 Hexapods (6D Parallel Kinematics) |
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| Micro-Stage Series, Motorized (Linear and Rotation) |
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| Translation Stages (DC-Servo, Stepper Motor, Manual) |
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| Linear Actuators and Micrometers |
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| Vertical Stage (Z-Stage) Overview |
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| Rotational Stages (Rotary Stages) |
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| Tip/Tilt Stages |
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| Piezo Linear Motor Stages |
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| Piezo Linear Motor Drives |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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P-653 |
Miniature Piezo Linear Motors for OEMs:
only 8 mm long
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0.005 |
2 |
PILine® ultrasonic motor |
 |
P-661 |
OEM Ultrasonic piezo linear motor,
small, light, very fast. |
- |
- |
Piezo linear
motor |
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M-674 |
RodDrive Piezo Linear Motor Pusher
for OEMs |
0.7 |
100
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PILine® ultrasonic motor |
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N-111 |
NEXLINE® nano drive,
subnanometer resolution. |
8 |
5 |
Piezo-Walk® |
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N-214,
N-215 |
NEXLINE® high-load nano drive,
subnanometer resolution. |
60 |
20 |
Piezo-Walk® |
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N-310 |
NEXACT® Ultra-compact piezo stepping drive, subnanometer resolution. |
1 |
20 |
Piezo-Walk® |
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N-380
N-381 |
High-resolution PiezoWalk® linear actuator with optional position sensor |
1.5 |
30 |
Piezo-Walk® Piezo Stepping Motor |
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| Fast Scanning Stages with Voice Coil Drive |
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