Selection Guide: PiezoWalk® Actuators
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PiezoWalk® Linear Motor Solutions: Actuators to 6-Axis Stages
PiezoWalk® non-resonant piezo stepping motors can provide much higher resolution (to Picometers) and forces (to 600 N) than other types of piezo motors. They generate motion through succession of coordinated clamp/unclamp of several actuators. PI offers two basic types: the high-force NEXLINE® drives (higher forces, lower speed) and the ultra-compact NEXACT® motors (higher speed, lower force). All linear drives and motors are intended for integration into a customer’s system and feature no guidance. If off axis motion cannot be tolerated external guidance is required.

Piezo Actuators Ultrasonic Motors PiezoWalk® Motors Motorized Actuators 6-Axis Hexpods Flexure Actuators
Piezo Stick Slip Inertia Motors & Stages (More Economical)
Models* Description Force /
Load
Travel [mm] Drive
LPS-22 Miniature Stage LPS-22 Economical sub-miniature linear & rotary stage series with piezo inertia motor. Up to 10 mm/s, open and closed loop, XY-combinations. 3 N 6.5, 13, 26 PIShift Piezo Inertia Motor
RPS-14 Mini Rotation Stage RPS-14 Economical sub-miniature rotation stage. 14 mm diameter. 45°/sec. 22 mm and 32 mm versions also available - 360° PIShift Piezo Inertia Motor
LPS-45 Piezo Stage LPS-45 Compact precision linear stage with piezo inertia motor. 13 and 26 mm travel. Open and closed loop. Up to 10 mm/s. Nanometer resolution. Vacuum versions. XY-combinations. 10 N 13, 26 PIShift Piezo Inertia Motor
N-422 Linear actuator N-422 PIShift Piezo Linear Motor Actuator 10 35 PIShift Piezo Inertia Motor
n470 Linear Piezo Mikrometer actuator N-470 Piezo Mike Micrometer Actuator. High Vacuum Version 10 7.5, 13, 26 PIShift Piezo Inertia Motor
PiezoWalk® Motors (Higher Precision & Force)
Models* Description Load
Capacity [kg]
Travel [mm] Drive
N-111 N-111 NEXLINE® PiezoWalk® nanopositioning motor, subnanometer resolution. 7 10 Piezo-Walk® Piezo Stepping Motor
N-216 N-216 NEXLINE® PiezoWalk® NEXLINE® Linear Actuator 80 20 Piezo-Walk® Piezo Stepping Motor
N-310 N-310 NEXACT® Ultra-compact nanopositioning motor, subnanometer resolution. 1 20 Piezo-Walk® Piezo Stepping Motor
N-380, N-381 N-380
N-381
High-resolution PiezoWalk® linear actuator with optional position sensor 1.5 30 Piezo-Walk® Piezo Stepping Motor
PiezoWalk® Stages & Platforms (Ultra-High Precision)
Models* Description Load
Capacity [kg]
Travel [mm] Drive
N-664 N-664 Ultra-high Precision Translation Stage with NEXACT® Linear Motor.
0.5 nanometer linear encoder resolution
2 30 Piezo-Walk® Piezo Stepping Motor
N-510 N-510 Tripod Z-Tip/Tilt nanopositioning platform with NEXLINE® piezo motor actuators 20 1.3, 10 mrad Piezo-Walk® Piezo Stepping Motor
N-515KNPH N-515KNPH Nonmagnetic 6-axis piezo Hexapod precision positioning system with NEXLINE® piezo motors actuators 50 to 10 mm 6° Piezo-Walk® Piezo Stepping Motor
N-510KHFS N-510KHFS Tripod Z-Tip/Tilt nanopositioning platform with additional fine positioning 25 0.4 plus 40 µm Piezo-Walk® Piezo Stepping Motor
Digital Controllers for PiezoWalk®
Models* Description Channels Voltage [V] Power [W] Digital
Interface
E-861 E-861 Networkable Controller for NEXACT® Linear Motors and Positioners 1 -10 to +45 40 USB, RS-232
E-755 E-755 Piezocontroller for NEXLINE® Nano-Drive 1 +/-250 15 RS-232
E-712 E-712 Digital Piezo Controller Modular System for up to 6 Axes with Highest Precision 3 to 6 -30 to
+135 V
100 USB, Ethernet, RS232


* Ask about custom designs!
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Piezo Actuators Ultrasonic Motors PiezoWalk® Motors Motorized Actuators 6-Axis Hexpods Flexure Actuators