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M-664 PILine® Linear Motor Stage
Low-Profile High-Speed with Ultrasonic Piezo Linear Drives & Direct Position Measurement
Fast and compact M-664 piezo translation stage with linear encoder
Fast and compact M-664 piezo translation stage with linear encoder
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 4 N Drive Force
  • Self Locking at Rest
M-664 dimensions in mm
 
Description   Specifications   Downloads   CAD/Video
Drawings & Images   Models/Get Price Quote   Related Info   ?? Questions ??
 
PDF Catalog Datasheet
 
Application Examples
  • Biotechnology
  • Micromanipulation
  • Microscopy
  • Quality assurance testing
  • Metrology
  • Mass storage device testing
  • R&D
  • Photonics packaging

M-664 micropositioning systems are low-profile, high-accuracy translation stages with linear encoders. The M-664 stage is next-larger in the series of piezomotor-driven stages of which the M-663 (see link) is the smallest. For improved guiding accuracy, the M-664 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated P-664 PILine® linear motor can generate forces up to 4 N and maximum closed-loop velocities to 400 mm/s over a 25 mm travel range.

Advantages of PILine® Micropositioning Systems
The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:
  • Higher Accelerations, up to 5 g
  • Speeds up to 500 mm/s
  • Small Form Factor
  • Self-Locking When Powered Down
  • No Shafts, Gears or Other Rotating Parts
  • Non-Magnetic and Vacuum-Compatible Drive Principle

Optimized Controller and Drive Electronics
PILine® motors require a special drive electronics to generate the ultrasonic oscillations for the piezoceramic element. For optimum performance the highly specialized C-867 motion controller (see link) is recommended. This sophisticated controller also integrates the drive electronics. Furthermore, the controller has a number of special features, including dynamic parameter switching for an optimized high-speed motion and settling behavior to take into account the motion characteristics typical of piezomotors. The broad-band encoder input (50 MHz) supports the outstanding high accelerations and velocities of PILine® drives at high resolutions.

Optionally, for use with third party servo controllers, the C-185 analog drive electronics (stand-alone unit, see link) is available. It controls the motor speed by an analog ±10 V signal. For optimum performance this driver must be tuned together with the stage and should be ordered at the same time as the motor/stage.

Notes
The products described in this document are in part protected by the following patents: US Pat. No. 6,765,335 German Patent No. 10154526

Papers & Articles
 
Related Information:
 
M-663 PILine® Linear Motor Stage
Compact, Fast, with Ultrasonic Piezo Linear Drives, Direct Position Measurement
 
M-683 PILine® Precision Micro Translation Stage
Low-Profile & High-Speed with Ultrasonic Piezomotors, Direct Position Metrology
 
M-686 PILine® XY Piezo Linear-Motor Stage
Fast, Low Profile and Large Aperture with Direct Position Measurement
 
M-122 Precision Micro-Translation Stage
Fast & Compact with Direct Position Measurement
 
M-126 High-Resolution Translation Stage
Compact Linear Stage with Crossed Roller Bearings
 
M-605 High-Accuracy Translation Stage
Ultra-Compact, with Direct Position Measurement
 
C-867 Controller for PILine® Piezo Linear Drives
Servo-Controller with Integrated Driver for High-Speed Ultrasonic Piezo Motors
 
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