Date: 03/2006
PI News:
XY Piezo Stage for Nanometrology / Interferometry /Microscopy: Long Travel Range: 1000 µm
1000 µm Travel XY-Version Added to PIHera® Family of Piezo Nanopositioning Stages
- XY-Travel to 1000 µm
- Compact Design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
Compact, High Precision & Record Travel Ranges
P-620.2CD – P-628.2CD PIHera® systems are XY piezo-nanopositioning stages featuring travel ranges from 60 to 1000 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution.
The long travel range is achieved by a combination of a novel, friction-free and extremely stiff flexure system and the award-winning, ceramic-encapsulated PICMA® multilayer piezo actuators.
Superior Accuracy Through Direct-Motion Metrology with Capacitive Sensors
The capacitive-sensor-equipped versions provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors
P-628 stages are ideal positioning systems for applications such as nanometrology, (white light) interferometry, microscopy, spectroscopy, and precision alignment of optics.
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