622.10L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 300 Ám
P-625.10L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 600 Ám
P-628.10L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 950 Ám
P-629.10L PIHera« Flexure-Guided Nanopositioning Piezo Stage, 1800 Ám

XY Stages
Closed-Loop:

P-620.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 50 Ám, Capacitive Feedback
P-621.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 100 Ám, Capacitive Feedback
P-622.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 250 Ám, Capacitive Feedback
P-625.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 500 Ám, Capacitive Feedback
P-628.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 800 Ám, Capacitive Feedback
P-629.2CD PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 1500 Ám, Capacitive Feedback

Open Loop:
P-620.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 60 Ám
P-621.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 120 Ám
P-622.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 300 Ám
P-625.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 600 Ám
P-628.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 1000 Ám
P-629.20L PIHera« Flexure-Guided Nanopositioning Piezo XY-Stage, 1800 Ám

Z-Stages:
Closed-Loop:

P-620.ZCD PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 50 Ám, Capacitive Feedback
P-620.ZCL PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 50 Ám, Capacitive Feedback
P-621.ZCD PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 100 Ám, Capacitive Feedback
P-621.ZCL PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 100 Ám, Capacitive Feedback
P-622.ZCD PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 250 Ám, Capacitive Feedback
P-622.ZCL PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 250 Ám, Capacitive Feedback

Open-Loop:
P-620.Z0L PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 65 Ám
P-621.Z0L PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 140 Ám
P-622.Z0L PIHera« Flexure-Guided Piezo-Z Nanopositioning Stage, 400 Ám

XYZ Models
can be built by combining an XY stage with a Z stage.

Datasheets & Additional Information


>> Piezo Stage Overview / Selection Guide

>> PIHera« X-Piezo Stage Nanopositioning System Online Datasheet
>> PIHera«X-Piezo Stage Nanopositioning System PDF Datasheet

>> PIHera« XY-Piezo Stage Nanopositioning System Online Datasheet
>> PIHera« Stage Nanopositioning System PDF Datasheet

>> PIHera« Vertical Piezo Stage Nanopositioning System Online Datasheet
>> PIHera« Vertical Piezo Stage Nanopositioning System PDF Datasheet

PIHera
500 Ám PIHera« Stage, Slow Scanning Mode

Single Axis PIHera« Stack
Variety of Single Axis PIHera« PiezoStages.

PIHera« XY piezo nano-translation stages with travel ranges from 50 x 50 Ám to 1800 x 1800 Ám
PIHera« XY piezo stage nano-translation system with travel ranges from 50 x 50 Ám to 1800 x 1800 Ám.

P-620.ZCL, P-621.ZCL and P-622.ZCL (l to r)
PIHera« piezo nano-elevation stages
P-620.ZCL, P-621.ZCL and P-622.ZCL (l to r) PIHera« piezo nano-elevation stages (CD for size comparison).

PIHera« XYZ combination
PIHera« XYZ combination.

 


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PI is a leading manufacturer of nanopositioning, linear actuatorsand precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications .
PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 40 years.
The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research.
PI is present worldwide with eight subsidiaries and total staff of 500+.