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In addition to its wide range of 6-axis Hexapod parallel-kinematic positioners, PI also offers 3-axis stages that take advantage of the parallel-kinematic design principles. An innovative X, Z, θY, tripod stage and a low profile planar XY θZ stage are available.
M-880 3-Axis Planar Precision Positioning System
M-880.PD (see image, top) XY-Rot-Z parallel kinematics system with very high holding force is for planar load positioning up to 20 kg with sub-micron accuracy.
- Travel Ranges 20 x 20 mm / 8°
- Static Load Capacity to 150 kg
- ActiveDrive™ Servo Motors
- Low Profile through Parallel Kinematics
- Min. Incremental Motion to 0.75 µm
- Large Clear Aperture
- Sophisticated Controller Included
M-833 Parallel Kinematic Tripod / Goniometer
The M-833 (see image, bottom) parallel-kinematics
tripod is designed for precision positioning in X, Z, θY, offering elevation, translation and tilt motion around the (horizontal) y-axis, with a user-defined pivot point.
- Goniometer Z Stage with Freely Selectable Pivot Point
- Travel Ranges ±25 mm / ±25 mm / ±30°
- Load Capacity to 4 kg
- Min. Incremental Motion to 0.1 µm
- ActiveDrive™ Servo Motors
- Compact Design with Parallel Kinematics
Datasheets & Additional Information
>> M-880 Online Datasheet
>> M-880 PDF Datasheet
>> Follow PI Physik Instrumente on Twitter
>> M-833 Online Datasheet
>> M-833 PDF Datasheet
>> Micropositioning Stages Selection Guide
>> Micropositioning and Hexapods Catalogs (PDF Downloads)
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M-830 (bottom), M-880 (top) Micropositioners with Active Drive™ Servo Motors
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