|
- Semiconductor technology
- Semiconductor testing
- Wafer inspection
- Nano lithography
- Nano-imprinting
- Nanometrology
- Active vibration damping
- Motion in strong magnetic fields
|
|
N-216 NEXLINE® high-load linear actuators are ultra-precision nanopositioning actuators with travel ranges to 20 mm and push / pull forces to 600 N. The operating principle is based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives combine long travel ranges with piezo-class precision.
N-216 comes in two versions for open- or closed-loop operation, as well as in two different load configurations. Closed-loop versions are equipped with a linear encoder for direct position measurement of the moving runner. The encoder features 5 nm resolution over the full travel range. In open-loop operation a positioning resolution to 30 picometers can be realized by use of the high-dynamics analog operation mode.
Unlimited Lifetime
The application area of NEXLINE® drives often lies in the difficult-to-access internals of machines, where nanometer-realm adjustment and vibration cancellation are required. Long lifetime is therefore a basic requirement for NEXLINE® actuators. To promote long lifetime, the controller can reduce the operating voltage on all the piezo elements to zero at any position and still maintain the full holding force.
One Working Principle – Different Operating Modes
NEXLINE® PiezoWalk® drives overcome the limitations of conventional nanopositioning systems in their combination of long travel ranges and high resolution and stiffness. The piezoceramic clamping and shear elements act directly on a moving runner that is coupled to the moved object. While in full step mode the runner can be moved over larger distances with maximum velocity, nanostepping mode allows uniform motion with highly constant speed. In open-loop operation any position resolution may be achieved which only depends on the stability of the control signal. Analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one nanometer.
Choice of Controllers for Optimization
NEXLINE®operation is supported by two motion controller models providing different features. The E-755 controller offers full functionality for nanometer precise positioning. The E-712 supplies more sophisticated linearization algorithms resulting in very smooth motion with highly constant velocity. It can also provide higher speed with maximum force.
Patented Technology
The products described in this document are in part protected by the following patents:
German Patent No. 10148267
US Patent No. 6,800,984
|
PDF Catalog Datasheet
