 Hexapods (6D Parallel Kinematics) |
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| Micro-Stage Series, Motorized (Linear and Rotation) |
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| Translation Stages (DC-Servo, Stepper Motor, Manual) |
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| Linear Actuators and Micrometers |
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| Vertical Stage (Z-Stage) Overview |
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| Rotational Stages (Rotary Stages) |
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| Tip/Tilt Stages |
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| Piezo Linear Motor Stages |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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P-653 |
Miniature Piezo Linear Motors for OEMs:
only 8 mm long |
0.005 |
2 |
PILine® ultrasonic motor |
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M-661,
M-662 |
Smallest stage with linear motor drive available, speed to 500 mm/s, 0.1 µm resolution. |
0,5 |
20 |
PILine® ultrasonic motor |
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M-674 |
RodDrive Piezo Linear Motor Pusher
for OEMs |
0.7 |
100
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PILine® ultrasonic motor |
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M-663 |
Smallest stage with linear motor drive and
linear encoder, speed to 500 mm/s,
0.1 µm resolution. XY-combinations possible. |
0.5 |
20 |
PILine® ultrasonic motor |
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N-661 |
Miniature Linear Stage with NEXACT® Drive |
20 |
20 |
Piezo-Walk® Piezo Stepping Motor |
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M-664 |
M-664 micropositioning systems are low-profile, high-accuracy translation stages with piezo linear encoders. |
0.5 |
25 |
PILine® ultrasonic motor |
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M-682 |
M-682 translation stages are low-profile, high-accuracy positioning systems based on the M-674 RodDrive ultrasonic linear motor actuator.
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5 |
50 |
PILine® ultrasonic motor |
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M-686 |
Linear motor-driven XY stage with linear
encoder, 0.1 µm resolution |
5 |
25 |
PILine® ultrasonic motor |
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| Piezo Linear Motor Drives |
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| Fast Scanning Stages with Voice Coil Drive |
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