Selection Guide: Capacitive Nanometrology Position Sensors
Capacitive Sensors Product Overview

PI provides dual-plate and single-plate capacitive sensors for ultra-high precision position sensing applications. The sensors and special control electronics with PI’s proprietary ILS circuitry were developed to provide the highest linearity and resolution and have also been employed in PI’s reference class nanopositioning stages for many years.

Single and Dual Probe Nanometrology Position Sensors
  Models* Description Nominal
Measurement
Range [µm]
Extended
Measurement
Range [µm]
Materials*
D-510.02 D-510.02 PISeca™ single-electrode capacitive sensor probes to sub-nanometer resolution with excellent linearity, easy set-up, extended measurement ranges on request. 20 to 100 Steel
D-510.050 D-510.050 PISeca™ single-electrode capacitive sensor probes to sub-nanometer resolution with excellent linearity, easy set-up, extended measurement ranges on request. 50 to 250 Steel
D-510.100 D-510.100 PISeca™ single-electrode capacitive sensor probes to sub-nanometer resolution with excellent linearity, easy set-up, extended measurement ranges on request. 100 to 500 Steel
D-015 D-015 Capacitive two-plate position sensors with sub-nanometer resolution, other materials on request 10 45 Aluminum
D-050 D-050 Capacitive two-plate position sensors with sub-nanometer resolution, other materials on request 15 150 Aluminum
D-100 D-100 Capacitive two-plate position sensors with sub-nanometer resolution, other materials on request 150 300 Aluminum
Signal Conditioner Electronics / Controllers
  Models* Description Linearity Resolution Max.
Bandwidth
[kHz]
Channels
E-852 E-852 Compact signal conditioner for PISeca™ single plate sensors <0.1 % <0.002 6.6 1
E-509.E03 E-509.E03 Signal Conditioner module for PISeca™ single-electrode sensors, optional upgrade with display or PC interface/display module <0.1 % <0.002 10 3
E-509.E3 E-509.E3 Servo controller module for PISeca™ songle-electrode sensors, optional upgrade with display or PC interface/display module <0.1 % <0.002 10 3
E-509.CxA E-509.CxA Servo controller module for piezo nanopositioning systems featuring two-plate sensors, upgradeable with piezo amplifier module, display or PC interface/display module <0.5 % <0.005 3 1 to 3