Parallel Kinematics: Hexapods & Tripods
Hexapod Overview | Hexapod & Tripod Selection Guide | Controllers for Hexapods and Tripods
Multi-Axis Stages | Back to Introduction | Examples of Custom Designs

PI parallel kinematics (PKM) precision positioning systems have many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size and higher stiffness.
With two decades of Hexapod design and manufacturing experience,
PI electro-mechanical Piezo Hexapods are the most advanced multi- axis precision positioning systems in the world, providing significantly higher precision than hydraulically driven systems. They are available in many sizes, and configurations for loads from 2 kg to more than 1000 kg, and most are self locking.

Linear Actuators Translation Stages 2 to 6-Axis Stages Rotary Stages 6-Axis Hexpods Mini Linear Stages

*Models Description Travel Range [mm] Load
Capacity [kg]
H-810 H-810 Compact Hexapod. Long travel range, highly precise to 40 mm / 60° 5
M-824 H-824 Vacuum compatible compact Hexapod. to 45 mm /
25°
10
M-840 H-840 HexaLight™ Hexapod, fast, medium
load capacity, optional photometer.
to 100 mm /
60°
10
M-850 H-850 High-load hexapod, optional photometer. to 100 mm /
60°
200
F-206 H-206.S HexAlign™ 6-Axis micro alignment system.
Very accurate, optional photometer.
to 12 mm /
2
N-515KNPH N-515K NEXLINE® Custom, nonmagnetic Piezo-Hexapod high-load 6-axis nanopositioning system to 10 mm /
>50
M-850 Highload Hexapod M-850k
Ultra
High Load
Hexapod ultra high-load 6-axis positioner for astronomy applications and other alignment tasks to 24 mm /
60°
1000
M-850 Ultra Highload Hexapod M-850k
Ultra
High Load
Hexapod ultra high-load, 6-axes, long travel, micron precision, 1 ton in any orientation ±200 mm (X, Y),
±100 mm (Z),
±20° (θX, θY),
±5° (θZ)
1000
M-850kwah M-850KWAH Custom secondary mirror 6-axis Hexapod alignment system for astronomy, water resistant to 16 mm 100
M-850ktvh M-850KTVH 6-Axis positioner Parallel-Kinematics system for wide temperature ranges Ø 350 mm, 330 mm height 200
M-850KLAH M-850KLAH Custom, for inspection systems to ±25 mm 200
Tripods
M-880.PD M-880.PD Tripod 3-axis high-load XYθ stage for LCD and semiconductor inspection 20 x 20 mm/ 8° 150
M-833 M-833 Tripod 3 axis stage, X,Z and gonimeter (θy) +/- 25 mm (X,Z) +/-30° (θy) 4
N-510 N-510K Tripod Z-Tip_Tilt nanopositioning platform 1.3 / 10 mrad 20
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Linear Actuators Translation Stages 2 to 6-Axis Stages Rotary Stages 6-Axis Hexpods Mini Linear Stages