 Hexapods (6D Parallel Kinematics) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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F-206.S |
HexAlign™ 6-Axis micro alignment system.
very accurate, optional photometer. |
2 |
to 12 mm /
6° |
DC-Servo |
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M-824 |
Vacuum compatible compact Hexapod. |
10 |
to 45 mm /
25° |
DC-Servo |
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M-810 |
Compact Hexapod. Long travel range, highly precise |
5 |
to 40 mm / 60°
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Integrated Drive System |
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M-840 |
HexaLight™ Hexapod, fast, medium
load capacity, optional photometer. |
10 |
to 100 mm /
60° |
DC-Servo |
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M-850 |
High-load hexapod, optional photometer. |
200 |
to 100 mm /
60° |
DC-Servo |
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N-515K |
NEXLINE® Custom, nonmagnetic Piezo-Hexapod high-load 6-axis nanopositioning system |
>50 |
to 10 mm /
6° |
PiezoWalk®, Linear Scale |
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M-850
Ultra
High Load |
Hexapod ultra high-load 6-axis positioner for astronomy applications and other alignment tasks |
1000 |
to 24 mm /
60° |
DC-Servo |
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P-587 |
6-Axis piezo-nanopositioning system,
parallel metrology, extremely accurate. |
5 |
to 800 µm /
10 mrad |
Piezo /
capacitive
sensor |
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| Hexapods Brochure (PDF) More on Hexapods |
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| Micro-Stage Series, Motorized (Linear and Rotation) |
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| Translation Stages (DC-Servo, Stepper Motor, Manual) |
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| Linear Actuators and Micrometers |
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| Vertical Stage (Z-Stage) Overview |
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| Rotational Stages (Rotary Stages) |
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| Tip/Tilt Stages |
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| Piezo Linear Motor Stages |
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| Piezo Linear Motor Drives |
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| Fast Scanning Stages with Voice Coil Drive |
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