N-510 High-Force NEXLINE® Z/Tip/Tilt Platform
Nanometer Precision for Semiconductor Industry, Wafer Alignment
Z, tip, tilt nanopositioning platform with 3 integrated drives (tripod design)
Z, tip, tilt nanopositioning platform with 3 integrated drives (tripod design)
  • Self Locking at Rest, No Heat Generation
  • Vacuum Compatible and Non-Magnetic Designs Feasible
  • Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy
  • NEXLINE® Piezo Walking Drive Free from Wear and Tear
  • Load Capacity 200 N
  • High Precision with Integrated 5 nm Incremental Sensors + Picometer Resolution Dithering Mode
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