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- Semiconductor technology
- Semiconductor testing
- Wafer inspection
- Nano lithography
- Nano imprint
- Nanometrology
- Active vibration damping
- Motion in strong magnetic fields
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The innovative N-214 / N-215 NEXLINE® OEM linear drives are ultra-precision nanopositioning actuators with travel ranges to 20 mm and push / pull forces to 400 N. The novel, patented NEXLINE® PiezoWalk® drive design combines long travel ranges with high mechanical stiffness and piezo-class resolution of better than 0.1 nm.
PiezoWalk® supports two different motion modes: a high-resolution, high-dynamics short range (analog) mode and a stepping mode with virtually unlimited travel range.
Two versions are available, the N-214 closed-loop model and N-215 open-loop model. Both can be operated with the sophisticated E-755 NEXLINE® motion controller. The N-214 is equipped with a 5 nm resolution linear encoder for long-range position control. Due to its low-noise, 24 bit D/A converters, the E-755 controller can provide picometer level resolution in the highly-dynamic short-range / dithering mode.
NEXLINE® Working Principle for Application Flexibility
NEXLINE® PiezoWalk® drives can be used wherever high loads must be positioned very precisely over long distances and then perhaps subjected to small-amplitude dynamic adjustment, as for active vibration control. By varying the combination of longitudinal and shear piezo elements, the step size, dynamic operating range (analog travel), clamping force, speed and stiffness can all be optimized for a particular application.
NEXLINE® PiezoWalk® Piezoceramic clamping and shear elements act directly on a moving runner that is coupled to the moved object. While the runner can be moved larger distances in step mode, analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one nanometer. The patented PiezoWalk® overcomes the limitations of conventional nanopositioning actuators and combines long travel ranges with high resolution and stiffness.
High-Resolution Dynamic Operation
In analog mode the motion is effectuated exclusively by the very stiff shear elements, providing a resonant frequency in the direction of motion of several kilohertz. The motion resolution here is limited only by the stability of the drive electronics, or, in closed-loop operation, by the sensor.
Basically Unlimited Travel Range
Step mode involves a sequence of coordinated shear and clamping moves. That is why piezo stepping drives have no intrinsic travel limitation and can be used flexibly. The max. step frequency of 100 Hz and is determined by the controller. It allows velocities up to 1 mm/s, depending on the step size and / or analog range.
Unlimited Lifetime
The application area of NEXLINE® drives often lies in the difficult-to-access internals of machines, where nanometer-realm adjustment and vibration cancellation are required.
Long lifetime is therefore a basic requirement for NEXLINE® actuators. To promote long lifetime, the controller can reduce the operating voltage on all the piezo elements to zero at any position and still maintain the full holding force.
Note
The products described in this document are in part protected by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
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