| The editors of semiconductor technology magazine MICRO have selected the P-587, 6D-Nanopositioning System one of the "Greatest Hits of 2005".
The P-587 is a unique six-axis
piezo stage
nanopositioning and scanning system, designed for use in nanomanufacturing, nanometrology, scanning microscopy, optics, mask alignment, and other high-end applications.
The system offers six degrees of freedom, six-axis digital control, active trajectory-error compensation, millisecond responsiveness, nanometer resolution, and travel ranges to 800 µm. It also features an integrated autocalibration function for fast setup and interchangeability of controllers and nanomechanisms.
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