Nanopositioning & Scanning Systems:
Test and Calibration—Why High-Quality Nanometrology Equipment Matters

Piezo nanopositioning systems are significant investments and PI believes in optimizing the performance of every customer’s system. PI individually calibrates every stage and optimizes the dynamic performance for the customer’s application. Furthermore, PI makes significant continuing investments in improved-quality, higher-performance nanometrology equipment so that we can deliver better value to our customers.

Because a nanomechanism can only be as accurate as the equipment it was tuned and tested with, PI closed-loop stages are calibrated exclusively with the prestigious Zygo ZMI-2000 and ZMI-1000 interferometers. PI’s nanometrology calibration laboratories are seismically, electromagnetically and thermally isolated, with temperatures controlled to better than 0.25 C° / 24hr. We are confident that our calibration capabilities and procedures are the benchmark for the industry.
All PI nanopositioning systems come with extensive calibration documentation.
 

Prestigious Zygo ZMI-2000 and ZMI-1000 interferometers are used in PI´s nanometrology calibration labs. Each stage is individually calibrated and optimized for dynamic response.
State-of-the-art, room-in-room metrology lab with multiple thermal, acoustic and seismic isolation for meaningful sub-nanometer measurements.
Fully randomized position repeatablity measurement of a direct-metrology-equipped 100 µm PIHera™ stage, made with Zygo interferometer. The data show the exceptional precision of these mid-level nanopositioning devices.