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| Features of Piezoelectric Positioning Systems |
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Unlimited Resolution
Piezoelectric actuators convert electrical energy directly to mechanical energy. They make motion in the sub-nanometer range possible. There are no moving parts in contact with each other to limit resolution.
Fast Expansion
Piezo actuators react in a matter of microseconds. Acceleration rates of more than 10,000 g can be obtained.
High Force Generation
High-load piezo actuators capable of moving loads of several tons are available today. They can cover travel ranges of several 100 µm with resolutions in the sub-nanometer range (see examples like the P-056, in the "Piezo Actuators" section).
No Magnetic Fields
The piezoelectric effect is related to electric fields. Piezo actuators do not produce magnetic fields nor are they affected by them. Piezo devices are especially well suited for applications where magnetic fields cannot be tolerated.
Low Power Consumption
Static operation, even holding heavy loads for long periods, consumes virtually no power. A piezo actuator behaves very much like an electrical capacitor. When at rest, no heat is generated.
No Wear and Tear
A piezo actuator has no moving parts like gears or bearings. Its displacement is based on solid state dynamics and shows no wear and tear. PI has conducted endurance tests on piezo actuators in which no measurable change in performance was observed after several billion cycles.
Vacuum and Clean Room Compatible
Piezoelectric actuators neither cause wear nor require lubricants. The new PICMA® actuators with ceramic insulation have no polymer coating and are thus ideal for UHV (ultra-high vacuum) applications.
Operation at Cryogenic Temperatures
The piezoelectric effect continues to operate even at temperatures close to 0 kelvin. PI offers specially prepared actuators for use at cryogenic temperatures. |
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Piezoelectric nanopositioning systems
large (e.g. for precision machining)
medium (e.g. for interferometry)
small (e.g. for data storage medium testing) |
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| Applications for Piezo Positioning Technology |
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 Data Storage
- MR head testing
- Spin stands
- Disk testing
- Active vibration cancellation
- Pole-tip recession test
Semiconductors, Microelectronics
- Nano & Microlithography
- Nanometrologie
- Wafer and mask positioning
- Critical-dimension-test
- Inspection systems
- Active vibration cancellation
Precision Mechanics
- Fast tool servos
- Non-circular grinding, drilling, turning
- Active vibration cancellation
- Structural deformation
- Tool adjustment
- Wear compensation
- Needle-valve actuation
- Micropumps
- Linear drives
- Knife edge control in extrusion tools
- Micro engraving systems
- Shock wave generation
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Life Science, Medical Technology
- Scanning microscopy
- Patch clamp
- Nanoliter pumps
- Gene manipulation
- Micromanipulation
- Cell penetration
- Microdispensers
Optics, Photonics, Nanometrologie
- Scanning mirrors
- Image stabilization, pixel multiplication
- Scanning microscopy
- Auto focus systems
- Interferometry
- Fiber optic alignment
- Fiber optics switching
- Adaptive and active optics
- Laser tuning
- Stimulation of vibrations
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Selection of piezo nanopositioning stages. |
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