Capacitive Nanometrology Position Sensors Overview




Two Electrode Sensors

PISeca™ Single-Probe Sensors

PISeca™ Electronics
Capacitive Metrology Sensors Introduction
PI capacitive (capacitance) sensors are the metrology system of choice for the most demanding nanopositioning applications. They are absolute-measuring, high-dynamics devices. PI capacitive sensors / control electronics use a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (subnanometer stability over several hours, see Fig. 6, on Link).

They enable direct measurement of the moving platform and are especially well-suited for multi-axis measurements in parallel metrology configurations. Parallel metrology means that the controller monitors all controlled degrees of freedom relative to "ground", a prerequisite for active trajectory control.

Capacitive sensors also offer the highest linearity (accuracy).

Product Information
 Capacitive Sensor Selection Guide
 D-510 Single-Probe Capacitive Position Gauge
     for Nanometrology Applications

 E-852 Signal Conditioner Electronics for D-510
 D-015, D-050, D-100 Two Electrode Sensors
 3-Channel Electronics for D-510 PISeca
     Sensors


Background Information
 Capacitive Nano-Metrology, Properties,
      Single & 2-Plate Sensors
 Features & Advantages, Applications
 Design & Characteristics of PI Two Electrode
     Sensors

 Technical Papers
 Markets / Applications for PI Products
Piezo University: Designing with Piezoelectrics
 Groundbreaking Technologies from PI

Catalog Downloads (PDF)
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