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Fast Low Profile Piezomotor Rotary Stage
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24 Bit Piezo Controllers with USB
Ultra-High Dynamics Objective Scanner
PI Nano Microscope Stage
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Miniature Hexapod
Scanning Microscopy Stage

Selection Guides: Piezo Flexure Nanopositioning Stages & Scanners, Piezo Systems

Piezo Actuators | Piezo Linear Motors | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
Back to Introduction      Examples of Custom Designs

Expand Nanopositioning Selection Guide Tables (Full View) Collapse Nanopositioning Selection Guide Tables (Quick Overview)

Compact Open-Loop Stages
Microscopy Z-Stages / Objective Nanofocusing Systems
Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors
Closed-Loop Single-Axis Stages with Direct Metrology     (Direct Metrology = Higher Accuracy)
Multi-Axis Stages, Modular Stages (Serial Kinematics)
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
       (Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision)
Click Image for
Data Sheet
Models* Description Axes Travel [µm] Sensor
P-313 P-313 PicoCube® piezo scanner picometer precision, high bandwidth, no servo lag, for scanning probe microscopy XY, XYZ 1 x 1 x 0.8 -
P-714 P-714 Compact XY scanner, low profile 45 x 45 x 6 mm. XY 15 SGS
P-363 P-363 PicoCube® high-precision system for AFM, SPM, nanomanipulation; 50 picometer resolution. XY, XYZ 5 / Axis Capacitive
P-541 - P-542 P-541
P-542
Low profile XY scanning piezostage 80 x 80 mm aperture. XY to 200 in XY Capacitive
P-733 P-733 XY(Z) piezo scanning piezostage 50 x 50 mm aperture, vacuum versions available. XY(Z) 100 x 100
(x 10)
Capacitive
P-733.2DD / P-733.3DD P-733.2DD /
P-733.3DD
High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy. XY, XYZ 30 x 30 (x10) Capacitive
P-734 P-734 XY nanoscanning piezostage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture.. XY 100 x 100 Capacitive
P-915KLVS P-915K XYZ large (340 x 340 x 60 mm) vacuum compatible scanner, clear aperture 200 x 200 mm. XYZ 100 x 100 x 100 Capacitive
P-517 - P-527 P-517 -
P-527
Multi-axis piezostage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. XY, XYZ,
XYθz
to 200 in XY,
10 in Z,
to 2 mrad
Capacitive
P-561.3DD P-561.3DD PIMars™ XYZ scanning stages, faster, direct drive, excellent guidance,
66 x 66 mm clear aperture.
XY, XYZ 45 XY, 11 Z Capacitive
P-561 - P-563 P-561 -
P-563
PIMars™ multi-axis piezostage; travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture,custom model with 6 degrees of freedom available. XY, XYZ to
300 x 300 x 300
Capacitive
P-615 P-615 NanoCube® 350C XYZ piezo alignment system, clear aperture, ideal for fiber alignment. XYZ to 350 / Axis Capacitive
P-518 - P-558 P-518 -
P-558
Z-axis and tip/tilt piezostage platforms clear aperture Z, θxθy to 200 in Z,
4 mrad
Capacitive
P-587 P-587 6-axis-nanopositioning stage. XYZ, θxθyθz up to 800 /
10 mrad
Capacitive
Z-Axis and Tip/Tilt Platforms       >> For Fast Steering Platforms: click here
Scanning (Microscopy) Piezo-Stage Systems with Clear Aperture
NEXLINE® / NEXACT® Long Travel Nanopositioning / Picopositioning Drives
6-Axis Parallel Kinematics Stages


* Ask about custom sizes, sensors or special designs. Capacitive and LVDT sensors are direct metrology devices.
Capacitive sensors provide the highest accuracy, bandwidth and linearity.
Download the Piezo-Stage Nanopositioning & Scanning Systems PDF Catalog
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