Reasons for Choosing PI
- ISO-9001 certified since 1994
- PI has the most-experienced nanopositioning systems R&D and manufacturing teams
- Best-in-class calibration procedures and capabilities
- Wide variety of standard and custom systems available
- In-house PZT ceramics development and manufacture ensures highest quality
- PICMA® ceramic-encapsulated piezo drives improve reliability
- Modern test, simulation and production equipment
- In-house controller development
- State-of-the-art metrology lab with 6-way isolation for meaningful sub-nanometer measurements
- In-house design & manufacture of high-resolution capacitive sensors (sub-nanometer accuracy)
- Modern digital control algorithms for dynamic piezo linearization to increase bandwidth and throughput
Applications
- Nanometrology
- Photonics packaging and alignment
- Disk drive testing equipment
- Nanopositioning
- Semiconductor test equipment
- Microlithography
- Wafer stepping
- Mask and wafer alignment
- Precision machining (non-circular turning, boring, grinding, polishing)
- Scanning interferometry
- Surface structure analysis
- Scanning microscopy
- Autofocus systems
- Biotechnology
Nanopositioning Solutions from PI
- 1- to 6-axis standard, OEM and custom designs
- Parallel kinematics and parallel metrology for better multi-axis accuracy
- Closed-loop operation for higher linearity and repeatability
- Integrated capacitive position sensors for sub-nanometer-resolution and stability
- Optimized mechanical design, control algorithms and software for highest throughput
- High-performance controllers and amplifiers (digital, analog, modular, OEM)
- Patented feedforward techniques for rapid settling
- Dynamic digital linearization (DDL) to eliminate tracking error
- Finite Element Analysis (FEA) computer-designed flexures for nanometer and microradian trajectory control
- Invar, titanium, steel and aluminum versions for optimized thermal match
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Six-axis parallel kinematics Hexapod with NEXLINE® Piezo-Walk® nanopisitioning actuators for use in high magnetic fields.
Piezoelectric nanopositioning systems large (e.g. for precision machining), medium (e.g. for interferometry), small (e.g. for data storage medium testing) |
