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- Wire bonding
- Pneumatic valves
- Fiber optic switches
- (Laser)-Beam steering
- Micropositioning
- Acceleration sensors
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PICMA® multilayer bender piezo actuators provide a deflection of up to 2 mm, forces up to 2 N and response times in the millisecond range. These multilayer piezoelectric components are manufactured from ceramic layers of only about 50 µm thickness. They feature internal silver-palladium electrodes and ceramic insulation applied in a cofiring process. The benders have two outer active areas and one central electrode network dividing the actuator in two segments of equal capacitance, similar to a classical parallel bimorph.
Advantages
PICMA® Bender piezo actuators offer several advantages over classic bimorph components manufactured by gluing together two ceramic plates (0.1 to 1 mm thick): faster response time and higher stiffness. The main advantage, however, is the drastically reduced (by a factor of 3 to 10) operating voltage of only 60 V. The reduced voltage allows smaller drive electronics and new applications, such as in medical equipment. Additionally, these devices offer improved humidity resistance due to the ceramic encapsulation.
Increased Lifetime Through Humidity Resistance
The monolithic ceramic-encapsulated design provides better humidity protection than polymer-film insulation. Diffusion of water molecules into the insulation layer is greatly reduced by the use of cofired, outer ceramic encapsulation. Due to their high resonant frequency the actuators are suitable for highly dynamic applications with small loads; depending on the load an external preload for dynamic applications is recommended. The high Curie temperature of 320 °C gives PICMA® actuators a usable temperature range extending up to 150 °C, far beyond 80 °C as is common for conventional multilayer actuators. With conventional multilayer actuators, heat generation - which is proportional to operating frequency - either limits the operating frequency or duty cycle in dynamic operation, or makes ungainly cooling provisions necessary. At the low end, operation down to a few Kelvin is possible (with reduction in performance specifications).
Optimum UHV Compatibility - Minimum Outgassing
The lack of polymer insulation and the high Curie temperature make for optimal ultra-high-vacuum compatibility (high bakeout temperatures, up to 150 °C).
Closed-Loop Version
For closed-loop positioning the versions P-871 with integrated strain gauge sensors are available (see link).
Drivers and Controllers
PI offers a wide selection of low noise amplifiers and controllers for piezo actuators (see section "Piezo Electronics"). Customized piezo electronics are developed on request.
The E-650.00 and E-650.0E piezo amplifiers (see link) are especially designed for operating the PICMA® bender actuators.
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PDF Catalog Datasheet
