Multi-Axis Piezo Flexure Nanopositioning Stages & High Speed Scanning Systems
Parallel Kinematics Stages | Piezo Actuators | Back to Introduction |  Examples of Custom Designs

PI is the global leader in piezo nanopositioning and scanning systems. PI offers the greatest variety of standard piezostage systems as well as custom tailored solutions. PI piezo stage positioners & scanners with frictionless flexure guidance are decidedly superior to positioners with conventional guiding systems in terms of resolution, reproducibility, straightness and flatness.
Linear Stages and Actuators
Microscopy Steering Mirrors Z-Tip/Tilt Stages Linear Stages 2 to 6-Axis Stages

Selection Guide: Multi-Axis Nanopositioning Systems (XY to 6 Axis)
Models* Description Travel [µm] Sensor Dynamics* Precision**
P-915KXYS.gif P-915KXYS Fast XY OEM scanner, cost-effective 4 x 4 - ++++o +++oo
P-611.1 P-611.1,
Compact, low-cost X and XY nanopositioning stages. 100 SGS ++ooo ++ooo
P-620.2 - P-628.2 P-620.2 -
PIHera® XY piezo nanopositioners, Very compact & accurate (direct metrology),
long travel range.
50, 100, 250, 500, 1000, 1800 Capacitive +++oo +++oo
P-714 P-713-
Compact XY scanner, low profile 45 x 45 x 6 mm. 15 x 15 SGS +++++ ++ooo
P-612.2 P-612.2 Compact, low-cost, XY stage. 100 x 100 µm travel, clear aperture. 100 x 100 SGS ++ooo ++ooo
P-541 - P-542 P-541
Low profile XY scanning stage, 80 x 80 mm aperture, high-speed direct drive version available. to 200 in XY Capacitive / SGS ++ooo +++oo
P-734 P-734 XY nanoscanning stage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture. 100 x 100 Capacitive +++oo +++++
P-733.2DD, P-733.3DD P-733.2DD,
High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy 30 x 30 (x10) Capacitive +++++ +++++
P-733 P-733 XY(Z) piezo scanning piezostage, 50 x 50 mm aperture, vacuum versions available. 100 x 100
(x 10)
Capacitive +++oo ++++o
P-363 P-363 PicoCube® XY and XYZ high-precision system for AFM, SPM, nanomanipulation; 50 picometer resolution. 5 / Axis Capacitive +++++ +++++
P-313 P-313 PicoCube® XYZ high-presision scanner for bio- / nanomanipulation 1 x 1 x 0.8 - +++oo +++oo
P-611.3 P-611.3 NanoCube® XYZ Piezo Stage Compact Multi-Axis
Piezo System for Nanopositioning and Fiber Alignment
Up to 120 x 120 x 120 µm SGS +++oo +++oo
P-915KPPS P-915KPPS XY-Theta-Z piezo stage, high stiffness 250 x 250; +/- 8 mrad SGS ++++o +++oo
P-615 P-615 NanoCube® XYZ piezo alignment system, clear aperture, ideal for fiber alignment, parallel kinematics. to 350 / Axis Capacitive +++oo +++oo
P-517, P-527 P-517,
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. to 200 in XY,
20 in Z,
to 4 mrad
Capacitive +++oo ++++o
P-561 - P-563 P-561 -
PIMars™ XYZ piezostage, 66 x 66 mm clear aperture, custom 6-axis model available
to 300 x 300 x 300 Capacitive +++oo ++++o
P-915KLVS P-915KLVS Vacuum compatible XYZ stage, w/ large aperture 100 x 100 x 100 Capacitive +++oo ++++o
P-587 P-587 6-axis-nanopositioning Piezostage, XYZ, θxθyθz up to 800 / 10 mrad Capacitive +++oo +++++
N-515KK N-515 Non-Magnetic Piezo Hexapod 6-Axis Precision Positioning System with NEXLINE® Linear Drives 10 mm Linear, 6° Rotation Linear Encoder ++ooo +++oo
More Hexapod 6-Axis Systems
P-628KHFS P-628KHFS Long-travel XY piezo stage, nanometer flatness 800 x 800 Capacitive ++ooo ++++o

More Nanopositioning Systems

Linear Stages and Actuators
Linear Nanopositioning Stages Z-Tip/Tilt Nanopositioning Systems Multi-Axis Nanopositioning Systems Tip-Tilt Platform & Active Optics Stages for Microscopy