Micropositioning: Multi-Axis & Z Stages
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All models provide sub-micron resolution. Some Z stages can be combined with translation stages to form multiaxis positioning systems. Piezo options are available for some models to provide for nanometer level precision.

Linear Actuators Translation Stages 2 to 6-Axis Stages Rotary Stages 6-Axis Hexpods Mini Linear Stages

Selection Guide: Multi-Axis Micropositioning Stages
*Models Description Min. Inc Motion Load Capacity
[kg]
Travel
[mm]
M-687 XY Stage M-687 XY piezo motor stage for inverted microscopes. Low profile, large aperture, high dynamic range, extremely smooth. Integrates with PInano Piezo-Z scanners. Extremely stable system, read ASPE poster on stability 0.1 µm 5 135 x 85
M-686 M-686 Low profile, large aperture, high speed PILine® microscopy stage, integratable with P-541 piezo scanners. Extremely stable system, read paper on stability 0.1 µm 5 25 x 25
M-545 M-545 XY microscope stage. Manual & motorized versions. PInano piezo XY/XYZ nanopositioning system upgrade available. 0.1 µm 5 25 x 25
M-900kops M-900.KOPS Planar XY scanner, linear encoder, high load 0.1 µm 66 50 x 50
M-880.PD M-880.PD Tripod 3-axis high-load XYθz stage for LCD and semiconductor inspection 0.1 µm 20 dynamic /
150 static
20 x 20 / 8°
M-833 M-833 Tripod: 3-axis stage: X, Z, and goniometer (θy) 0.1 µm 4 50 mm (X, Z)
60°(θy)
M-663 stack M-663 Smallest stage with linear motor drive and linear encoder, speed to 400 mm/s, 0.1 µm resolution. XY-combinations possible. 0.1 µm 0.5 19 x 19
M-116 and M-111 Combination M-116,
M-111
M-116 and M-111 micropositioning combination 0.1 µm 1.5 25 x 25 x 360 °
F-130, F-131 F-130,
F-131
Compact coarse / fine XYZ hybrid fiber alignment system with motor drives and piezo actuators 1 nm / 50 nm 1 to 15 x 15 x 15
M-105, M-009, F-010 M-105 XYZ translation stage - 2 18 x 18 x 18
M-041 - M-044 M-041 -
M-044
Tip & tip/tilt stages, high resolution, piezo option. to 0.5 µrad 4, 5 ±9° x ±9°
M-605.2DD M-605.2DD XYZ ultra compact combination stage with direct measurement 0.1 µm 30 up to 50 x 50 x 50
M-521.DD, M-511.DD, M-501.1PD M-521.DD,
M-511.DD,

M-501.PD
XYZ combination stage 0.1 µm 10 up to 300 x 300 x 12.5
P-562 and M-451 M-451,
P-562
XYZ nanopositioning & scanning system, P-562, mounted on an M-451.1PD elevation stage 0.1 µm 12 up to 0.3 x 0.3 x 12.5
N-510 N-510 Tripod Z Tip/Tilt nanopositioning platform 5 nm 20 1.3 / 10 mrad
N-515KK For 6-axis Hexapod positioning systems, click here

PI miCos Multi-Axis Positioners, Robotics

Additional Multiaxis Precision Positioners / Robotic Systems are available on the PI miCos Website

Selection Guide: Z-Axis Micropositioning Stages
*Models Description Min. Inc Motion Load Capacity
[kg]
Travel
[mm]
M-451 M-451 Vertical stage, wedge drive, high stiffness, choice of servo and stepper motors 0.1 µm 12 12.5
M-501 M-501 Vertical stage, ballscrew drive, high resolution, fast, choice of closed-loop motors <0.1 µm 10 12.5
M-714 M-714 Hybrid stage for Z applicaitons. DC-servo + piezo drive. Extremely Accurate. 2 nm linear encoder, self-locking 2nm 10 7

PI miCos Elevation Stages

Additional Motorized Elevation Stages are available on the PI miCos Website

Download the Micropositioning and Hexapod PDF Catalog
Download the Complete PI PDF Catalog
More PI Micropositioning Products

Linear Actuators Translation Stages 2 to 6-Axis Stages Rotary Stages 6-Axis Hexpods Mini Linear Stages