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- Biotechnology
- Micromanipulation
- Microscopy
- Quality assurance testing
- Metrology
- Semiconductor testing
- Mass storage device testing
- R&D
- Photonics packaging
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M-683 precision micropositioning stages make use of PILine® ultrasonic piezo linear motors enabling a compact design and low profile. An integrated linear encoder enables closed-loop control with 0.1 µm resolution. The M-683 translation stages use paired crossed-roller bearings mounted on ground-aluminum profiles for better guiding accuracy. Integrated U-164 PILine® linear motors provide push forces to 6 N and a maximum velocity of up to 350 mm/s.
The stages can be arranged to form compact Y systems. If an additional Z-axis is required, the M-110 microstage series (see link) is recommended due to its higher holding force. The M-683 design is scalable and can be extended to provide
longer travel ranges to 300 mm. Vacuum-compatible versions are also available on rquest.
Limit and Reference Switches
For the protection of your equipment, non-contact limit and reference switches are installed. The reference switch supports advanced automation applications with high precision.
Advantages of PILine® Micro Positioning Systems
PILine® ultrasonic ceramic drives provide several advantages over classical motors and drivers:
- Higher Acclerations, up to 5 g
- Speeds up to 500 mm/s
- Small Form Factor
- Self-Locking when Powered Down
- No Shafts, Gears or Other Rotating Parts
- No Lubricants
- Non-Magnetic and Vacuum Compatible Operating Principle
Optimized Controller and Drive Electronics
For optimum performance the highly specialized C-867 motion controller (see link) is recommended. This dedicated piezo motor controller also integrates the drive electronics which PILine® motors require to generate the ultrasonic oscillations for the piezo-ceramic element.
Furthermore, the controller has a number of special characteristics, including continuous automatic drive frequency adjustment, dynamic parameter switching for optimized high-speed motion and settling behavior and some other features to address the requirements of ultrasonic motors. The broad-band encoder input (50 MHz) supports the outstanding high accelerations and velocities of PILine® drives at high resolutions.
Optionally, for use with third party servo controllers, the C-185 analog drive electronics (stand-alone unit) (see link) is available. It accepts an analog ±10 V signal to control the motor velocity. For optimum performance the driver must be tuned together with the mechanics and should be ordered at the same time as the motor/stage.
Patent Protection
The products described in this document are in part protected by the following patents:
US Pat. No. 6,765,335
German Patent No. 10154526
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PDF Catalog Datasheet
