Selection Guide: Multi-Axis Micropositioning Stages
*Models Description Min. Inc Motion Load Capacity Travel
M-686 Low profile, large aperture, high speed PILine® microscopy stage, integratable with P-541 paper on stability
0.1 µm
5
25 x 25
M-545 M-545 PI nano™ XY microscope stage. Manual & motorized versions. P-545 nanopositioning
0.1 µm
5
25 x 25
M-900.KOPS Planar XY scanner, linear encoder, high load
0.1 µm
66
50 x 50
M-880.PD Tripod 3-axis high-load XYθz stage for LCD and semiconductor inspection
0.1 µm
20 dynamic /
20 x 20 / 8°
M-833 Tripod: 3-axis stage: X, Z, and goniometer (θy)
0.1 µm
4
50 mm (X, Z)
M-663 Smallest stage with linear motor drive and linear encoder, speed to 400 mm/s, 0.1 µm resolution. XY-combinations possible.
0.1 µm
0.5
19 x 19
M-116, M-111 M-116 and M-111
0.1 µm
1.5
25 x 25 x 360 °
F-130, F-131 Compact coarse / fine XYZ hybrid fiber alignment system with motor drives and piezo actuators
1 nm / 50 nm
1
to 15 x 15 x 15
M-105 XYZ translation stage
-
2
18 x 18 x 18
M-041 - Tip & tip/tilt stages, high resolution, piezo option.
to 0.5 µrad
4, 5
±9° x ±9°
M-605.2DD XYZ ultra compact combination stage with direct measurement
0.1 µm
30
up to 50 x 50 x 50
M-521.DD, M-511.DD, M-501.PD XYZ combination stage
0.1 µm
10
up to 300 x 300 x 12.5
M-451 P-562 XYZ nanopositioning & scanning system, P-562
0.1 µm
12
up to 0.3 x 0.3 x 12.5
N-510 Tripod Z Tip/Tilt nanopositioning platform
5 nm
20
1.3 / 10 mrad
For 6-axis Hexapod positioning systems, click here
Selection Guide: Z-Axis Micropositioning Stages
*Models Description Min. Inc Motion Load Capacity Travel
M-451 Vertical stage, wedge drive, high stiffness, choice of servo and stepper motors
0.1 µm
12
12.5
M-501 Vertical stage, ballscrew drive, high resolution, fast, choice of closed-loop motors
<0.1 µm
10
12.5
M-714 Hybrid stage for Z applicaitons. DC-servo + piezo drive. Extremely Accurate. 2 nm linear encoder, self-locking
2nm
10
7
More PI Micropositioning Products
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