Self-Clamping Ceramic Motor, Direct Drive, Direct Encoder
The M-660 stage can accelerate to velocities of 720 degrees/sec. and resolves positions down to 4 µrad (8 arcsec). Its self-clamping ceramic drive provides very high stability, with no energy consumption at rest and no heat generation. A directly coupled precision optical encoder provides phase lag-free, backlash-free feedback to the servo controller.
Applications, Features & Advantages
Applications: Semiconductor/ Test Equipment, Metrology, Optical Instrumentation
Very Low Profile - Easy Integration: Only 15 mm (0.6”)
4 µrad Resolution
Direct Metrology Linear Encoder
Max. Velocity 720 °/s, Unlimited Travel Range
Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
PILine® Drive: Non-Magnetic, Vacuum-Compatible Working Principle
Compact Combinations with Linear Stages Available
Ceramic Drive used in the latest Generation Optical Instruments
The compact design with minimized mass and inertia provides high precision bidirectional speed and position control, as well as high speed motion contouring. The M-660 is based on the new
U-164 Piezo Motor and outperforms the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms. The innovative motor drive was also chosen by Leica Geosystems AG’s in their newest generation of surveying instruments for geodesy, because it can provide significantly higher speeds, shorter positioning times and a very high positioning accuracy when moving the measuring optics.
Controller / Software Support
A newly designed piezo motor controller is available to take advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package for seamless integration are included.
PI is a leading manufacturer of nanopositioning, linear actuatorsand precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for
40 years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 500+.