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- Semiconductor technology
- Semiconductor testing
- Wafer inspection
- Nano lithography
- Nano-imprinting
- Nanometrology
- Active vibration damping
- Motion in strong magnetic fields
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The innovative N-111 NEXLINE® OEM linear actuators are compact actuators for nanopositioning with travel ranges to 10 mm, high resolution, and generated forces to 50 N. The operating principle is based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives thus combine long travel ranges with piezo-class precision. For closed-loop operation without an additional position sensor the N-111.2A is equipped with a linear encoder that provides 5 nm resolution over the full travel range. In open-loop operation position resolution down to 25 pico-meters can be achieved by use of a high-dynamics analog mode.
NEXLINE® Working Principle for Application Flexibility
NEXLINE® PiezoWalk® drives can be used wherever high loads must be positioned very precisely over long distances and then perhaps subjected to small-amplitude dynamic adjustment, as for active vibration control. By varying the combination of longitudinal and shear piezo elements, the step size, dynamic operating range (analog travel), clamping force, speed and stiffness can all be optimized for a particular application.
One Working Principle – Different Operating Modes
NEXLINE® PiezoWalk® drives overcome the limitations of conventional nanopositioning systems in their combination of long travel ranges and high resolution and stiffness. The piezoceramic clamping and shear elements act directly on a moving runner that is coupled to the moved object. While in full step mode the runner can be moved over larger distances with maximum velocity, nanostepping mode allows uniform motion with highly constant speed. In open-loop operation any position resolution may be achieved which only depends on the stability of the control signal. Analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one nanometer.
Choice of Controllers for Optimization
NEXLINE®operation is supported by two motion controller models providing different features. The E-755 controller offers full functionality for nanometer precise positioning. The E-712 supplies more sophisticated linearization algorithms resulting in very smooth motion with highly constant velocity. It can also provide higher speed with maximum force.
Patented Technology
The products described in this document are in part protected by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
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