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Fast Low Profile Piezomotor Rotary Stage
High Force Ceramic Linear Motor
24 Bit Piezo Controllers with USB
Ultra-High Dynamics Objective Scanner
PI Nano Microscope Stage
New Vacuum Compatible Products
Miniature Hexapod
Scanning Microscopy Stage

Selection Guides: Piezo Flexure Nanopositioning Stages & Scanners, Piezo Systems

Piezo Actuators | Piezo Linear Motors | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
Back to Introduction      Examples of Custom Designs

Expand Nanopositioning Selection Guide Tables (Full View) Collapse Nanopositioning Selection Guide Tables (Quick Overview)

Compact Open-Loop Stages
Microscopy Z-Stages / Objective Nanofocusing Systems
Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors
Closed-Loop Single-Axis Stages with Direct Metrology     (Direct Metrology = Higher Accuracy)
Multi-Axis Stages, Modular Stages (Serial Kinematics)
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
       (Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision)
Z-Axis and Tip/Tilt Platforms       >> For Fast Steering Platforms: click here
Scanning (Microscopy) Piezo-Stage Systems with Clear Aperture
Click Image for
Data Sheet
Models* Description Axes Travel [µm] Sensor
P-721 P-721.CDQ
P-721.SL2
PIFOC® objective nanofocusing system, very fast and accurate, with QuickLock mounting system, direct metrology. Z 100 Capacitive / SGS
P-725 P-725 PIFOC® objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. Z 100, 250, 400 Capacitive
P-726 P-726 PIFOC® high-dynamic piezo Z scanner for heavy objectives, direct metrology. Z 100 Capacitive
P-725.XDD P-725.XDD PIFOC® nanopositioning and scanning system for microscope objectives, direct metrology. Z 20 Capacitive / SGS
P-720 P-720 PIFOC® objective nanofocusing system, very compact, without sensors. Z 100 -
P-737 P-737 PIFOC® Z-axis microscopy piezo stage for high-resolution sample positioning and scanning Z to 250 µm SGS
P-732.ZC P-732.ZC High-Dynamics Vertical Nanopositioning/Scanning Piezostage Z 15 Capacitive
P-612.Z P-612.Z Compact, Low-Cost, Z Stage Z 100 SGS
P-541.Z P-541.Z Low-profile Z-stage, 80 x 80 mm aperture Z & Z,
Tip/Tilt
100 Capacitive / SGS
P-518 - P-558 P-518 -
P-558
Z-axis and tip/tilt platforms clear aperture, Tip/Tilt Z & Z to 200 in Z,
4 mrad
Capacitive
P-712 P-712 Compact X-scanner, fast. X 30 - / SGS
P-714 P-714 Ultracompact XY- scanner, fast XY 15 SGS
P-612.2 P-612.2 Compact, low-cost, XY stage. 100 x 100 µm travel, clear aperture. XY 100 x 100 SGS
P-541 - P-542 P-541
P-542
Low profile XY scanning stage, 80 x 80 mm aperture, high-speed direct drive version available. XY to 200 in XY Capacitive / SGS
P-733 P-733 XY(Z) piezo scanning piezostage, 50 x 50 mm aperture, vacuum versions available. XY(Z) 100 x 100
(x 10)
Capacitive
P-733.2DD, P-733.3DD P-733.2DD,
P-733.3DD
High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy XY, XYZ 30 x 30 (x10) Capacitive
P-734 P-734 XY nanoscanning stage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture. XY 100 x 100 Capacitive
P-915KLVS P-915K XYZ large (340 x 340 x 60 mm) vacuum compatible scanner, clear aperture 200 x 200 mm. XYZ 100 x 100 x 100 Capacitive
P-517, P-527 P-517,
P-527
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. XY, XYZ, XYθz to 200 in XY,
20 in Z,
to 4 mrad
Capacitive
P-561 - P-563 P-561 -
P-563
PIMars multi-axis piezostage, travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available
XY, XYZ to 300 x 300 x 300 Capacitive
NEXLINE® / NEXACT® Long Travel Nanopositioning / Picopositioning Drives
6-Axis Parallel Kinematics Stages


* Ask about custom sizes, sensors or special designs. Capacitive and LVDT sensors are direct metrology devices.
Capacitive sensors provide the highest accuracy, bandwidth and linearity.
Download the Piezo-Stage Nanopositioning & Scanning Systems PDF Catalog
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