PI: Products | Selection Guide | Motorized Micropositioning Stages & Actuators, Micro Actuator, Translation Stage, Rotation Stage, Linear Transducer

Micropositioning: Rotary Stages & Tilt Stages with Stepper, Servo and Piezo Drives
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All models provide resolutions better than 1/1000 degree. Closed-loop DC-servo motors and stepper motors, directdrives and gear-box		versions are available. Some models offer additional piezo drives for submicroradian precision.


Linear Actuators		Translation Stages		2 to 6-Axis Stages		Rotary Stages		6-Axis Hexpods		Mini Linear Stages




*Models	Description	Travel [deg]	Load Capacity [kg]

M-116	Miniature rotation stage, compatible with M-110, M-111, M-112 linear stages. Compact, clear aperture, high resolution.	> 360 °	1.5

M-060 - M-062	Continuous travel range, compact, clear aperture, high resolution, 60 to 120 mm diameter.	> 360	50 - 65

M-660	Fast Positioning, Ultra-Low Profile	Unlimited	1


Tip/Tilt Stages



	*Models	Description	Min. Inc. Motion	Travel [deg]	Load Capacity [kg]

	M-041 - M-044	Tip & tip/tilt stages, high resolution, piezo option.	to 0.5 µrad	±9	4, 5

	M-833	Tripod: 3-axis stage: X, Z, and goniometer (θy)	0.1 µm	4	50 mm (X, Z) 60°(θy)

	M-880.PD	Tripod 3-axis high-load XYθ_z stage for LCD and semiconductor inspection	0.1 µm	20 dynamic / 150 static	20 x 20 / 8°



	N-510	Tripod Z-Tip/Tilt nanopositioning platform with NEXLINE® piezo motor actuators	-	1.3, 10 mrad	20

	N-510KHFS	Tripod Z-Tip/Tilt nanopositioning platform with additional fine positioning	-	0.4 plus 40 µm	25


		For 6-axis Hexapod Positioning Systems, click here

		For Z & Tip/Tilt Nanopositioning Stages, click here

		For Tip/Tilt Mirror Platforms, click here