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| Selection Guide: Multi-Axis Micropositioning Stages |
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*Models |
Description |
Min. Inc Motion |
Load Capacity
[kg] |
Travel
[mm] |
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M-686 |
Low profile, large aperture, high speed PILine® microscopy stage, integratable with P-541 piezo scanners. Extremely stable system, read paper on stability |
0.1 µm |
5 |
25 x 25 |
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M-545 |
M-545 PI nano XY microscope stage. Manual & motorized versions. P-545 nanopositioning system upgrade available.
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0.1 µm |
5 |
25 x 25 |
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M-900.KOPS |
Planar XY scanner, linear encoder, high load |
0.1 µm |
66 |
50 x 50 |
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M-880.PD |
Tripod 3-axis high-load XYθz stage for LCD and semiconductor inspection |
0.1 µm |
20 dynamic /
150 static |
20 x 20 / 8° |
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M-833 |
Tripod: 3-axis stage: X, Z, and goniometer (θy) |
0.1 µm |
4 |
50 mm (X, Z)
60°(θy) |
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M-663 |
Smallest stage with linear motor drive and linear encoder, speed to 400 mm/s, 0.1 µm resolution. XY-combinations possible. |
0.1 µm |
0.5 |
19 x 19 |
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M-116,
M-111 |
M-116 and M-111 micropositioning combination |
0.1 µm |
1.5 |
25 x 25 x 360 ° |
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F-130,
F-131 |
Compact coarse / fine XYZ hybrid fiber alignment system with motor drives and piezo actuators |
1 nm / 50 nm |
1 |
to 15 x 15 x 15 |
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M-105 |
XYZ translation stage |
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2 |
18 x 18 x 18 |
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M-041 -
M-044 |
Tip & tip/tilt stages, high resolution, piezo option. |
to 0.5 µrad |
4, 5 |
±9° x ±9° |
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M-605.2DD |
XYZ ultra compact combination stage with direct measurement |
0.1 µm |
30 |
up to 50 x 50 x 50 |
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M-521.DD,
M-511.DD,
M-501.PD |
XYZ combination stage |
0.1 µm |
10 |
up to 300 x 300 x 12.5 |
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M-451,
P-562 |
XYZ nanopositioning & scanning system, P-562, mounted on an M-451.1PD elevation stage |
0.1 µm |
12 |
up to 0.3 x 0.3 x 12.5 |
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N-510 |
Tripod Z Tip/Tilt nanopositioning platform |
5 nm |
20 |
1.3 / 10 mrad |
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For 6-axis Hexapod positioning systems, click here |
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Selection Guide: Z-Axis Micropositioning Stages |
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*Models |
Description |
Min. Inc Motion |
Load Capacity
[kg] |
Travel
[mm] |
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M-451 |
Vertical stage, wedge drive, high stiffness, choice of servo and stepper motors |
0.1 µm |
12 |
12.5 |
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M-501 |
Vertical stage, ballscrew drive, high resolution, fast, choice of closed-loop motors |
<0.1 µm |
10 |
12.5 |
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M-714 |
Hybrid stage for Z applicaitons. DC-servo + piezo drive. Extremely Accurate. 2 nm linear encoder, self-locking |
2nm |
10 |
7 |
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| More PI Micropositioning Products |
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Download the Micropositioning and Hexapod PDF Catalog