|
- Special Control Algorithms for NEXLINE® Nanopositioning Linear Drives
- 32-Bit Digital Filters
- 24-Bit DAC Resolution
- Fully Programmable Low-Pass and Notch Filters
- Non-Volatile User Settings and Last-Position Data
- PI General Command Set Compatible
E-755 digital nanopositioning controllers are designed to drive the novel, patented, NEXLINE® nanopositioning linear drives. Coordinated action of shearing and clamping piezo elements is what allows NEXLINE® to break through the barriers of conventional nanopositioning actuators.
Zero-Voltage Control Mode Promotes Extreme Actuator Lifetime
NEXLINE® nanopositioning actuators can often be found in inaccessible locations deep inside complex equipment, where nanometer-precise alignment and vibration cancellation are required. This makes the long lifetime of NEXLINE® drives especially advantageous. The E-755 firmware incorporates a special procedure to bring the NEXLINE® actuator to a full-holding-force zero-drive-voltage condition, no matter where it is along its travel range. This eliminates long-term offset voltages, which can limit the lifetime of conventional piezo drives.
Linearization
E-755-controlled nanopositioning systems provide outstanding linearity, achieved by digital polynomial linearization. The linearization can improve linearity to 0.001% over the full travel range.
Typical Applications
Semiconductor manufacturing; Quality control in the semiconductor industry; Astronomical telescopes; Truss structures; Active vibration control; Alignment in high mag-netic fields, as in particle physics, atomic fusion and superconductivity research
>> More Information
>> PDF
| |
E-755 digital NEXLINE® controller with N-214 nanopositioner, 20 mm travel range.
|
