Piezo Linear Motor Introduction: Ultrasonic Motors & PiezoWalk® Motors
Different Types of Piezomotors
Piezo linear motors can be divided into two groups: ultrasonic motors, also referred to as resonant motors, and step / walk motors. Both can, in principle, attain unlimited travel, yet they are very different in their design, specifications and performance.
Continuous motors are characterized by a simple design and high speed.
Step motors are more complex but can achieve much higher resolution, forces and—over small distances—dynamic performance.
A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable feature of electromagnetic linear motors. Step and continuous piezo motors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry.
