Shopping Basket



Latest PI Newsletter
Fast Low Profile Piezomotor Rotary Stage
High Force Ceramic Linear Motor
24 Bit Piezo Controllers with USB
Ultra-High Dynamics Objective Scanner
PI Nano Microscope Stage
New Vacuum Compatible Products
Miniature Hexapod
Scanning Microscopy Stage
Selection Guides: Piezo Flexure Nanopositioning Stages & Scanners, Piezo Systems
Piezo Actuators | Piezo Linear Motors | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
Back to Introduction      Examples of Custom Designs

Collapse Nanopositioning Selection Guide Tables (Quick Overview)

Compact Open-Loop Stages
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-712 P-712 Compact X-scanner, fast. X 30 - / SGS
P-713 P-713 Compact XY-scanner, fast. XY 15 -
P-280 P-280 Nanopositioning stage,
XY and XYZ combinations.		 X 30, 50, 100 -
P-290 P-290 Nanopositioning Z-stage. Long travel range Z 1000 -
P-601 P-601 Open & closed loop lever amplified Z-actuators / stages. Z 110, 300, 400 - / SGS
P-287 P-287 Z-stage and tilt nanopositioning stage, long travel range. Z, θx 700, 12 mrad -
P-772 P-772 Ultracompact Flexure Guided System X 10 -
Microscopy Z-Stages / Objective Nanofocusing Systems
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-721 P-721.CDQ
P-721.SL2		 PIFOC® objective nanofocusing system, very fast and accurate, with QuickLock mounting system, direct metrology. Z 100 Capacitive / SGS
P-725 P-725 PIFOC® objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. Z 100, 250, 400 Capacitive
P-726 P-726 PIFOC® high-dynamic piezo Z scanner for heavy objectives, direct metrology. Z 100 Capacitive
P-725.XDD P-725.XDD PIFOC® nanopositioning and scanning system for microscope objectives, direct metrology. Z 20 Capacitive / SGS
P-720 P-720 PIFOC® objective nanofocusing system, very compact, without sensors. Z 100 -
P-720 P-737 PIFOC® Z-axis microscopy piezo stage for high-resolution sample positioning and scanning Z to 250 µm SGS
P-541.Z P-541.Z Low-profile Z-stage, 80 x 80 mm aperture. Z (θxθy) 100 Capacitive / SGS
Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-611.1, P-611.2 P-611.1,
P-611.2		 Compact, low-cost X and XY nanopositioning stages. X, XY 100 SGS
S-303 P-611.ZS,
P-611.XZS		 Compact, low-cost X and XY nanopositioning stages. Z, XZ 100 SGS
P-714 P-714 Ultracompact XY- scanner, fast XY 15 SGS
Closed-Loop Single-Axis Stages with Direct Metrology     (Direct Metrology = Higher Accuracy)
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-783 P-783 Nanopositioning Z-stage, long travel range, closed-loop, compact. Z 300 LVDT
P-620.Z - P-620.Z P-620.Z -
P-622.Z -		 PIHera® Z-axis nanopositioners, compact, very accurate, long travel range. Z 50, 100, 250 Capacitive
P-772 P-772 Nanopositioning stage, very compact, fast and accurate X 10 -
P-780 P-780 Nanopositioning stage, compact, fast, stainless steel X 80 LVDT
P-750 P-750 High-load nanopositioning stage, very good guidance, high stiffness. X 75 Capacitive / LVDT
P-752 P-752 Nanopositioning stage. Very fast and accurate, outstanding guiding accuracy. X 15, 30 Capacitive
P-753 P-753 Nanopositioning stage and actuator in one, very compact, fast and accurate. Z & X 12, 25, 38 Capacitive
P-620.1 - P-628.1 P-620.1 -
P-629.1		 PIHera® piezo nanopositioners, compact, very accurate, long travel ranges, excellent value X (XY, Z) 50, 100, 250, 500, 1000, 1800 Capacitive
N-661 N-661 Miniature Linear Stage with NEXACT® Drive X 20,000 Incremental
M-714 M-714 Hybrid Z-stage. DC-servo + piezo drive. Extremely Accurate.
2 nm Linear Encoder.		 Z 7 Incremental
M-511.HD M-511.HD Hybrid translation stages with DC motors and piezo drives. Extremely accurate. 4 nm Linear Encoder. X 100 Incremental
Multi-Axis Stages, Modular Stages (Serial Kinematics)
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-281 / P-282 P-281 /
P-282		 Compact open-loop, modular, nanopositioning stages. XY, XYZ 30, 50, 100 -
P-612.2 P-612.2 Compact, low-cost, XY stage. 100 x 100 µm travel, clear aperture. XY 100 x 100 SGS
P-611.1, P-611.2 P-611.1,
P-611.2		 Compact, low-cost X and XY nanopositioning stages. X, XY 100 SGS
S-303 P-611.ZS,
P-611.XZS		 Compact, low-cost X and XY nanopositioning stages. Z, XZ 100 SGS
P-611.3 P-611.3 NanoCube® XYZ piezo alignment system, compact, very cost-effective. XYZ 100 SGS
P-620.2 - P-628.2 P-620.2 -
P-629.2		 PIHera® XY piezo nanopositioners, Very compact & accurate (direct metrology),
long travel range.
 XY (Z, XYZ) 50, 100, 250, 500, 1000, 1800 Capacitive
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
       (Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision)
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-313 P-313 PicoCube® piezo scanner picometer precision, high bandwidth, no servo lag, for scanning probe microscopy XY, XYZ 1 x 1 x 0.8 -
P-714 P-714 Compact XY scanner, low profile 45 x 45 x 6 mm. XY 15 SGS
P-363 P-363 PicoCube® high-precision system for AFM, SPM, nanomanipulation; 50 picometer resolution. XY, XYZ 5 / Axis Capacitive
P-541 - P-542 P-541
P-542		 Low profile XY scanning piezostage 80 x 80 mm aperture. XY to 200 in XY Capacitive
P-733 P-733 XY(Z) piezo scanning piezostage 50 x 50 mm aperture, vacuum versions available. XY(Z) 100 x 100
(x 10)		 Capacitive
P-733.2DD / P-733.3DD P-733.2DD /
P-733.3DD		 High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy. XY, XYZ 30 x 30 (x10) Capacitive
P-734 P-734 XY nanoscanning piezostage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture.. XY 100 x 100 Capacitive
P-915KLVS P-915K XYZ large (340 x 340 x 60 mm) vacuum compatible scanner, clear aperture 200 x 200 mm. XYZ 100 x 100 x 100 Capacitive
P-517 - P-527 P-517 -
P-527		 Multi-axis piezostage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. XY, XYZ,
XYθz		 to 200 in XY,
10 in Z,
to 2 mrad		 Capacitive
P-561.3DD P-561.3DD PIMars™ XYZ scanning stages, faster, direct drive, excellent guidance,
66 x 66 mm clear aperture.		 XY, XYZ 45 XY, 11 Z Capacitive
P-561 - P-563 P-561 -
P-563		 PIMars™ multi-axis piezostage; travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture,custom model with 6 degrees of freedom available. XY, XYZ to
300 x 300 x 300		 Capacitive
P-615 P-615 NanoCube® 350C XYZ piezo alignment system, clear aperture, ideal for fiber alignment. XYZ to 350 / Axis Capacitive
P-518 - P-558 P-518 -
P-558		 Z-axis and tip/tilt piezostage platforms clear aperture Z, θxθy to 200 in Z,
4 mrad		 Capacitive
P-587 P-587 6-axis-nanopositioning stage. XYZ, θxθyθz up to 800 /
10 mrad		 Capacitive
Z-Axis and Tip/Tilt Platforms       >> For Fast Steering Platforms: click here
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-737 P-737 PIFOC® Z-axis microscopy piezo stage for high-resolution sample positioning and scanning Z to 250 µm SGS
P-541.Z P-541.Z Low-profile Z-stage, 80 x 80 mm aperture. Z & Z,
Tip/Tilt		 100 Capacitive / SGS
P-518 - P-558 P-518 -
P-558		 Z-axis and tip/tilt piezostage platforms 66 x 66 mm clear aperture Z & Z,
Tip/Tilt		 to 200 in Z,
4 mrad		 Capacitive
P-732.ZC P-732.ZC High-Dynamics Vertical Nanopositioning/Scanning Stage Z 15 Capacitive
P-612.Z P-612.Z Compact, Low-Cost, Z Stage Z 100 SGS
P-620.Z - P-622.Z P-620.Z -
P-622.Z		 PIHera® Z-axis nanopositioners, compact, very accurate, long travel range. Z 50, 100, 250 Capacitive
P-611.ZS, P-611.XZS P-611.ZS,
P-611.XZS		 Compact, low-cost Z and XY nanopositioning piezostage Z, XZ 100 SGS
P-783 P-783 Nanopositioning Z-stage. Long travel range, compact. Z 300 LVDT
P-601 P-601 Closed-loop, with flexure guidance Z 110, 300, 400 SGS
P-290 P-290 Nanopositioning Z-stage, very long travel range, open-loop. Z 1000 -
P-287 P-287 Z-axis and tip/tilt nanopositioning piezostage, long travel range, open-loop. Z, θx 700, 12 mrad -
M-714 M-714 Hybrid Nanopositioning Z-stage, ultra-long travel range, high load, DC-servo + piezo drives. Z 7000 Glass scale
    For Tip/Tilt Mirror Platforms click here
Scanning (Microscopy) Piezo-Stage Systems with Clear Aperture
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-721 P-721.CDQ
P-721.SL2		 PIFOC® objective nanofocusing system, very fast and accurate, with QuickLock mounting system, direct metrology. Z 100 Capacitive / SGS
P-725 P-725 PIFOC® objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. Z 100, 250, 400 Capacitive
P-726 P-726 PIFOC® high-dynamic piezo Z scanner for heavy objectives, direct metrology. Z 100 Capacitive
P-725.XDD P-725.XDD PIFOC® nanopositioning and scanning system for microscope objectives, direct metrology. Z 20 Capacitive / SGS
P-720 P-720 PIFOC® objective nanofocusing system, very compact, without sensors. Z 100 -
P-737 P-737 PIFOC® Z-axis microscopy piezo stage for high-resolution sample positioning and scanning Z to 250 µm SGS
P-732.ZC P-732.ZC High-Dynamics Vertical Nanopositioning/Scanning Piezostage Z 15 Capacitive
P-612.Z P-612.Z Compact, Low-Cost, Z Stage Z 100 SGS
P-541.Z P-541.Z Low-profile Z-stage, 80 x 80 mm aperture Z & Z,
Tip/Tilt		 100 Capacitive / SGS
P-518 - P-558 P-518 -
P-558		 Z-axis and tip/tilt platforms clear aperture, Tip/Tilt Z & Z to 200 in Z,
4 mrad		 Capacitive
P-712 P-712 Compact X-scanner, fast. X 30 - / SGS
P-714 P-714 Ultracompact XY- scanner, fast XY 15 SGS
P-612.2 P-612.2 Compact, low-cost, XY stage. 100 x 100 µm travel, clear aperture. XY 100 x 100 SGS
P-541 - P-542 P-541
P-542		 Low profile XY scanning stage, 80 x 80 mm aperture, high-speed direct drive version available. XY to 200 in XY Capacitive / SGS
P-733 P-733 XY(Z) piezo scanning piezostage, 50 x 50 mm aperture, vacuum versions available. XY(Z) 100 x 100
(x 10)		 Capacitive
P-733.2DD, P-733.3DD P-733.2DD,
P-733.3DD		 High-speed scanning piezostage, XY and XYZ versions, ideal for tasks like scanning microscopy XY, XYZ 30 x 30 (x10) Capacitive
P-734 P-734 XY nanoscanning stage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture. XY 100 x 100 Capacitive
P-915KLVS P-915K XYZ large (340 x 340 x 60 mm) vacuum compatible scanner, clear aperture 200 x 200 mm. XYZ 100 x 100 x 100 Capacitive
P-517, P-527 P-517,
P-527		 Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. XY, XYZ, XYθz to 200 in XY,
20 in Z,
to 4 mrad		 Capacitive
P-561 - P-563 P-561 -
P-563		 PIMars™ multi-axis piezostage, travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available
 XY, XYZ to 300 x 300 x 300 Capacitive
NEXLINE® / NEXACT® Long Travel Nanopositioning / Picopositioning Drives
Click Image for
Data Sheet		 Models* Description Load
Capacity [kg]		 Travel [mm] Drive
N-110 N-111 NEXLINE® PiezoWalk® nanopositioning drive, subnanometer resolution. 8 5 Piezo-Walk®
N-214 N-214 NEXLINE® PiezoWalk® high-load nanopositioning drive, subnanometer resolution. 60 20 Piezo-Walk®
N-310 N-310 NEXACT® Ultra-compact nanopositioning drive, subnanometer resolution. 1 20 Piezo-Walk®
N-380, N-381 N-380
N-381		 High-resolution PiezoWalk® linear actuator with optional position sensor 1.5 30 Piezo-Walk® Piezo Stepping Motor

6-Axis Parallel Kinematics Stages
Click Image for
Data Sheet		 Models* Description Axes Travel [µm] Sensor
P-587 P-587 6-axis-nanopositioning Piezostage XYZ, θxθyθz up tp 800 / 10 mrad Capacitive
P-911K N-515K NEXLINE® Piezo-Hexapod High-Load 6-Axis Nanopositioning System XYZ, θxθyθz to 10 mm / 6 deg. Linear Scale
Further Information on 6-Axis Hexapod Systems


* Ask about custom sizes, sensors or special designs. Capacitive and LVDT sensors are direct metrology devices.
Capacitive sensors provide the highest accuracy, bandwidth and linearity.
Download the Piezo-Stage Nanopositioning & Scanning Systems PDF Catalog
Download the Complete PI PDF Catalog