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Selection Guides: Parallel-Kinematics Piezo Nanopositioning Stages & High Speed Scanning Systems
Linear Stages | Multi-Axis Stages | Microscopy Systems | Z & Tip/Tilt Systems | Parallel Kinematics Stages | Piezo Actuators |
Back to Introduction |  Examples of Custom Designs

Parallel-Kinematics / Metrology Introduction
For the ultimate in dynamics straightness/flatness/orthogonality and for coordinate transformation situations (such as rotating about an arbitrary point in space), parallel kinematics positioning systems are required.
Learn more about the difference between parallel kinematics and serial kinematics. 		 

Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Models* Description Axes Sensor Travel [µm]
P-313 P-313 PicoCube® piezo scanner picometer precision, high bandwidth, no servo lag, for scanning probe microscopy XY, XYZ - 1 x 1 x 0.8
P-714 P-714 Compact XY scanner, low profile 45 x 45 x 6 mm. XY SGS 15
P-363 P-363 PicoCube® high-precision system for AFM, SPM, nanomanipulation; 50 picometer resolution. XY, XYZ Capacitive 5 / Axis
P-541 - P-542 P-541
P-542		 Low profile XY scanning piezostage 80 x 80 mm aperture. XY Capacitive to 200 in XY
P-733 P-733 XY(Z) piezo scanning piezostage 50 x 50 mm aperture, vacuum versions available. XY(Z) Capacitive 100 x 100
(x 10)
P-733.2DD / P-733.3DD P-733.2DD /
P-733.3DD		 High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy. XY, XYZ Capacitive 30 x 30 (x10)
P-734 P-734 XY nanoscanning piezostage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture.. XY Capacitive 100 x 100
P-915KLVS P-915K XYZ large (340 x 340 x 60 mm) vacuum compatible scanner, clear aperture 200 x 200 mm. XYZ Capacitive 100 x 100 x 100
P-517 - P-527 P-517 -
P-527		 Multi-axis piezostage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. XY, XYZ,
XYθz		 Capacitive to 200 in XY,
10 in Z,
to 2 mrad
P-561.3DD P-561.3DD PIMars™ XYZ scanning stages, faster, direct drive, excellent guidance,
66 x 66 mm clear aperture.		 XY, XYZ Capacitive 45 XY, 11 Z
P-561 - P-563 P-561 -
P-563		 PIMars™ multi-axis piezostage; travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture,custom model with 6 degrees of freedom available. XY, XYZ Capacitive to
300 x 300 x 300
P-615 P-615 NanoCube® 350C XYZ piezo alignment system, clear aperture, ideal for fiber alignment. XYZ Capacitive to 350 / Axis
P-518 - P-558 P-518 -
P-558		 Z-axis and tip/tilt piezostage platforms clear aperture Z, θxθy Capacitive to 200 in Z,
4 mrad
P-587 P-587 6-axis-nanopositioning stage. XYZ, θxθyθz Capacitive up to 800 /
10 mrad

More Nanopositioning Systems
Linear Stages | Multi-Axis Stages | Microscopy Systems | Z & Tip/Tilt Systems | Piezo Actuators |