Date: 07/2005
PI News:
P-628.1CD Piezo Flexure Stage, small, 1000 µm travel, nanometer Resolution; P628.1CD
P-628 Piezo-Translation Stages Feature Record Travel Range
>> Piezo Flexure Stage Models Overview
- Travel 950 µm (Open-Loop), 800 µm (Closed-Loop)
- Compact Design
- Resolution < 1 nm
- PICMA® Longlife Piezo Drive
- Direct Metrology with Capacitive Sensors for Highest Precision
- 0.03 % Position Accuracy
Record Travel Range for Closed-Loop Piezo Stages
These monolithic positioning and scanning systems set a new record in terms of travel range for closed-loop, flexure-guided, piezo stages. Despite the increased travel range of up to 950 µm, the units are extremely compact, while providing rapid settling with nanometer-scale resolution and guiding accuracy.
The long travel range is achieved by a combination of a novel, friction-free and extremely stiff flexure system and the award-winning, ceramic-encapsulated PICMA® multilayer piezo actuators.
P-628 stages are ideal positioning systems for applications such as nanometrology, (white light) interferometry, microscopy, spectroscopy, and precision alignment of optics.
>> P-628 Single Axis Flexure Stage Descrioption
>> P-628 2-Axis Flexure Stage Descrioption
>> Piezo Flexure Stage Models Overview
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