 Hexapods (6D Parallel Kinematics) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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F-206.S |
HexAlign™ 6-Axis micro alignment system.
very accurate, optional photometer. |
2 |
to 12 mm /
6° |
DC-Servo |
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M-824 |
Vacuum compatible compact Hexapod. |
10 |
to 45 mm /
25° |
DC-Servo |
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M-810 |
Compact Hexapod. Long travel range, highly precise |
5 |
to 40 mm / 60°
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Integrated Drive System |
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M-840 |
HexaLight™ Hexapod, fast, medium
load capacity, optional photometer. |
10 |
to 100 mm /
60° |
DC-Servo |
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M-850 |
High-load hexapod, optional photometer. |
200 |
to 100 mm /
60° |
DC-Servo |
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N-515K |
NEXLINE® Custom, nonmagnetic Piezo-Hexapod high-load 6-axis nanopositioning system |
>50 |
to 10 mm /
6° |
PiezoWalk®, Linear Scale |
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M-850
Ultra
High Load |
Hexapod ultra high-load 6-axis positioner for astronomy applications and other alignment tasks |
1000 |
to 24 mm /
60° |
DC-Servo |
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P-587 |
6-Axis piezo-nanopositioning system,
parallel metrology, extremely accurate. |
5 |
to 800 µm /
10 mrad |
Piezo /
capacitive
sensor |
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| Hexapods Brochure (PDF) More on Hexapods |
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| Micro-Stage Series, Motorized (Linear and Rotation) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-122 |
Fast miniature translation stage w/ linear encoder, direct drive, ballscrew. |
5 |
25 |
DC-Servo Direct
/ Linear Encoder
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M-110.1,
M-111.1,
M-112.1 |
Miniature translation stage with leadscrew
drive, for laboratory and research use. |
3 |
5, 15, 25 |
DC-Servo /
stepper motor |
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M-110.2,
M-111.2,
M-112.2 |
Miniature translation stage with
ballscrew drive, for industrial use. |
3 |
5, 15, 25 |
DC-Servo /
stepper motor |
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M-116 |
Miniature rotation stage, compatible with
M-110, M-111, M-112 linear stages. Compact,
clear aperture, high resolution. |
1.5 |
> 360 ° |
DC-Servo /
stepper motor |
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| Translation Stages (DC-Servo, Stepper Motor, Manual) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-311 |
Manual translation stages.
PiezoMike option, ultra-compact, stainless steel. |
4 |
6 |
Manual /
PiezoMike
upgrades avail. |
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M-105,
M-106 |
Manual translation stages with motor
and piezo options, crossed roller bearings. |
10 |
6, 18 |
Manual / Piezo
and motor
upgrades avail. |
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M-011 |
Side-drive, magnetic-kinematic bearings
Low profile, excellent guidance,
10 nm resolution with piezo option. |
1 |
15 |
Manual / DC-
servo / Piezo,
upgrades avail. |
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M-110.1,
M-111.1,
M-112.1 |
Miniature translation stage with leadscrew drive,
for laboratory and research use. |
3 |
5, 15, 25 |
DC-servo /stepper motor |
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M-110.2,
M-111.2,
M-112.2 |
Miniature translation stage with ballscrew drive,
for industrial use. |
3 |
5, 15, 25 |
DC-servo /stepper motor |
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M-122 |
Fast miniature translation stage w/ linear encoder, direct drive, ballscrew. |
5 |
25 |
DC-Servo Direct
/ Linear Encoder
|
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M-014 |
Side-drive, magnetic-kinematic bearings
Low profile, excellent guidance,
10 nm resolution with piezo option. |
5 |
25 |
Manual / DC-
servo / Piezo,
upgrades avail. |
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M-126 |
Compact, crossed roller bearings, very high
resolution, optional ActiveDrive™ motor. |
20 |
25 |
DC-servo / stepper motor /
manual |
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M-405,
M-410,
M-415 |
Translation stages, crossed roller bearings,
very high resolution, optional ActiveDrive™ motor. |
50 |
50, 100, 150 |
DC-servo / stepper motor |
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M-403 |
Low-cost translation stages. Leadscrew drive. |
20 |
25 - 200 |
DC-servo / stepper motor |
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M-404 |
Low-cost translation stages. Ballscrew Drive. |
20 |
25 - 200 |
DC-servo / stepper motor |
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M-413 |
Low-cost translation stages. Leadscrew drive. |
50 |
100 - 300 |
DC-servo / stepper motor |
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M-414 |
Low-cost translation stages. Ballscrew Drive. |
50 |
100 - 300 |
DC-servo / stepper motor |
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M-605 |
Translation stages with integrated linear encoder,
very high accuracy, compact, protective bellows. |
20 |
25, 50 |
DC-servo |
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M-5x1 |
Translation stages with ballscrew drive, compact,
high load capacity and lifetime,
optionally with linear encoder and ActiveDrive™. |
100 |
102, 204, 306 |
DC-servo / stepper motor,
very high accuracy |
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M-511.HD |
Hybrid translation stages with DC motors and piezo drives. Extremely accurate. 4 nm Linear Encoder. |
100 |
102 |
DC-servo + piezo drives |
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| Linear Actuators and Micrometers |
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Click Image for
Data Sheet |
*Models |
Description |
Load Capacity [kg] |
Travel Range [mm] |
Drive |
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N-380
N-381 |
High-resolution PiezoWalk® linear actuator with optional position sensor |
1.5 |
30 |
NEXACT® linear drive |
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M-227 |
DC-Mike, high resolution,
non-rotating tip. |
4 |
10, 25, 50 |
DC-servo,
piezo option |
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M-228 |
DC-Mike, cost effective, stepper-
mike, non-rotating tip. |
2 |
10 |
2-phase
stepper motor |
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M-229 |
DC-Mike, cost effective, stepper-
mike, non-rotating tip. |
5 |
25 |
2-phase
stepper motor |
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M-230 |
DC / Stepper Mike, limit switches, compact,
high resolution, non-rotating tip. |
7 |
10, 25 |
DC-servo,
stepper motor |
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M-235 |
DC / Stepper Mike, high load capacity and
lifetime, ballscrew drive, limit switches. |
12 |
20, 50 |
DC-servo,
stepper motor |
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M-238 |
Heavy duty DC-Mike actuators. Optional linear encoder. |
40 |
50 |
DC motor
with gearbox |
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M-231 |
DC / Stepper Mike, compact, high resolution,
limit switches. |
4 |
17 |
DC-servo,
stepper motor |
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M-232 |
Extra-compact DC / stepper motor-mike,
folded drive train,
high resolution, limit switches. |
4 |
17 |
DC-servo,
stepper motor |
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M-168 |
Stepper Mike, high resolution,
non-rotating tip, very good repeatability. |
5 |
10, 25, 50 |
Stepper motor,
piezo option |
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P-853,
P-854 |
PiezoMike, sub-nanometer resolution. |
1 |
6, 18 |
PiezoMike |
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M-631 -
M-633 |
Precision micrometer, non-rotating tip,
compact, very good repeatability. |
10 |
10, 25, 50 |
Manual |
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M-619 -
M-626 |
Manual micrometers. |
2 - 5 |
6, 10, 15, 18, 25 |
Manual |
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M-653,
M-655 |
Differential micrometer 0.1 µm resolution,
compact. |
2 |
6, 20 |
Manual |
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| Vertical Stage (Z-Stage) Overview |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-501 |
Vertical stage, ballscrew drive,
high resolution, fast. |
10 |
12.5 |
DC-servo |
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M-451 |
Vertical stage, wedge drive, high stiffness. |
12 |
12.5 |
DC-servo |
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M-714 |
Hybrid Z-stage. DC-servo + piezo drive. Extremely Accurate. 2 nm Linear Encoder. |
10 |
7 |
DC + piezo |
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| For Piezoelectric Ultra-Precision Z-Stages click here |
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| Rotational Stages (Rotary Stages) |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-116 |
Miniature rotation stage, compatible with
M-110, M-111, M-112 linear stage, compact,
clear aperture, high resolution. |
1.5 |
> 360 |
DC-servo /
stepper motor |
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M-035 |
Tangent-arm drive, manual, with motor
and piezo options, very high
resolution, 60 mm diameter. |
30 |
19 |
Manual /
piezo /
DC-servo |
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M-036 |
Tangent-arm drive, manual, with motor
and piezo options, very high
resolution, 100 mm diameter. |
40 |
21 |
Manual /
piezo /
DC-servo |
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M-037 |
Continuous travel range, compact,
clear aperture, high resolution,
60 mm diameter. |
30 |
> 360 |
Manual /
DC-servo /
stepper motor |
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M-038 |
Continuous travel range, compact,
clear aperture, high resolution,
100 mm diameter. |
40 |
> 360 |
Manual /
DC-servo /
stepper motor |
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M-060 -
M-062 |
Continuous travel range compact, clear aperture,
high resolution, 60 to 120 mm diameter. |
50 - 65 |
> 360 |
Manual /
DC-servo /
stepper motor |
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| Tip/Tilt Stages |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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M-041 -
M-044 |
Tip & tip/tilt stages, high resolution,
piezo option. |
4, 5 |
±9 |
Manual /
DC-servo /
piezo |
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| For Piezoelectric Ultra-Precision Tip /Tilt / Z-Stages click here |
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| Piezo Linear Motor Stages |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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P-653 |
Miniature Piezo Linear Motors for OEMs:
only 8 mm long |
0.005 |
2 |
PILine® ultrasonic motor |
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M-661,
M-662 |
Smallest stage with linear motor drive available, speed to 500 mm/s, 0.1 µm resolution. |
0,5 |
20 |
PILine® ultrasonic motor |
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M-674 |
RodDrive Piezo Linear Motor Pusher
for OEMs |
0.7 |
100
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PILine® ultrasonic motor |
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M-663 |
Smallest stage with linear motor drive and
linear encoder, speed to 500 mm/s,
0.1 µm resolution. XY-combinations possible. |
0.5 |
20 |
PILine® ultrasonic motor |
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N-661 |
Miniature Linear Stage with NEXACT® Drive |
20 |
20 |
Piezo-Walk® Piezo Stepping Motor |
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M-664 |
M-664 micropositioning systems are low-profile, high-accuracy translation stages with piezo linear encoders. |
0.5 |
25 |
PILine® ultrasonic motor |
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M-682 |
M-682 translation stages are low-profile, high-accuracy positioning systems based on the M-674 RodDrive ultrasonic linear motor actuator.
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5 |
50 |
PILine® ultrasonic motor |
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M-686 |
Linear motor-driven XY stage with linear
encoder, 0.1 µm resolution |
5 |
25 |
PILine® ultrasonic motor |
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| Piezo Linear Motor Drives |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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P-653 |
Miniature Piezo Linear Motors for OEMs:
only 8 mm long
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0.005 |
2 |
PILine® ultrasonic motor |
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P-661 |
OEM Ultrasonic piezo linear motor,
small, light, very fast. |
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Piezo linear
motor |
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M-674 |
RodDrive Piezo Linear Motor Pusher
for OEMs |
0.7 |
100
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PILine® ultrasonic motor |
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N-111 |
NEXLINE® nano drive,
subnanometer resolution. |
8 |
5 |
Piezo-Walk® |
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N-214,
N-215 |
NEXLINE® high-load nano drive,
subnanometer resolution. |
60 |
20 |
Piezo-Walk® |
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N-310 |
NEXACT® Ultra-compact piezo stepping drive, subnanometer resolution. |
1 |
20 |
Piezo-Walk® |
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N-380
N-381 |
High-resolution PiezoWalk® linear actuator with optional position sensor |
1.5 |
30 |
Piezo-Walk® Piezo Stepping Motor |
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| Fast Scanning Stages with Voice Coil Drive |
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Click Image for
Data Sheet |
*Models |
Description |
Load
Capacity [kg] |
Travel Range [mm] |
Drive |
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V-106 |
Voice-coil scanner, fast,
with PC-card controller. |
0.1 |
6, 20 |
Voice coil
linear motor |
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| Piezo Scanning Stages |
