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*Models |
Description |
Precision |
Max Speed
[mm/s] |
Load Capacity
[kg] |
Travel
[mm] |
|
 |
M-110.1,
M-111.1,
M-112.1 |
Miniature translation stage, choice of DC, stepper, ballscrew, leadscrew |
++ooo |
to 2 |
3 |
5, 15, 25 |
|
 |
M-122.2DD |
Fast mini translation stage w/ linear encoder, DC direct drive, ballscrew |
+++oo |
20 |
5 |
25 |
|
 |
M-116 |
Miniature rotation stage, compatible with
M-110, M-111, M-112 linear stages. Compact, clear aperture, high resolution |
|
20°/s |
1.5 |
> 360° |
|
 |
M-011
M-014 |
Magnetic bearings. Low-profile, excellent guidance, 10 nm resolution with piezo option |
++++o |
- |
1 to 5 |
15, 25 |
|
 |
M-105,
M-106 |
Manual stages with motor and piezo options, crossed roller bearings |
- |
- |
2 |
6, 18 |
|
 |
M-041 -
M-044 |
Tip & tip/tilt stages, high resolution, piezo option. |
- |
4.5 |
4 |
±9° x ±9° |
|
 |
M-126 |
Compact linear stage with crossed roller bearings |
- |
50 |
20 |
25 |
|
 |
N-661 |
Miniature Linear Stage with NEXACT® Drive, subnanometer resolution |
++++o |
10 |
|
20 |
|
 |
M-661,
M-662 |
Piezo motor-driven stage, speed to 400 mm/s, 0.1 µm resolution. |
+oooo |
400 |
0.5 |
19 |
|
 |
M-663 |
Smallest stage with linear motor drive and linear encoder, speed to 400 mm/s, 0.1 µm resolution. XY-combinations possible. |
+++oo |
400 |
0.5 |
19 |
|
 |
M-663KLVS |
Smallest vacuum compatible stage with linear motor drive and linear encoder, speed to 400 mm/s, 0.1 µm resolution. XY-combinations possible. |
+++oo |
400 |
0.5 |
19 |
|
 |
M-664 |
Low-profile, high-speed translation stages, 0.1 µm linear encoders. |
+++oo |
400 |
0.5 |
25 |
|
 |
M-683 |
Low-profile, high-speed translation stages, 0.1 µm linear encoders. |
+++oo |
350 |
5 |
50 |
|
 |
V-106 |
Voice-coil scanner, fast, to 25 Hz scanning frequency. |
+++oo |
to 270 |
0.1 |
6, 20 |
|
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