- Autofocus systems
- Confocal microscopy
- Semiconductor testing
Direct Drive for Ultra-Fast Scanning and Positioning
The P-725.xDD objective positioners were designed for extremely fast motion over relatively short travel ranges up to 18 µm. Their ultra-stiff direct piezo drive (1.2 kHz resonant frequency) enables the highest scanning rates and response times of only 5 msecs – essential for time-critical tasks.
Superior Accuracy With Direct-Metrology Capacitive Sensors
Capacitive position feedback is used in the top-of-the-line model. PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.
Alternatively compact, more cost-efficient strain gauge sensors (SGS) featuring nanometer resolution are implemented. Absolute-measuring SGS-sensors are applied to appropriate places on the drive train and thus measure the displacement of the moving part of the stage relative to the base.
Simple Installation with QuickLock Thread Options
The PIFOC® is mounted between the turret and the objective with the QuickLock thread adapter. After threading the adapter into the turret, the QuickLock is affixed in the desired position. Because the PIFOC® body need not to be rotated, cable wind-up is not an issue.
High Reliability and Long Lifetime
The compact PIFOC® systems are equipped with preloaded PICMA® high-performance piezo actuators which are integrated into a sophisticated, FEA-modeled, flexure guiding system. The PICMA® actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators. Actuators, guidance and sensors are maintenance-free and not subject to wear, and thus offer an extraordinary reliability.