 Compact Open-Loop Stages |
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| Microscopy Z-Stages / Objective Nanofocusing Systems |
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| Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors |
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| Closed-Loop Single-Axis Stages with Direct Metrology (Direct Metrology = Higher Accuracy) |
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Click Image for
Data Sheet |
Models* |
Description |
Axes |
Travel [µm] |
Sensor |
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P-783 |
Nanopositioning Z-stage, long travel range, closed-loop, compact. |
Z |
300 |
LVDT |
 |
P-620.Z -
P-622.Z - |
PIHera® Z-axis nanopositioners, compact, very accurate, long travel range. |
Z |
50, 100, 250 |
Capacitive |
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P-772 |
Nanopositioning stage, very compact, fast and accurate |
X |
10 |
- |
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P-780 |
Nanopositioning stage, compact, fast, stainless steel |
X |
80 |
LVDT |
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P-750 |
High-load nanopositioning stage, very good guidance, high stiffness. |
X |
75 |
Capacitive / LVDT |
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P-752 |
Nanopositioning stage. Very fast and accurate, outstanding guiding accuracy. |
X |
15, 30 |
Capacitive |
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P-753 |
Nanopositioning stage and actuator in one, very compact, fast and accurate. |
Z & X |
12, 25, 38 |
Capacitive |
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P-620.1 -
P-629.1 |
PIHera® piezo nanopositioners, compact, very accurate, long travel ranges, excellent value |
X (XY, Z) |
50, 100, 250, 500, 1000, 1800 |
Capacitive |
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N-661 |
Miniature Linear Stage with NEXACT® Drive |
X |
20,000 |
Incremental |
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M-714 |
Hybrid Z-stage. DC-servo + piezo drive. Extremely Accurate.
2 nm Linear Encoder. |
Z |
7 |
Incremental |
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M-511.HD |
Hybrid translation stages with DC motors and piezo drives. Extremely accurate. 4 nm Linear Encoder. |
X |
100 |
Incremental |
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| Multi-Axis Stages, Modular Stages (Serial Kinematics) |
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Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
(Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision) |
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| Z-Axis and Tip/Tilt Platforms >> For Fast Steering Platforms: click here |
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| Scanning (Microscopy) Piezo-Stage Systems with Clear Aperture |
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| NEXLINE® / NEXACT® Long Travel Nanopositioning / Picopositioning Drives |
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| 6-Axis Parallel Kinematics Stages |
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