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| Systems with Large Clear Apertures |
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X: 100 µm. Clear aperture: 85 mm. Closed-loop, LVDT sensor |
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Z θx θy Stage, Z: 200 µm. Rotation: 2 mrad, clear aperture: 100 mm, height: 20 mm |
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Z: 30 µm. Clear aperture: 200 x 200 mm. Closed-loop, for optical inspection |
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X, Y: 100 µm. Clear aperture: 100 x 100 mm. LVDT sensors |
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XY: 150 µm.
aperture: 200 x 200 mm. Height 28 mm, closed-loop, for mask alignment |
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X, Y: 100 µm.
Aperture: 40 mm, height: 30 mm. LVDT and capacitive sensors |
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| Interferometry Systems |
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X: 2 µm / 500 V, stainless steel. Dimensions: 70 x 160 x 20 mm, very stiff and precise for X-ray interferometry |
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X: 5 µm / 1000 V, stainless steel. Dimensions: 70 x 70 x 20 mm, very stiff and precise |
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X: 15 µm, aluminum and invar versions. Dimensions: 70 x 70 x 20 mm, for phase shift interferometry |
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Z: 3 µm, invar or aluminum. 30 mm diam. x 10 mm, for phase shift interferometry. Clear aperture / capacitive sensor. |
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| Compact Multi-Axis Optics, Fiber Optics, Microscopy Systems |
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X, Y: 15 x 15 µm (30 x 30 µm), stainless steel. Application: AFM |
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X, Y: 15 x 15 µm, stainless steel 40 x 40 x 40 mm, SGS sensors. Application: optics grinding |
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XYZ: 100 µm, SGS sensors. Dimensions: 44 x 44 x 44 mm. Application: fiber alignment |
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XYZ: to 100 µm, Application: fiber alignment, life sciences |
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X, XY, XYZ-combinations: ±150 µm. Application: fiber alignment |
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X, Y: 100 µm; Z: 15 µm. Dimensions: 100 x 100 x 40 mm. Capacitive sensors |
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X, Y: 100 µm; Z: 15 µm. Dimensions: 100 x 100 x 65 mm. Capacitive sensors |
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XYZ θx θy: 100 µm, 5 mrad. Dim.: 80 x 80 x 55 mm, LVDT sensor, clear aperture: 20 x 20 mm |
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| Hybrid and Long-Travel Systems |
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NEXLINE® Piezo Drive. <0.1 nm resolution, travel to 100 mm, to 600 N holding force, nonmagnetic |
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Z: 300 µm. LVDT sensor.
Application: wafer positioning |
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X: ±200 µm.
Application: micro-assembly |
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Z: 700 µm, steel / titanium.
Application: wafer positioning |
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Z: 1000 µm, steel / titanium.
Application: wafer positioning |
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X: 2 mm, resonant operation at 30 Hz, voice coil drive |
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Hybrid system. Fine. 1 nm resolution, 100 x 100 x 100 µm; coarse: 50 nm resolution, 15 x 15 x 15 mm |
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Microscope stage. Fine: < 1 nm resolution, 100 x 100 µm; coarse: 100 x 100 mm, very low profile, piezo linear motor |
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| Miscellaneous 1- and 2-Axis Systems |
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X: 75 µm, dim.: 115 x 115 x 25 mm. Aluminum, very stiff, very good guiding accuracy |
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X: 100 µm, dim.: 80 x 80 x 15 mm. Clear aperture: 20 x 20 mm. LVDT sensor |
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X: 100 µm, dim.: 80 x 80 x 20 mm. Clear aperture: 20 x 20 mm. Capacitive sensors |
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X: 200 µm, aperture 40 x 40 mm, LVDT sensor |
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XZ: 7 µm. Dimensions: 25 x 30 x 15 mm |
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Z: 7 µm, stainless steel, SGS sensor. Dimensions: 10 x 15 x 20 mm |
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X: 5 µm. Stainless steel |
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X: 50 µm. Dimensions: 20 x 12 x 30 mm |
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X: 12 to 38 µm, stainless steel, 16 x 30 x 44 mm, capacitive sensors, rapid settling behavior |
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X: 30, 50, 100 µm. Application: fiber alignment, life sciences |
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X: 80 µm, stainless steel. Dimensions: 40 x 50 x 12,5 mm, LVDT sensor |
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Z: 12 µm, aperture 25 mm. Capacitive sensor |
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