The 2009 PI catalog presents a number of new standard and custom vacuum compatible products, ranging from servo motor actuators to complex 6-Axis Hexapod systems for use in a vast variety of applications.
More information on vacuum compatible products
Brochure: "Vacuum-Compatible and Non-Magnetic Drive Technologies"
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| Piezo-Flexure Stages for Nanopositioning Applications
P-915KLVS Large Aperture, Vacuum Compatible XYZ Piezo Scanner
P-915KLVS high-dynamics, vacuum compatible, high-load nanopositioner XYZ piezo scanner offers a very large clear aperture of 200 x 200 mm.
- Vacuum Compatible to 10-6 hPa
- Direct Metrology with Capacitive Sensors
- Excellent Straightness: <0.1 µrad Runout
- Frictionless, High-Precision Flexure Guiding System
- Direct Metrology with Capacitive Sensors
Datasheets & Additional Information
>> P-915KLVS Online Datasheet
>> P-915KLVS PDF Datasheet
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The P-915KLVS high-dynamics scanner offers a very large clear aperture of 200 x 200 mm
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P-915KVPZ Large Aperture, Vacuum-Compatible Piezo-Z Stage
The high-load, high dynamics, direct-drive P-915KVPZ stage, with its large clear aperture provides high stiffness for fast operation.
- Travel Range 45 µm
- Large Clear Aperture 273 x 273 mm
- Direct Metrology with Capacitive Sensors
- Direct Drive for High Dynamics and Stiffness
- Vacuum Compatible up to 10-6 hPa
- Outstanding Lifetime Due to PICMA® Piezo Actuators
Datasheets & Additional Information
>> P-915KVPZ Online Datasheet
>> P-915KVPZ PDF Datasheet
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The direct-drive P-915KVPZ stage provides high stiffness for fast operation
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P-733.2UD Non-Magnetic XY Piezo Scanning Stage for UHV to 10-9 hPa
- Travel Ranges to 100 x 100 µm in X,Y & to 10 µm in Z
- Resolution to 0.1 nm with Capacitive Sensors, Ideal for Super-Resolution Microscopy
- High-Speed Versions with Direct Drive
- Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
- Parallel Metrology for Active Trajectory Control
- Frictionless, High-Precision Flexure Guiding System
- Clear Aperture 50 x 50 mm for Transmitted-Light Applications
Datasheets & Additional Information
>> P-733.2UD Online Datasheet
>> P-733.2UD PDF Datasheet
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P-363 PicoCube™ XY(Z) High-Dynamics Nanoscanner for Scanning Probe Microscopy
- Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
- Compact Manipulation Tool for Bio/Nanotechnology
- Resonant Frequency 9.8 kHz
- Capacitive Sensors for Highest Accuracy
- Parallel-Motion Metrology for Automated Compensation of Guiding Errors
- 50 Picometer Resolution
- 5 x 5 x 5 µm Travel Range
Datasheets & Additional Information
>> P-363 Online Datasheet
>> P-363 PDF Datasheet
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| Micropositioning Stages
M-663K Vacuum-Compatible, Piezo-Motor-Driven Miniature Translation Stage
- Smallest Translation Stage with Closed-Loop Linear Motor and Encoder
- Travel Range 19 mm
- Vacuum Compatible up to 10-6 hPa
- Direct Metrology Linear Encoder
- Resolution 0.1 µm
- XY Combination Possible
Datasheets & Additional Information
>> M-663K Online Datasheet
>> M-663K PDF Datasheet
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The M-663KVLS Linear Slide is vacuum compatible down to 10-6 hPa
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M-682K Non-Magnetic, Piezo Ceramic Motor-Driven Translation Stage
- Integrated Non-Magnetic PILine® RodDrive
- Travel Range 50 mm
- Integrated Linear Encoders with 0.1 µm Resolution
- Up to 6 N Force Generation
- Closed-Loop Velocity up to 100 mm/s
- Low Profile, Small Footprint
Datasheets & Additional Information
>> M-682K Online Datasheet
>> M-682K PDF Datasheet
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Custom non-magnetic M-682KNMS linear stage with integrated RodDrive linear motor
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| Hexapods / 6-Axis Positioning Systems
Vacuum Hexapod 6-Axis Positioner
Parallel-Kinematics System for Wide Temperature Ranges
- 6 Degrees of Freedom, Works in Any Orientation
- Vacuum Compatible up to 10-6 hPa
- 200 kg Load Capacity (Vertical)
- Repeatability to ±1 µm
- Encoder Resolution to 5 nm
Datasheets & Additional Information
>> M-850K Online Datasheet
>> M-850K PDF Datasheet
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This custom hexapod was designed to work in a thermo-vacuum chamber
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M-824 Compact 6-Axis-Positioning System
Precision Parallel-Kinematics Micropositioner with Controller
- Extremely Compact
- Travel Ranges to 45 mm (linear), 25° (rotation)
- Load Capacity to 10 kg, Self Locking Version
- Resolution to 7 nm
- Min. Incremental Motion to 300 nm
- Repeatability ±0.5 µm
- Velocity to 25 mm/sec
Datasheets & Additional Information
>> M-824 Online Datasheet
>> M-824 PDF Datasheet
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M-824.3DG compact 6-axis Hexapod
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Linear Actuators
M-227K High-Resolution DC-Mike Linear Actuator
- Compact Design
- Vacuum Compatible up to 10-6 hPa
- Non-Rotating Tip
- Closed-Loop DC-Motors
Datasheets & Additional Information
>> M-227K Online Datasheet
>> M-227K PDF Datasheet
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The M-227KVLA Vacuum Compatible linear actuator is equipped with rotary encoder and DC-motor with gearhead
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N-380, N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
- Travel Range 30 mm
- Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
- Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
- Very High Acceleration, e.g. for Cell Penetration
- Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
- Up to 10 N Force Generation
- Self-Locking at Rest, no Heat Generation
- Smooth Motion, no Closed-Loop Jitter
- Vacuum-Compatible and Non-Magnetic Versions
Datasheets & Additional Information
>> N-380, N-381 Online Datasheet
>> N-380, N-381 PDF Datasheet
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N-381 piezo stepper linear actuator for sample positioning and manipulation provides long travel, high speed and very high resolution. Shown with C-861 controller
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N-310 NEXACT® OEM Miniature Linear Motor/Actuator
- 20 mm Standard Travel Range, Flexible Choice of the Runner Length
- Compact and Cost-Effective Design
- 0.03 nm Resolution
- To 10 N Push/Pull Force
- Low Operating Voltage
- Self-Locking at Rest, No Head Dissipation, Nanometer Stability
- Non-Magnetic and Vacuum-Compatible Working Principle
Datasheets & Additional Information
>> N-310 Online Datasheet
>> N-310 PDF Datasheet
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N-310 Actuator with E-861 Servo-Controller (integrated drive electronics)
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N-214, N-215 NEXLINE® Linear Motor/Actuator
- 20 mm Travel Range
- 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop
- To 400 N Push / Pull Force and 600 N Holding Force
- Self Locking when Power down, No Heat Generation
- Non-Magnetic and Vacuum-Compatible Working Principle
Datasheets & Additional Information
>> N-214, N-215 Online Datasheet
>> N-214, N-215 PDF Datasheet
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N-215 NEXLINE® high-load actuator
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Other Standard Positioning Systems with Vacuum Options
Piezo Actuators
Basically all Piezo Actuators are available in vacuum compatible versions.
>> Piezo Actuators Selection Guide
>> Piezo Actuators Catalog (PDF)
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PI piezo actuators are designed to combine ultra-high performance with long lifetime in industrial and scientific applications.
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M-038 Precision Rotation Stage Unlimited Travel Range
- Ultra-High Resolution
- Max. Velocity 90°/s
- Continuous Rotation Range
- Preloaded Worm Drive for Zero Backlash
- ActiveDrive™ Manual, DC-Servo and Stepper-Motor Drives
- Clear Aperture? 40.2 mm
- Vacuum-Compatible Versions Available to 10-6 hPa
Datasheets & Additional Information
>> M-038 Online Datasheet
>> M-038 PDF Datasheet
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M-038.PD1 Rotation Stage
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M-413 · M-414 High-Load Precision Stage
Cost-Effective, Large Choice of Drives & Travel Ranges, Loads to 50 kg
- For Cost-Sensitive Precision Positioning Applications
- Travel Ranges 100 to 300 mm
- Resolution to 0.018 µm
- Min. Incremental Motion to 0.1 µm
- Preloaded Precision Leadscrew or Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- Stress-Relieved Aluminum Base for Highest Stability
Datasheets & Additional Information
>> M-413 Online Datasheet
>> M-413 PDF Datasheet
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M-413 linear stage versions (from right: the M-413.1PD, M-413.2PD and M-413.3PD provide travel ranges from 100 to 300 mm (CD for size comparison)
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M-235 High-Dynamics Heavy-Duty Precision Linear Actuator
- Travel Range 20 & 50 mm
- Min. Incremental Motion to 0.1 µm
- High-Speed Direct Drive Option
- Push/Pull Load 120 N
- Lateral Force 100 N
- Recirculating Ballscrew Drives Provide High Speeds & Long Lifetimes
- Closed-Loop DC Motors and Stepper Motors
- Non-Contact Limit and Reference Switches
- MTBF >20.000 h
- Vacuum-Compatible Versions Available to 10-6 hPa
Datasheets & Additional Information
>> M-235 Online Datasheet
>> M-235 PDF Datasheet
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M-235.2DG (top) and
M-235.5DG (bottom) high-resolution DC-Mike, ballscrew
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M-840 HexaLight™ 6-Axis Positioning System
- Six Degrees of Freedom, Travel Ranges to 100 mm/ 60° Rapid Response
- No Moving Cables for Improved Reliability and Precision
- Load Capacity 10 kg, Self-Locking Version M-840.DG
- Velocity up to 50 mm/s
- Repeatability up to ±2 µm
- Encoder Resolution to 0.016 µm
- Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
- Vacuum-Compatible Versions Available
- Virtual Pivot Point
- Sophisticated Controller Using Vector Algorithms
- MTBF 20,000 h
Datasheets & Additional Information
>> M-840 Online Datasheet
>> M-840 PDF Datasheet
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M-840 HexaLight™ 6D-Micropositioning System
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P-615 NanoCube® XYZ Piezo System Piezo Stage for Precision Alignment Applications
- Up to 420 x 420 x 300 µm Travel Range
- Resolution 1 nm
- Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Clear Aperture of 10 mm Ř, Ideal for Alignment and Photonics Packaging Applications
- Outstanding Lifetime Due to PICMA® Piezo Actuators
- Open- & Closed-Loop Versions
- Vacuum-Compatible Versions to 10-9 hPa
- Frictionless, High-Precision Flexure Guiding System
Datasheets & Additional Information
>> P-615 Online Datasheet
>> P-615 PDF Datasheet
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P-615 NanoCube® XYZ Nanopositioning System provides up to 420 x 420 x 300 µm travel range
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P-561 · P-562 · P-563 PIMars™ XYZ Piezo System
- Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 340 x 340 x 340 µm
- Capacitive Sensors for Highest Linearity
- Frictionless, High-Precision Flexure Guiding System
- Excellent Scanning Flatness
- High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
- Clear Aperture 66 x 66 mm
- Outstanding Lifetime Due to PICMA® Piezo Actuators
- UHV Versions to 10-9 hPa
Datasheets & Additional Information
>> P-561 · P-562 · P-563 Online Datasheet
>> P-561 · P-562 · P-563 PDF Datasheet
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P-562 PIMars™ multi-axis, parallel-kinematics nanopositioning stages are available with up to 340 µm travel per axis. Custom versions to 6 DOF are available
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