 Hexapods (6D Parallel Kinematics) |
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| Micro-Stage Series, Motorized (Linear and Rotation) |
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| Translation Stages (DC-Servo, Stepper Motor, Manual) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-311 |
Manual translation stages.
PiezoMike option, ultra-compact, stainless steel. |
4 |
6 |
Manual /
PiezoMike
upgrades avail. |
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M-105,
M-106 |
Manual translation stages with motor
and piezo options, crossed roller bearings. |
10 |
6, 18 |
Manual / Piezo
and motor
upgrades avail. |
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M-011 |
Side-drive, magnetic-kinematic bearings
Low profile, excellent guidance,
10 nm resolution with piezo option. |
1 |
15 |
Manual / DC-
servo / Piezo,
upgrades avail. |
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M-110.1,
M-111.1,
M-112.1 |
Miniature translation stage with leadscrew drive,
for laboratory and research use. |
3 |
5, 15, 25 |
DC-servo /stepper motor |
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M-110.2,
M-111.2,
M-112.2 |
Miniature translation stage with ballscrew drive,
for industrial use. |
3 |
5, 15, 25 |
DC-servo /stepper motor |
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M-122 |
Fast miniature translation stage w/ linear encoder, direct drive, ballscrew. |
5 |
25 |
DC-Servo Direct
/ Linear Encoder
|
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M-014 |
Side-drive, magnetic-kinematic bearings
Low profile, excellent guidance,
10 nm resolution with piezo option. |
5 |
25 |
Manual / DC-
servo / Piezo,
upgrades avail. |
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M-126 |
Compact, crossed roller bearings, very high
resolution, optional ActiveDrive™ motor. |
20 |
25 |
DC-servo / stepper motor /
manual |
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M-405,
M-410,
M-415 |
Translation stages, crossed roller bearings,
very high resolution, optional ActiveDrive™ motor. |
50 |
50, 100, 150 |
DC-servo / stepper motor |
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M-403 |
Low-cost translation stages. Leadscrew drive. |
20 |
25 - 200 |
DC-servo / stepper motor |
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M-404 |
Low-cost translation stages. Ballscrew Drive. |
20 |
25 - 200 |
DC-servo / stepper motor |
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M-413 |
Low-cost translation stages. Leadscrew drive. |
50 |
100 - 300 |
DC-servo / stepper motor |
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M-414 |
Low-cost translation stages. Ballscrew Drive. |
50 |
100 - 300 |
DC-servo / stepper motor |
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M-605 |
Translation stages with integrated linear encoder,
very high accuracy, compact, protective bellows. |
20 |
25, 50 |
DC-servo |
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M-5x1 |
Translation stages with ballscrew drive, compact,
high load capacity and lifetime,
optionally with linear encoder and ActiveDrive™. |
100 |
102, 204, 306 |
DC-servo / stepper motor,
very high accuracy |
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M-511.HD |
Hybrid translation stages with DC motors and piezo drives. Extremely accurate. 4 nm Linear Encoder. |
100 |
102 |
DC-servo + piezo drives |
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| Linear Actuators and Micrometers |
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| Vertical Stage (Z-Stage) Overview |
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| Rotational Stages (Rotary Stages) |
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| Tip/Tilt Stages |
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| Piezo Linear Motor Stages |
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| Piezo Linear Motor Drives |
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| Fast Scanning Stages with Voice Coil Drive |
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